[Scan]
initial_time=2016-01-28T21:43:26
final_time=2016-01-28T21:43:46
ip_count=19
run=1026
dataset=8
scan=642
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.38395E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.01651E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=2.48694E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-2.62272E-10
mult1=-1.0812E-8
mult2=-2.93419E-9
rf_tmon=-3.38888E-3
rf_agc=3.4367E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.69585E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64571E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=3.16567E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04557E2
lens23_imon=1.02406E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=1.08976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.399E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.99642E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.40952E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.02909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.13924E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11517E1
os_restr1_imon=4.32675E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.4546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=9.36914E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=1.96879E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.11132E-8
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98605E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.97723E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=8.30928E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74536E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47741E0
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.21397E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04471E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-4.99683E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=3.35889E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.10398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74199E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.12083E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.80024E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=7.15523E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15794E0
cs_ionaccel_imon=-9.75966E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47487E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56683E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.69235E-1
window_imon=-6.70144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.38959E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-2.39212E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92687E3
multa_neg_imon=7.58108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.40711E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08024E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60437E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31762E1
cs_fil1_imon=8.14464E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07453E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28279E-1
cs_fil2_imon=-1.68453E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21732E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.75048E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.15487E-1	-7.9813E-1	-9.13155E0	-9.14209E0	4.79221E-3	9.3627E-2	2.71191E1	-3.26573E1	-3.2633E1	2.68325E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.15773E-1	-7.98178E-1	-9.13193E0	-9.14187E0	4.76837E-3	9.377E-2	2.7356E1	-3.26383E1	-3.26503E1	2.6805E1	1.19841E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09742E0	-8.15773E-1	-7.98559E-1	-9.1321E0	-9.14178E0	4.76837E-3	9.36985E-2	2.72344E1	-3.26741E1	-3.26347E1	2.68076E1	1.20188E-7	2.52147E-3	2.52147E-3	6.31925E-3	2.99634E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09688E0	-8.15701E-1	-7.98631E-1	-9.1316E0	-9.14192E0	4.74453E-3	9.38654E-2	2.72925E1	-3.26476E1	-3.26422E1	2.68172E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09742E0	-8.15773E-1	-7.98392E-1	-9.13141E0	-9.14192E0	4.81606E-3	9.34839E-2	2.73552E1	-3.26413E1	-3.26514E1	2.68058E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09804E0	-8.15749E-1	-7.9844E-1	-9.13165E0	-9.14183E0	4.88758E-3	9.38892E-2	2.72264E1	-3.26506E1	-3.26206E1	2.6819E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09874E0	-8.15701E-1	-7.98416E-1	-9.13181E0	-9.14171E0	5.03063E-3	9.37223E-2	2.73912E1	-3.26455E1	-3.26113E1	2.67926E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.15678E-1	-7.98273E-1	-9.1315E0	-9.14171E0	4.8399E-3	9.36985E-2	2.71032E1	-3.26681E1	-3.26152E1	2.68028E1	1.19902E-7	2.5131E-3	2.5131E-3	6.28592E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09719E0	-8.15821E-1	-7.98202E-1	-9.13143E0	-9.14178E0	4.93526E-3	9.35078E-2	2.73442E1	-3.26681E1	-3.26278E1	2.67951E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.15487E-1	-7.98178E-1	-9.13155E0	-9.14202E0	5.05447E-3	9.38416E-2	2.73538E1	-3.26897E1	-3.25797E1	2.67914E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.15701E-1	-7.98488E-1	-9.13157E0	-9.14204E0	4.91142E-3	9.37939E-2	2.71477E1	-3.2653E1	-3.26164E1	2.67966E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.15749E-1	-7.98273E-1	-9.1315E0	-9.14171E0	4.93526E-3	9.38654E-2	2.72486E1	-3.26452E1	-3.2647E1	2.67739E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.15535E-1	-7.98202E-1	-9.1316E0	-9.14202E0	4.88758E-3	9.40323E-2	2.74247E1	-3.26621E1	-3.26446E1	2.68123E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.15296E-1	-7.98607E-1	-9.13148E0	-9.14204E0	4.93526E-3	9.37939E-2	2.71915E1	-3.26512E1	-3.2611E1	2.67908E1	1.19705E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15344E-1	-7.98512E-1	-9.13153E0	-9.14197E0	4.8399E-3	9.37223E-2	2.71175E1	-3.26585E1	-3.26502E1	2.68028E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-8.15535E-1	-7.98559E-1	-9.13177E0	-9.14152E0	4.86374E-3	9.40561E-2	2.70355E1	-3.26166E1	-3.26502E1	2.68082E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.15558E-1	-7.98488E-1	-9.13167E0	-9.1418E0	4.88758E-3	9.38177E-2	2.7066E1	-3.26693E1	-3.26236E1	2.67878E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15511E-1	-7.98059E-1	-9.13153E0	-9.14164E0	4.86374E-3	9.39131E-2	2.70726E1	-3.26494E1	-3.26428E1	2.68142E1	1.19913E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.15988E-1	-7.98178E-1	-9.13153E0	-9.14173E0	4.76837E-3	9.36031E-2	2.71771E1	-3.26296E1	-3.26136E1	2.6801E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.15988E-1	-7.98392E-1	-9.13129E0	-9.14187E0	4.98295E-3	9.36508E-2	2.74199E1	-3.26512E1	-3.2638E1	2.68154E1	1.2026E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00966E-1