[Scan]
initial_time=2016-01-28T21:42:33
final_time=2016-01-28T21:42:53
ip_count=19
run=1026
dataset=8
scan=640
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.15392E-1
ql1_imon=1.38645E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.95884E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=2.53212E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.47145E-10
mult1=-9.99324E-9
mult2=-2.66472E-9
rf_tmon=-3.59316E-3
rf_agc=3.41807E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.71622E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.28541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.1838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04563E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=1.08039E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.39114E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84971E1
cs_ef1a_imon=3.05009E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.1422E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.31833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.46902E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.12243E-8
tplens_vset=1.4E-1
tplens_vmon=1.66847E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.0044E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=8.57605E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.19576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44797E0
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.08784E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.81684E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.17687E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-8.06708E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.88606E-6
window_vset=0.0E0
window_vmon=2.19145E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.11183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.33594E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.37703E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.39981E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07912E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60412E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31758E1
cs_fil1_imon=7.61735E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70164E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62584E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12632E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44856E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21817E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7611E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15797E-1	-7.98154E-1	-9.13138E0	-9.1419E0	4.81606E-3	9.38654E-2	2.74791E1	-3.26874E1	-3.26101E1	2.68034E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15773E-1	-7.98488E-1	-9.13141E0	-9.14223E0	4.95911E-3	9.38416E-2	2.75139E1	-3.26354E1	-3.26419E1	2.67986E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.15797E-1	-7.98249E-1	-9.1316E0	-9.14202E0	4.673E-3	9.38416E-2	2.74986E1	-3.26431E1	-3.26266E1	2.6825E1	1.20106E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.97901E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16011E-1	-7.98345E-1	-9.13134E0	-9.14228E0	4.86374E-3	9.39608E-2	2.72319E1	-3.26785E1	-3.25877E1	2.68007E1	1.198E-7	2.50882E-3	2.50882E-3	6.32896E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15988E-1	-7.98035E-1	-9.13157E0	-9.14173E0	4.76837E-3	9.38892E-2	2.7321E1	-3.26596E1	-3.25776E1	2.67932E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15845E-1	-7.98273E-1	-9.13208E0	-9.14199E0	4.74453E-3	9.37462E-2	2.73622E1	-3.26458E1	-3.26368E1	2.68112E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.15678E-1	-7.98082E-1	-9.13174E0	-9.14233E0	4.79221E-3	9.40084E-2	2.73267E1	-3.26524E1	-3.2647E1	2.68052E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.15558E-1	-7.98345E-1	-9.13141E0	-9.14218E0	4.8399E-3	9.40561E-2	2.73582E1	-3.2649E1	-3.26343E1	2.6814E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.1563E-1	-7.98392E-1	-9.13153E0	-9.14192E0	5.07832E-3	9.40561E-2	2.72107E1	-3.26484E1	-3.26178E1	2.68172E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.15535E-1	-7.98297E-1	-9.13143E0	-9.14204E0	4.93526E-3	9.37223E-2	2.74312E1	-3.27013E1	-3.26174E1	2.67956E1	1.19595E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00453E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.15749E-1	-7.98416E-1	-9.13129E0	-9.1418E0	4.62532E-3	9.38416E-2	2.73305E1	-3.26785E1	-3.2616E1	2.67992E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.15701E-1	-7.98368E-1	-9.13157E0	-9.14192E0	4.76837E-3	9.40084E-2	2.74313E1	-3.26711E1	-3.26242E1	2.68292E1	1.20466E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.1563E-1	-7.98249E-1	-9.13177E0	-9.14204E0	4.79221E-3	9.39369E-2	2.75127E1	-3.26408E1	-3.26567E1	2.68004E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.15463E-1	-7.98297E-1	-9.13165E0	-9.14202E0	4.8399E-3	9.38177E-2	2.74877E1	-3.26567E1	-3.2611E1	2.67995E1	1.19749E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.15487E-1	-7.98512E-1	-9.13162E0	-9.14178E0	5.03063E-3	9.41515E-2	2.73761E1	-3.26254E1	-3.26407E1	2.68038E1	1.19653E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.15606E-1	-7.98488E-1	-9.13155E0	-9.14176E0	4.673E-3	9.42707E-2	2.74523E1	-3.26975E1	-3.25797E1	2.67986E1	1.19925E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.00676E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.15654E-1	-7.9844E-1	-9.13188E0	-9.1418E0	4.86374E-3	9.41038E-2	2.70662E1	-3.2649E1	-3.26449E1	2.67891E1	1.19913E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-8.15511E-1	-7.98416E-1	-9.13172E0	-9.14168E0	4.72069E-3	9.41038E-2	2.70936E1	-3.26416E1	-3.26434E1	2.6792E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.15606E-1	-7.98774E-1	-9.13162E0	-9.14187E0	4.74453E-3	9.38654E-2	2.73971E1	-3.26608E1	-3.26455E1	2.67806E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.15392E-1	-7.98106E-1	-9.13155E0	-9.14199E0	4.69685E-3	9.36747E-2	2.73291E1	-3.26446E1	-3.26056E1	2.68088E1	1.19902E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00453E-1