[Scan]
initial_time=2016-01-28T21:38:06
final_time=2016-01-28T21:38:26
ip_count=19
run=1026
dataset=8
scan=630
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.15463E-1
ql1_imon=1.39046E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.03122E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=2.80631E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.48432E-10
mult1=-9.80059E-9
mult2=-2.76452E-9
rf_tmon=-4.44633E-3
rf_agc=3.34898E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.70749E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.18849E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=1.096E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43273E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03325E1
cs_ea2_imon=1.39543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.13465E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31437E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.44062E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=9.59376E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.0971E-8
tplens_vset=1.4E-1
tplens_vmon=1.69629E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.96484E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=8.66997E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.19994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45207E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.10009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71693E1
iondef1_imon=1.07193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.85861E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.13439E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.10744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.41189E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08026E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60269E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31739E1
cs_fil1_imon=7.17887E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82778E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6203E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41862E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21662E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.00144E-1
chamber_ion_pmon=1.19978E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7551E-1
res40_imon=-2.32037E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.15582E-1	-7.98321E-1	-9.13165E0	-9.14202E0	4.74453E-3	9.3627E-2	2.75281E1	-3.26632E1	-3.25959E1	2.67868E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9892E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.1532E-1	-7.98297E-1	-9.13165E0	-9.14168E0	4.57764E-3	9.36031E-2	2.72951E1	-3.26616E1	-3.26154E1	2.6797E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.15415E-1	-7.98392E-1	-9.13138E0	-9.14168E0	4.55379E-3	9.36508E-2	2.72251E1	-3.26602E1	-3.26173E1	2.6803E1	1.20045E-7	2.51611E-3	2.51611E-3	6.3131E-3	2.9917E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.15487E-1	-7.98082E-1	-9.13143E0	-9.14171E0	4.3869E-3	9.36031E-2	2.73309E1	-3.26657E1	-3.26122E1	2.67992E1	1.20028E-7	2.51575E-3	2.51575E-3	6.28667E-3	3.0223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.1563E-1	-7.98297E-1	-9.13169E0	-9.14218E0	4.64916E-3	9.38654E-2	2.74921E1	-3.26331E1	-3.26337E1	2.68059E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.15368E-1	-7.98321E-1	-9.13186E0	-9.14216E0	4.62532E-3	9.4223E-2	2.75293E1	-3.26738E1	-3.25936E1	2.67986E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.15678E-1	-7.98488E-1	-9.13181E0	-9.14192E0	4.86374E-3	9.36747E-2	2.75064E1	-3.26627E1	-3.2611E1	2.67812E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15701E-1	-7.98559E-1	-9.13157E0	-9.14197E0	4.8399E-3	9.377E-2	2.74589E1	-3.2632E1	-3.2644E1	2.68412E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.97187E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.15439E-1	-7.98559E-1	-9.13141E0	-9.14187E0	4.52995E-3	9.36985E-2	2.7352E1	-3.26512E1	-3.26356E1	2.68166E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.15487E-1	-7.98392E-1	-9.13174E0	-9.14187E0	4.72069E-3	9.37939E-2	2.73406E1	-3.27215E1	-3.26285E1	2.68148E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.15606E-1	-7.98559E-1	-9.13179E0	-9.14199E0	4.79221E-3	9.38177E-2	2.7252E1	-3.26803E1	-3.26136E1	2.67998E1	1.20031E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.0201E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.1563E-1	-7.98678E-1	-9.13131E0	-9.14152E0	4.74453E-3	9.39131E-2	2.73946E1	-3.26741E1	-3.26458E1	2.67926E1	1.20209E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.15606E-1	-7.98273E-1	-9.13131E0	-9.14211E0	4.74453E-3	9.377E-2	2.73134E1	-3.26626E1	-3.26071E1	2.68046E1	1.19809E-7	2.51007E-3	2.51007E-3	6.34037E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.15892E-1	-7.98488E-1	-9.1315E0	-9.14221E0	4.8399E-3	9.36747E-2	2.73784E1	-3.26963E1	-3.26422E1	2.67812E1	1.19902E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99686E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.15701E-1	-7.98321E-1	-9.13169E0	-9.14176E0	4.69685E-3	9.38177E-2	2.729E1	-3.26792E1	-3.26014E1	2.68054E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.15773E-1	-7.98273E-1	-9.13141E0	-9.14192E0	4.55379E-3	9.38177E-2	2.74877E1	-3.26852E1	-3.26763E1	2.67832E1	1.19822E-7	2.51854E-3	2.51854E-3	6.32273E-3	3.01365E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.1563E-1	-7.98512E-1	-9.13167E0	-9.14171E0	4.74453E-3	9.37223E-2	2.72163E1	-3.2678E1	-3.25985E1	2.67998E1	1.2006E-7	2.51642E-3	2.51642E-3	6.3016E-3	3.02025E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.15535E-1	-7.9844E-1	-9.13143E0	-9.14187E0	4.76837E-3	9.37939E-2	2.7367E1	-3.26413E1	-3.26467E1	2.68136E1	1.19861E-7	2.50898E-3	2.50898E-3	6.35692E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.15558E-1	-7.98416E-1	-9.13124E0	-9.14166E0	4.673E-3	9.41515E-2	2.73141E1	-3.26669E1	-3.26002E1	2.68196E1	1.20055E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15463E-1	-7.98583E-1	-9.13141E0	-9.14185E0	4.81606E-3	9.40084E-2	2.71693E1	-3.26735E1	-3.2614E1	2.67896E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00144E-1