[Scan]
initial_time=2016-01-28T21:37:13
final_time=2016-01-28T21:37:33
ip_count=19
run=1026
dataset=8
scan=628
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=1.3913E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.0219E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=2.45762E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.75064E-10
mult1=-8.86143E-9
mult2=-2.73458E-9
rf_tmon=-4.97506E-3
rf_agc=3.27988E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.70488E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12428E2
lens4a_imon=2.05235E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53577E1
cs_ef1b_imon=3.18412E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=1.09175E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.50432E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6467E1
os_ef1alow_imon=2.98279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.39897E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84474E1
cs_ef1a_imon=3.04754E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.1308E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.112E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.47212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63874E1
os_ef1bup_imon=3.09849E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.63623E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01721E1
cs_anode1_imon=1.94815E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.09705E-8
tplens_vset=1.4E-1
tplens_vmon=1.65146E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02888E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.9807E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=8.43283E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74643E1
cs_ef2b_imon=3.14485E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47036E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7111E1
cs_ef2a_imon=3.19545E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07962E0
os_ef2alow_imon=-2.42502E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85236E-1
os_ef2bup_imon=-5.14254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1087E1
os_restr2_imon=3.35963E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01986E1
cs_anode2_imon=2.10914E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71825E1
iondef1_imon=1.09918E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.75272E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.11498E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13899E0
cs_ionaccel_imon=-9.45952E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56505E1
einzel_imon=7.75153E-6
window_vset=0.0E0
window_vmon=2.39633E-1
window_imon=-1.02026E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86733E1
mask2_imon=-5.35493E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.80117E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.41034E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07677E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60153E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31749E1
cs_fil1_imon=6.80362E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.31001E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.44351E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25672E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27427E-1
cs_fil2_imon=-1.93043E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6316E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6721E-1
res40_imon=-2.41087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15988E-1	-7.9813E-1	-9.13146E0	-9.14183E0	4.72069E-3	9.36747E-2	2.73428E1	-3.2672E1	-3.25924E1	2.68296E1	1.198E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00966E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15868E-1	-7.98202E-1	-9.13148E0	-9.14207E0	4.81606E-3	9.37223E-2	2.72347E1	-3.26438E1	-3.26444E1	2.67814E1	1.20055E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.15725E-1	-7.97963E-1	-9.13136E0	-9.14154E0	5.14984E-3	9.36508E-2	2.74307E1	-3.26502E1	-3.25977E1	2.67972E1	1.19819E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.97762E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.15511E-1	-7.9813E-1	-9.13146E0	-9.14197E0	4.98295E-3	9.34124E-2	2.74408E1	-3.26909E1	-3.25942E1	2.68088E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.15678E-1	-7.9813E-1	-9.13141E0	-9.14171E0	4.88758E-3	9.37223E-2	2.72186E1	-3.26843E1	-3.2596E1	2.68412E1	1.19646E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.15582E-1	-7.9844E-1	-9.13129E0	-9.14226E0	5.10216E-3	9.37462E-2	2.7318E1	-3.26903E1	-3.25489E1	2.67722E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.15725E-1	-7.98082E-1	-9.13136E0	-9.14221E0	4.74453E-3	9.36031E-2	2.73417E1	-3.2675E1	-3.26107E1	2.67974E1	1.20043E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01478E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.15558E-1	-7.97963E-1	-9.13131E0	-9.14199E0	5.00679E-3	9.36985E-2	2.72502E1	-3.2662E1	-3.26337E1	2.67952E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15654E-1	-7.98154E-1	-9.13136E0	-9.14192E0	4.8399E-3	9.35078E-2	2.71075E1	-3.2629E1	-3.26278E1	2.6787E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.15606E-1	-7.98178E-1	-9.1315E0	-9.14197E0	4.95911E-3	9.33886E-2	2.71772E1	-3.26107E1	-3.26315E1	2.67998E1	1.20106E-7	2.50989E-3	2.50989E-3	6.31817E-3	3.00197E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.15606E-1	-7.98249E-1	-9.13165E0	-9.14171E0	4.98295E-3	9.37223E-2	2.72856E1	-3.26431E1	-3.26166E1	2.68328E1	1.19809E-7	2.51826E-3	2.51826E-3	6.31014E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.15701E-1	-7.98178E-1	-9.13138E0	-9.14223E0	5.126E-3	9.377E-2	2.71735E1	-3.26741E1	-3.2641E1	2.68124E1					
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.15821E-1	-7.9813E-1	-9.13129E0	-9.14187E0	5.14984E-3	9.37223E-2	2.72937E1	-3.26554E1	-3.26224E1	2.67752E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.15701E-1	-7.97963E-1	-9.13174E0	-9.14204E0	5.10216E-3	9.39846E-2	2.74796E1	-3.26493E1	-3.26456E1	2.67907E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9952E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15678E-1	-7.9813E-1	-9.13138E0	-9.14204E0	4.72069E-3	9.40084E-2	2.74891E1	-3.27092E1	-3.26278E1	2.68076E1	1.19819E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.01742E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.15868E-1	-7.98082E-1	-9.13124E0	-9.14183E0	5.03063E-3	9.377E-2	2.74838E1	-3.26443E1	-3.26313E1	2.68253E1	1.19804E-7	2.51918E-3	2.51918E-3	6.32371E-3	3.00507E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.15868E-1	-7.98106E-1	-9.13146E0	-9.1418E0	4.76837E-3	9.36985E-2	2.73267E1	-3.26633E1	-3.25942E1	2.67758E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.15678E-1	-7.98368E-1	-9.1315E0	-9.14187E0	4.69685E-3	9.36747E-2	2.74424E1	-3.26654E1	-3.26388E1	2.67998E1	1.19953E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.15916E-1	-7.98273E-1	-9.13131E0	-9.14178E0	4.74453E-3	9.37939E-2	2.73538E1	-3.26663E1	-3.26104E1	2.68064E1	1.1949E-7	2.52448E-3	2.52448E-3	6.31798E-3	3.02875E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.15821E-1	-7.98249E-1	-9.13146E0	-9.14202E0	4.72069E-3	9.36747E-2	2.71825E1	-3.26494E1	-3.26068E1	2.68142E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02396E-1