[Scan]
initial_time=2016-01-28T21:39:26
final_time=2016-01-28T21:39:47
ip_count=19
run=1026
dataset=8
scan=633
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08849E-4
ql1_vset=
ql1_vmon=-8.15582E-1
ql1_imon=1.39366E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.0171E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=2.47777E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.45559E-10
mult1=-9.58211E-9
mult2=-2.76441E-9
rf_tmon=-4.28531E-3
rf_agc=3.29788E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.75042E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62288E0
bslens_imon=2.67474E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05223E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=1.10959E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42423E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03426E1
cs_ea2_imon=1.38753E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.02703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.13857E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.31689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.48704E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=9.52415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.11429E-8
tplens_vset=1.4E-1
tplens_vmon=1.6174E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=4.01233E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=8.47151E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.475E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.20759E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37733E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75098E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.80453E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.14625E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.87011E1
mask2_imon=-4.93163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.5198E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3317E1
os_fil1_imon=9.41033E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08482E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60352E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31774E1
cs_fil1_imon=7.71345E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94191E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6233E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40603E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21811E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=3.00896E-1
chamber_ion_pmon=1.20088E-7
chamber_cvt_pmon=2.51322E-3
foreline_cvt_pmon=2.51322E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.99536E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.15678E-1	-7.98011E-1	-9.13136E0	-9.1424E0	4.55379E-3	9.39131E-2	2.75163E1	-3.2649E1	-3.26561E1	2.68117E1	1.19861E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00824E-1
2.0E0	3.9E1	1.0E0	3.16E2	1.6E2	-2.09518E0	-8.15916E-1	-7.98225E-1	-9.13155E0	-9.14214E0	4.60148E-3	9.38892E-2	2.74667E1	-3.26434E1	-3.26224E1	2.68094E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.15773E-1	-7.98154E-1	-9.13155E0	-9.14168E0	4.45843E-3	9.38892E-2	2.73409E1	-3.26747E1	-3.26551E1	2.68048E1	1.20004E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.00197E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.15797E-1	-7.98154E-1	-9.13167E0	-9.14207E0	4.3869E-3	9.35555E-2	2.71505E1	-3.26769E1	-3.26394E1	2.68076E1	1.19676E-7	2.51041E-3	2.51041E-3	6.32784E-3	3.00878E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.1563E-1	-7.97963E-1	-9.13148E0	-9.14211E0	4.43459E-3	9.36508E-2	2.73273E1	-3.26633E1	-3.26086E1	2.68064E1	1.20171E-7	2.51411E-3	2.51411E-3	6.31902E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.15511E-1	-7.9813E-1	-9.13155E0	-9.14254E0	4.3869E-3	9.35555E-2	2.74871E1	-3.26723E1	-3.2626E1	2.67962E1	1.20191E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.99879E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.15701E-1	-7.98321E-1	-9.13155E0	-9.14207E0	4.8399E-3	9.35316E-2	2.73297E1	-3.26705E1	-3.26116E1	2.6807E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.15821E-1	-7.98225E-1	-9.13186E0	-9.14218E0	4.673E-3	9.36747E-2	2.73424E1	-3.26401E1	-3.26297E1	2.67848E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.15797E-1	-7.9844E-1	-9.13172E0	-9.1418E0	4.673E-3	9.37939E-2	2.74529E1	-3.2647E1	-3.2629E1	2.67866E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.15749E-1	-7.98583E-1	-9.13167E0	-9.14204E0	4.76837E-3	9.36031E-2	2.72986E1	-3.26514E1	-3.26113E1	2.68046E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.15845E-1	-7.98607E-1	-9.13134E0	-9.14192E0	4.72069E-3	9.36747E-2	2.72918E1	-3.26656E1	-3.2627E1	2.68072E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.15606E-1	-7.98488E-1	-9.13153E0	-9.14173E0	4.88758E-3	9.38177E-2	2.71012E1	-3.26589E1	-3.26204E1	2.68091E1	1.19786E-7	2.51621E-3	2.51621E-3	6.33211E-3	2.99992E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.15678E-1	-7.98345E-1	-9.13162E0	-9.14202E0	5.24521E-3	9.39131E-2	2.71447E1	-3.26575E1	-3.26658E1	2.68272E1	1.20011E-7	2.51709E-3	2.51709E-3	6.32434E-3	3.00801E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.15368E-1	-7.98464E-1	-9.13155E0	-9.14221E0	5.05447E-3	9.36031E-2	2.72548E1	-3.26607E1	-3.2607E1	2.68158E1	1.19971E-7	2.51793E-3	2.51793E-3	6.32858E-3	3.00801E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.15463E-1	-7.98583E-1	-9.13165E0	-9.14178E0	4.86374E-3	9.37223E-2	2.72019E1	-3.26413E1	-3.26313E1	2.67716E1	1.19477E-7	2.51203E-3	2.51203E-3	6.35692E-3	3.02081E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.15463E-1	-7.98512E-1	-9.13188E0	-9.14185E0	4.86374E-3	9.34362E-2	2.706E1	-3.25864E1	-3.27287E1	2.6789E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.15439E-1	-7.98535E-1	-9.13146E0	-9.14223E0	4.79221E-3	9.34839E-2	2.73021E1	-3.26482E1	-3.26038E1	2.68076E1	1.19749E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.15701E-1	-7.98559E-1	-9.13157E0	-9.1418E0	4.57764E-3	9.36508E-2	2.7495E1	-3.26549E1	-3.26378E1	2.6818E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.15654E-1	-7.9875E-1	-9.13172E0	-9.14178E0	4.52995E-3	9.40323E-2	2.75234E1	-3.26726E1	-3.26455E1	2.68118E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.15582E-1	-7.98655E-1	-9.1316E0	-9.14204E0	4.69685E-3	9.38892E-2	2.75098E1	-3.26378E1	-3.26331E1	2.68123E1	1.20088E-7	2.51322E-3	2.51322E-3	6.31012E-3	3.00896E-1