[Scan]
initial_time=2016-01-28T21:41:13
final_time=2016-01-28T21:41:32
ip_count=19
run=1026
dataset=8
scan=637
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=1.38088E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.01256E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=2.53534E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-2.19953E-10
mult1=-1.03304E-8
mult2=-2.71063E-9
rf_tmon=-4.30814E-3
rf_agc=3.33035E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.73934E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=1.09373E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43865E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.036E1
cs_ea2_imon=1.38537E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8404E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.14591E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=2.47407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.10632E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22746E0
cs_ionrep_imon=9.61428E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.96242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.11635E-8
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26711E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26206E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.96748E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30317E0
ionrepsh_imon=8.56523E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.1474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44016E0
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71005E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.38382E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.10045E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.08508E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.82968E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.1828E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-8.10312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.89327E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.19175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67624E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38051E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.41243E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08374E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60367E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3174E1
cs_fil1_imon=6.9386E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3893E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.32096E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21806E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=2.99732E-1
chamber_ion_pmon=1.20114E-7
chamber_cvt_pmon=2.51647E-3
foreline_cvt_pmon=2.51647E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55688E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.15678E-1	-7.98297E-1	-9.13186E0	-9.1418E0	4.52995E-3	9.38892E-2	2.71818E1	-3.2652E1	-3.26408E1	2.68262E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01871E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15797E-1	-7.98321E-1	-9.13131E0	-9.14211E0	4.74453E-3	9.40323E-2	2.71221E1	-3.2675E1	-3.26303E1	2.68026E1	1.20414E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.15773E-1	-7.98583E-1	-9.13148E0	-9.14214E0	4.64916E-3	9.40323E-2	2.72084E1	-3.26673E1	-3.26154E1	2.68215E1	1.19872E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.15701E-1	-7.98631E-1	-9.13174E0	-9.1423E0	4.74453E-3	9.36747E-2	2.71886E1	-3.26897E1	-3.26121E1	2.68146E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.15678E-1	-7.98464E-1	-9.1316E0	-9.14228E0	4.57764E-3	9.38892E-2	2.7282E1	-3.26809E1	-3.26048E1	2.67832E1	1.20092E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.15773E-1	-7.98368E-1	-9.13162E0	-9.14209E0	4.41074E-3	9.38177E-2	2.74463E1	-3.26693E1	-3.26284E1	2.68034E1	1.19883E-7	2.51611E-3	2.51611E-3	6.29603E-3	3.00251E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.15773E-1	-7.98321E-1	-9.13157E0	-9.14226E0	4.93526E-3	9.39131E-2	2.73871E1	-3.26809E1	-3.26449E1	2.6803E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15797E-1	-7.98416E-1	-9.13174E0	-9.1418E0	4.81606E-3	9.36031E-2	2.71561E1	-3.265E1	-3.26236E1	2.68144E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.15964E-1	-7.9813E-1	-9.13157E0	-9.14197E0	4.86374E-3	9.39131E-2	2.7332E1	-3.26744E1	-3.26058E1	2.68052E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16154E-1	-7.98225E-1	-9.13153E0	-9.14199E0	4.95911E-3	9.38892E-2	2.74455E1	-3.25871E1	-3.26148E1	2.68041E1	1.19925E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.01742E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09704E0	-8.15964E-1	-7.97987E-1	-9.13153E0	-9.14202E0	5.10216E-3	9.38177E-2	2.74453E1	-3.26621E1	-3.26303E1	2.68076E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.15749E-1	-7.97939E-1	-9.13126E0	-9.14209E0	4.86374E-3	9.37223E-2	2.71895E1	-3.2675E1	-3.25782E1	2.68154E1	1.19978E-7	2.51359E-3	2.51359E-3	6.28511E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.15654E-1	-7.97963E-1	-9.13148E0	-9.14207E0	4.93526E-3	9.377E-2	2.72775E1	-3.26326E1	-3.26434E1	2.68012E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.15296E-1	-7.97844E-1	-9.13157E0	-9.14199E0	4.79221E-3	9.37223E-2	2.73824E1	-3.26708E1	-3.26018E1	2.67776E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.15415E-1	-7.98035E-1	-9.13165E0	-9.14214E0	4.95911E-3	9.34839E-2	2.74865E1	-3.26639E1	-3.2605E1	2.67848E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.15606E-1	-7.98011E-1	-9.13143E0	-9.14209E0	4.74453E-3	9.40084E-2	2.74355E1	-3.25452E1	-3.2656E1	2.67866E1	1.19872E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.0201E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.15701E-1	-7.98225E-1	-9.13146E0	-9.14209E0	4.74453E-3	9.40561E-2	2.73514E1	-3.26706E1	-3.26312E1	2.68106E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.15749E-1	-7.98392E-1	-9.13136E0	-9.14209E0	4.62532E-3	9.39608E-2	2.72059E1	-3.26793E1	-3.26462E1	2.68052E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15821E-1	-7.98464E-1	-9.13134E0	-9.14223E0	4.76837E-3	9.377E-2	2.71494E1	-3.2636E1	-3.26154E1	2.68012E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.15916E-1	-7.98464E-1	-9.13165E0	-9.14223E0	4.98295E-3	9.39131E-2	2.73333E1	-3.26206E1	-3.26711E1	2.68016E1	1.20114E-7	2.51647E-3	2.51647E-3	6.31555E-3	2.99732E-1