[Scan]
initial_time=2016-01-28T21:38:33
final_time=2016-01-28T21:38:52
ip_count=19
run=1026
dataset=8
scan=631
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.1563E-1
ql1_imon=1.38678E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=1.95338E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=2.16591E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-2.50757E-10
mult1=-9.73136E-9
mult2=-2.94524E-9
rf_tmon=-3.56806E-3
rf_agc=3.34825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.71688E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62228E0
bslens_imon=2.70358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05309E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04573E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=1.09012E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41342E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.3897E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.1343E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.48704E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9329E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.10709E-8
tplens_vset=1.4E-1
tplens_vmon=1.63843E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26237E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26926E1
iondef2_imon=1.60059E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=3.9613E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29175E0
ionrepsh_imon=8.40301E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.1936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45277E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.09543E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.38274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75305E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68144E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.78238E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.12293E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86933E1
mask2_imon=-3.74232E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.91274E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.41249E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0847E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6026E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31751E1
cs_fil1_imon=7.71345E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.08296E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61957E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.3296E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34674E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21794E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.15701E-1	-7.98273E-1	-9.13143E0	-9.14216E0	4.86374E-3	9.40561E-2	2.74986E1	-3.26826E1	-3.2603E1	2.68337E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.15606E-1	-7.98321E-1	-9.13143E0	-9.14237E0	4.98295E-3	9.40561E-2	2.74042E1	-3.26795E1	-3.26032E1	2.68076E1	1.20158E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.15797E-1	-7.98345E-1	-9.13136E0	-9.14214E0	4.98295E-3	9.37462E-2	2.72951E1	-3.26602E1	-3.26437E1	2.68117E1	1.19766E-7	2.52697E-3	2.52697E-3	6.3074E-3	2.99879E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.15749E-1	-7.98249E-1	-9.13126E0	-9.14204E0	4.98295E-3	9.38892E-2	2.73906E1	-3.26496E1	-3.26313E1	2.68105E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.15654E-1	-7.98583E-1	-9.13129E0	-9.14173E0	5.126E-3	9.38654E-2	2.73364E1	-3.26785E1	-3.26319E1	2.68118E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.15678E-1	-7.9844E-1	-9.13112E0	-9.14185E0	5.00679E-3	9.39131E-2	2.71196E1	-3.26474E1	-3.26376E1	2.67776E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.1563E-1	-7.98512E-1	-9.13157E0	-9.14207E0	5.03063E-3	9.37939E-2	2.72738E1	-3.26183E1	-3.26107E1	2.67878E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.15845E-1	-7.98607E-1	-9.13167E0	-9.1419E0	5.14984E-3	9.39131E-2	2.71567E1	-3.26536E1	-3.26074E1	2.67938E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.15845E-1	-7.98583E-1	-9.13148E0	-9.14185E0	4.62532E-3	9.38177E-2	2.71582E1	-3.2662E1	-3.26331E1	2.67938E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15701E-1	-7.98178E-1	-9.13143E0	-9.14221E0	4.81606E-3	9.36985E-2	2.7057E1	-3.26398E1	-3.26819E1	2.67902E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.15773E-1	-7.9813E-1	-9.13155E0	-9.14173E0	4.62532E-3	9.37939E-2	2.73125E1	-3.26459E1	-3.26351E1	2.67853E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.15606E-1	-7.98297E-1	-9.13141E0	-9.14187E0	4.74453E-3	9.36985E-2	2.74082E1	-3.26546E1	-3.26228E1	2.68107E1	1.19831E-7	2.51265E-3	2.51265E-3	6.3074E-3	3.00494E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.15701E-1	-7.98011E-1	-9.13136E0	-9.14204E0	4.93526E-3	9.36508E-2	2.7409E1	-3.26657E1	-3.26218E1	2.67463E1	1.201E-7	2.51725E-3	2.51725E-3	6.3245E-3	2.989E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15868E-1	-7.98059E-1	-9.13138E0	-9.14199E0	4.74453E-3	9.3627E-2	2.7091E1	-3.26679E1	-3.26042E1	2.6813E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.15606E-1	-7.98059E-1	-9.13141E0	-9.14197E0	4.74453E-3	9.36985E-2	2.7117E1	-3.26452E1	-3.26482E1	2.67764E1	1.19705E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.15892E-1	-7.97939E-1	-9.13126E0	-9.14164E0	4.60148E-3	9.38654E-2	2.70197E1	-3.25311E1	-3.27257E1	2.67938E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.1594E-1	-7.98059E-1	-9.13124E0	-9.14164E0	4.81606E-3	9.38654E-2	2.73299E1	-3.26703E1	-3.26189E1	2.68059E1	1.19757E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15749E-1	-7.98321E-1	-9.13157E0	-9.14195E0	4.79221E-3	9.36747E-2	2.73326E1	-3.2664E1	-3.26358E1	2.67995E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.15558E-1	-7.98035E-1	-9.1316E0	-9.14183E0	4.76837E-3	9.37939E-2	2.73759E1	-3.26455E1	-3.26655E1	2.67956E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.1563E-1	-7.98011E-1	-9.13136E0	-9.14187E0	4.673E-3	9.39846E-2	2.75305E1	-3.26926E1	-3.26237E1	2.68144E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1