[Scan]
initial_time=2016-01-28T21:41:40
final_time=2016-01-28T21:41:59
ip_count=19
run=1026
dataset=8
scan=638
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=1.39711E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.97883E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=2.76446E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.64561E-10
mult1=-1.02678E-8
mult2=-2.87416E-9
rf_tmon=-4.01986E-3
rf_agc=3.35274E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.67739E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19642E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.07724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40029E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04327E1
cs_ea2_imon=1.41738E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.14612E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.47884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=9.52297E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=1.96242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.12021E-8
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26697E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.99601E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=8.60981E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.19923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48098E0
os_ea2_imon=-4.08609E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74479E1
iondef1_imon=1.10768E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.81113E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.19765E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.11971E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54139E0
defgridb_imon=6.37644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.41741E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07918E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60518E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31774E1
cs_fil1_imon=8.206E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64758E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62695E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22246E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21777E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79114E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.15535E-1	-7.98202E-1	-9.13155E0	-9.14223E0	5.36442E-3	9.41753E-2	2.71034E1	-3.26703E1	-3.26449E1	2.67677E1	1.20055E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9892E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.15463E-1	-7.98416E-1	-9.13138E0	-9.14192E0	5.22137E-3	9.377E-2	2.73192E1	-3.26487E1	-3.26346E1	2.67889E1	1.20106E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.15678E-1	-7.98416E-1	-9.13157E0	-9.14211E0	5.05447E-3	9.36985E-2	2.74511E1	-3.26637E1	-3.2659E1	2.67897E1	1.20191E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.01742E-1
4.0E0	1.4E1	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.15535E-1	-7.98225E-1	-9.13134E0	-9.14207E0	4.79221E-3	9.35555E-2	2.71951E1	-3.26482E1	-3.26212E1	2.68154E1	1.20243E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1563E-1	-7.98368E-1	-9.13148E0	-9.14176E0	4.93526E-3	9.39369E-2	2.71851E1	-3.26529E1	-3.26089E1	2.67878E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.15749E-1	-7.98202E-1	-9.13131E0	-9.14211E0	5.17368E-3	9.38177E-2	2.7156E1	-3.26533E1	-3.26232E1	2.67943E1	1.19978E-7	2.51359E-3	2.51359E-3	6.29067E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.15964E-1	-7.98321E-1	-9.13157E0	-9.14221E0	5.05447E-3	9.42469E-2	2.73586E1	-3.26657E1	-3.25948E1	2.6798E1	1.19941E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.99594E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.16035E-1	-7.98512E-1	-9.13157E0	-9.14183E0	4.62532E-3	9.41038E-2	2.74325E1	-3.26573E1	-3.26308E1	2.6795E1	1.2026E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.15845E-1	-7.98035E-1	-9.13153E0	-9.14197E0	4.79221E-3	9.40084E-2	2.72048E1	-3.2613E1	-3.26107E1	2.68304E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.15845E-1	-7.98345E-1	-9.1315E0	-9.14223E0	4.91142E-3	9.41038E-2	2.72282E1	-3.27143E1	-3.26122E1	2.68024E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.15773E-1	-7.99036E-1	-9.13165E0	-9.14218E0	4.79221E-3	9.35316E-2	2.74577E1	-3.26645E1	-3.26158E1	2.67866E1	1.2026E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.15892E-1	-7.98726E-1	-9.13165E0	-9.14211E0	4.62532E-3	9.37223E-2	2.72438E1	-3.26567E1	-3.2608E1	2.67794E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.15701E-1	-7.9875E-1	-9.13138E0	-9.14216E0	4.72069E-3	9.36031E-2	2.72078E1	-3.26661E1	-3.26331E1	2.67908E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.15725E-1	-7.98941E-1	-9.13138E0	-9.14207E0	4.55379E-3	9.40084E-2	2.71251E1	-3.2678E1	-3.26291E1	2.6801E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.15749E-1	-7.98726E-1	-9.13131E0	-9.14199E0	5.05447E-3	9.35555E-2	2.73647E1	-3.26632E1	-3.26549E1	2.67854E1	1.19933E-7	2.51593E-3	2.51593E-3	6.30469E-3	3.00507E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.15821E-1	-7.98678E-1	-9.13141E0	-9.14178E0	4.41074E-3	9.37939E-2	2.74043E1	-3.26297E1	-3.25323E1	2.68142E1					
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.15845E-1	-7.98821E-1	-9.13169E0	-9.14195E0	4.72069E-3	9.38892E-2	2.73694E1	-3.26809E1	-3.2649E1	2.67962E1	1.20137E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.15845E-1	-7.98678E-1	-9.1316E0	-9.14207E0	4.76837E-3	9.40084E-2	2.7385E1	-3.26615E1	-3.2611E1	2.68328E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.15797E-1	-7.98702E-1	-9.13169E0	-9.14183E0	4.673E-3	9.408E-2	2.7206E1	-3.26296E1	-3.26467E1	2.68146E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.97704E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.15892E-1	-7.9844E-1	-9.13157E0	-9.14199E0	4.48227E-3	9.38892E-2	2.74479E1	-3.26838E1	-3.26697E1	2.67968E1	1.20209E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0071E-1