[Scan]
initial_time=2016-01-28T21:40:46
final_time=2016-01-28T21:41:06
ip_count=19
run=1026
dataset=8
scan=636
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.1563E-1
ql1_imon=1.38546E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.04782E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=2.84421E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-2.67398E-10
mult1=-9.6561E-9
mult2=-2.73258E-9
rf_tmon=-4.66864E-3
rf_agc=3.26727E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.75035E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60644E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05377E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53611E1
cs_ef1b_imon=3.18322E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04562E2
lens23_imon=1.01856E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05116E1
cs_ea1_imon=1.11523E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36961E0
lens1_imon=2.59871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.97218E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03553E1
cs_ea2_imon=1.40664E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.03969E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.14178E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=4.31563E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.48085E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63899E1
os_ef1bup_imon=3.09746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27766E0
cs_ionrep_imon=9.2351E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01724E1
cs_anode1_imon=1.97661E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.11129E-8
tplens_vset=1.4E-1
tplens_vmon=1.60407E0
tplens_imon=-4.39284E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98198E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.97291E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=8.86936E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13456E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48216E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06032E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71207E1
cs_ef2a_imon=3.19234E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08395E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09249E-1
os_ef2bup_imon=-5.29049E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1086E1
os_restr2_imon=3.36932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01876E1
cs_anode2_imon=2.09094E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74986E1
iondef1_imon=1.10992E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.11301E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.83072E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.16595E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14839E0
cs_ionaccel_imon=-8.87347E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.47427E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5602E1
einzel_imon=7.70608E-6
window_vset=0.0E0
window_vmon=2.13776E-1
window_imon=-1.08196E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-7.23141E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92727E3
multa_neg_imon=7.08196E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.8106E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.34152E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70478E0
defgridb_imon=6.17941E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33142E1
os_fil1_imon=9.41974E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08282E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60429E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31768E1
cs_fil1_imon=7.79567E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16405E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62508E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99881E-2
os_fil2_imon=-2.56348E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15997E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.32623E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31618E-1
cs_fil2_imon=-2.09722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67343E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21794E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92366E-1
res40_imon=-2.46251E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15845E-1	-7.98535E-1	-9.13155E0	-9.14197E0	4.72069E-3	9.35793E-2	2.7203E1	-3.26975E1	-3.25972E1	2.68226E1	1.19967E-7	2.52194E-3	2.52194E-3	6.32443E-3	3.01528E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.15797E-1	-7.98488E-1	-9.13179E0	-9.14187E0	4.95911E-3	9.3627E-2	2.71831E1	-3.26753E1	-3.25731E1	2.67872E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15582E-1	-7.98249E-1	-9.13177E0	-9.14199E0	4.81606E-3	9.37462E-2	2.7304E1	-3.26693E1	-3.26277E1	2.68123E1	1.20209E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15868E-1	-7.98178E-1	-9.13167E0	-9.14178E0	4.86374E-3	9.37939E-2	2.74829E1	-3.26428E1	-3.26272E1	2.67792E1	1.19891E-7	2.52659E-3	2.52659E-3	6.32328E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15439E-1	-7.98059E-1	-9.1316E0	-9.14209E0	4.60148E-3	9.36985E-2	2.71969E1	-3.26338E1	-3.25966E1	2.67872E1	1.20158E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.15678E-1	-7.97963E-1	-9.13172E0	-9.1419E0	4.673E-3	9.35078E-2	2.72973E1	-3.26765E1	-3.26332E1	2.68082E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.15725E-1	-7.98464E-1	-9.13155E0	-9.14168E0	4.79221E-3	9.3627E-2	2.73623E1	-3.26467E1	-3.26231E1	2.67998E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15749E-1	-7.98416E-1	-9.13165E0	-9.14192E0	4.62532E-3	9.36508E-2	2.71903E1	-3.265E1	-3.26212E1	2.68076E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.15821E-1	-7.9813E-1	-9.13129E0	-9.14216E0	4.31538E-3	9.40084E-2	2.74557E1	-3.26456E1	-3.26113E1	2.6813E1	1.19646E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16035E-1	-7.98416E-1	-9.1316E0	-9.14197E0	4.31538E-3	9.39369E-2	2.71292E1	-3.26812E1	-3.26562E1	2.68099E1	1.20183E-7	2.51954E-3	2.51954E-3	6.31009E-3	2.99941E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.15892E-1	-7.98059E-1	-9.13155E0	-9.14202E0	4.57764E-3	9.36747E-2	2.71229E1	-3.26915E1	-3.26254E1	2.68013E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16917E-1	-7.98059E-1	-9.13174E0	-9.14204E0	4.50611E-3	9.36985E-2	2.72933E1	-3.26874E1	-3.26325E1	2.677E1	1.201E-7	2.51498E-3	2.51498E-3	6.33021E-3	2.97555E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16178E-1	-7.98321E-1	-9.13157E0	-9.14187E0	4.74453E-3	9.36747E-2	2.72961E1	-3.26753E1	-3.26212E1	2.68256E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16035E-1	-7.98297E-1	-9.13167E0	-9.1419E0	4.62532E-3	9.34601E-2	2.73246E1	-3.26738E1	-3.26337E1	2.6801E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.15916E-1	-7.98321E-1	-9.1316E0	-9.14199E0	4.48227E-3	9.35555E-2	2.74751E1	-3.26338E1	-3.26561E1	2.68172E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16131E-1	-7.98345E-1	-9.13155E0	-9.14202E0	4.43459E-3	9.37939E-2	2.72024E1	-3.26579E1	-3.27654E1	2.67866E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00041E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.15749E-1	-7.98273E-1	-9.1316E0	-9.1418E0	4.86374E-3	9.36985E-2	2.70798E1	-3.2659E1	-3.26478E1	2.67845E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.15606E-1	-7.98059E-1	-9.13126E0	-9.14192E0	4.79221E-3	9.37939E-2	2.72219E1	-3.26803E1	-3.26213E1	2.67998E1	1.19749E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9892E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1594E-1	-7.97987E-1	-9.13143E0	-9.14183E0	4.64916E-3	9.38654E-2	2.73826E1	-3.26603E1	-3.26428E1	2.67998E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.1563E-1	-7.98535E-1	-9.13153E0	-9.14173E0	4.95911E-3	9.40084E-2	2.74986E1	-3.26591E1	-3.26056E1	2.681E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.98156E-1