[Scan]
initial_time=2016-01-28T21:37:40
final_time=2016-01-28T21:37:59
ip_count=19
run=1026
dataset=8
scan=629
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.15654E-1
ql1_imon=1.39425E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=2.0173E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=2.67076E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.75147E-10
mult1=-1.05953E-8
mult2=-2.76053E-9
rf_tmon=-4.27209E-3
rf_agc=3.34297E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.68827E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61687E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20403E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.21732E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=1.10094E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44165E0
lens1_imon=2.59904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.94378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.39907E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.05514E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.13022E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.47082E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63984E1
os_ef1bup_imon=3.11497E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=9.43403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=1.94332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.08787E-8
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.60167E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.97576E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24188E0
ionrepsh_imon=8.6878E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34307E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3975E0
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70981E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10141E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32262E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01503E1
cs_anode2_imon=2.08315E-5
iondef1_vset=2.763E1
iondef1_vmon=2.70924E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68035E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.75159E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.1154E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55961E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.87161E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.20617E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.57027E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.69631E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33205E1
os_fil1_imon=9.40606E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60186E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31739E1
cs_fil1_imon=7.53926E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01521E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48337E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-1.72293E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21686E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.42784E-1
res40_imon=-2.32037E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15582E-1	-7.9782E-1	-9.13167E0	-9.14207E0	4.55379E-3	9.39846E-2	2.73305E1	-3.26337E1	-3.26667E1	2.67854E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.99E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15463E-1	-7.98225E-1	-9.13165E0	-9.14192E0	4.79221E-3	9.36747E-2	2.72837E1	-3.26707E1	-3.2637E1	2.68418E1	1.19851E-7	2.50989E-3	2.50989E-3	6.30202E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.15463E-1	-7.97582E-1	-9.13136E0	-9.14199E0	4.79221E-3	9.37939E-2	2.74241E1	-3.26647E1	-3.26499E1	2.67839E1	1.19713E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.00942E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.15511E-1	-7.98035E-1	-9.1316E0	-9.14176E0	4.673E-3	9.36031E-2	2.73608E1	-3.26817E1	-3.25838E1	2.67722E1	1.20276E-7	2.5199E-3	2.5199E-3	6.33863E-3	2.99014E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09704E0	-8.15558E-1	-7.97868E-1	-9.13143E0	-9.14221E0	4.3869E-3	9.36747E-2	2.74175E1	-3.26699E1	-3.26362E1	2.6825E1	1.19978E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.0201E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.15654E-1	-7.98249E-1	-9.13177E0	-9.14171E0	4.41074E-3	9.36747E-2	2.73045E1	-3.26549E1	-3.26136E1	2.68298E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.15701E-1	-7.98249E-1	-9.1315E0	-9.1414E0	4.57764E-3	9.37939E-2	2.73634E1	-3.26639E1	-3.25936E1	2.68052E1	1.20036E-7	2.51484E-3	2.51484E-3	6.31555E-3	3.00766E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.15701E-1	-7.98512E-1	-9.13115E0	-9.14183E0	5.126E-3	9.39369E-2	2.71687E1	-3.2641E1	-3.26164E1	2.6801E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.1563E-1	-7.98559E-1	-9.13138E0	-9.14204E0	4.79221E-3	9.377E-2	2.73112E1	-3.26615E1	-3.26174E1	2.68196E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09688E0	-8.15439E-1	-7.98321E-1	-9.13112E0	-9.14223E0	4.79221E-3	9.39369E-2	2.71039E1	-3.27216E1	-3.2649E1	2.67923E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.1563E-1	-7.98488E-1	-9.13136E0	-9.14207E0	4.64916E-3	9.39131E-2	2.70945E1	-3.26661E1	-3.26201E1	2.67976E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.15511E-1	-7.98154E-1	-9.13157E0	-9.14197E0	4.55379E-3	9.36747E-2	2.71086E1	-3.26536E1	-3.26193E1	2.68132E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.15463E-1	-7.98106E-1	-9.13169E0	-9.14228E0	4.52995E-3	9.37939E-2	2.71382E1	-3.26531E1	-3.26166E1	2.6792E1	1.19713E-7	2.50914E-3	2.50914E-3	6.31858E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.15797E-1	-7.98202E-1	-9.13134E0	-9.1419E0	4.673E-3	9.37223E-2	2.72101E1	-3.26782E1	-3.26046E1	2.68151E1	1.19902E-7	2.52384E-3	2.52384E-3	6.34518E-3	3.02769E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.15797E-1	-7.97987E-1	-9.13126E0	-9.14211E0	4.62532E-3	9.39131E-2	2.72536E1	-3.26406E1	-3.26731E1	2.67995E1	1.20192E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.02368E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.15725E-1	-7.9813E-1	-9.13134E0	-9.14154E0	4.62532E-3	9.37939E-2	2.74832E1	-3.26644E1	-3.25912E1	2.67926E1	1.1995E-7	2.51527E-3	2.51527E-3	6.3016E-3	3.00363E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.1563E-1	-7.98178E-1	-9.13146E0	-9.14166E0	5.14984E-3	9.35078E-2	2.72939E1	-3.26797E1	-3.26307E1	2.68118E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.15678E-1	-7.98297E-1	-9.13143E0	-9.14173E0	4.8399E-3	9.33647E-2	2.7321E1	-3.2675E1	-3.26272E1	2.67897E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.15654E-1	-7.98392E-1	-9.13155E0	-9.14187E0	4.76837E-3	9.35316E-2	2.73747E1	-3.26891E1	-3.26213E1	2.6804E1	1.20004E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.15654E-1	-7.98059E-1	-9.13143E0	-9.14199E0	4.79221E-3	9.34124E-2	2.70924E1	-3.26747E1	-3.26344E1	2.68035E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0148E-1