[Scan]
initial_time=2016-01-28T21:46:43
final_time=2016-01-28T21:47:02
ip_count=19
run=1026
dataset=9
scan=649
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.85498E-6
ql1_vset=
ql1_vmon=-8.7999E1
ql1_imon=-9.49585E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.42776E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-3.09334E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.6405E-8
mult1=-1.23247E-8
mult2=-3.11914E-9
rf_tmon=-2.29145E-3
rf_agc=3.58929E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.32877E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66165E0
bslens_imon=2.63547E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19897E1
lens5a_imon=1.96897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.18374E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04562E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04913E1
cs_ea1_imon=1.07107E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06957E0
lens1_imon=1.59609E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64568E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03233E1
cs_ea2_imon=1.41104E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=3.04056E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.13065E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.31841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15375E1
os_ea1_imon=2.45008E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.10485E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25326E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93566E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=1.94933E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.88311E-8
tplens_vset=1.4E-1
tplens_vmon=1.66461E0
tplens_imon=-2.25444E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26714E1
iondef3_imon=1.50212E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26962E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98419E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=8.77905E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27238E0
ionrepsh_imon=8.51374E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33356E1
lens5b_imon=2.17442E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74524E1
cs_ef2b_imon=3.14829E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42301E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10669E0
os_ef2alow_imon=-2.47032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94914E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.37036E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30206E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.08869E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.10236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67722E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.85377E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.11668E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11856E0
cs_ionaccel_imon=-8.50857E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.91721E-6
window_vset=0.0E0
window_vmon=2.2927E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86721E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.76287E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.3133E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=6.58097E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.28896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33157E1
os_fil1_imon=9.40526E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08001E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60099E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31705E1
cs_fil1_imon=8.21415E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61951E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14051E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.06681E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14201E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.216E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25815E-1
res40_imon=-2.41125E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.7999E1	-5.72205E-4	-8.8001E1	6.19888E-4	5.05447E-3	9.36985E-2	2.74042E1	-3.26756E1	-3.26437E1	2.67884E1	1.19841E-7	2.51287E-3	2.51287E-3	6.3074E-3	2.99343E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.79986E1	-2.86102E-4	-8.80008E1	6.91414E-4	4.55379E-3	9.41038E-2	2.72384E1	-3.26837E1	-3.26296E1	2.68123E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.79987E1	0.0E0	-8.80008E1	7.15256E-4	4.86374E-3	9.38654E-2	2.72733E1	-3.26549E1	-3.26356E1	2.67926E1	1.19749E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.79987E1	-4.05312E-4	-8.80011E1	3.09944E-4	4.55379E-3	9.41038E-2	2.75051E1	-3.26555E1	-3.26496E1	2.67992E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79988E1	-5.72205E-4	-8.80007E1	3.09944E-4	4.95911E-3	9.40561E-2	2.74601E1	-3.26771E1	-3.2641E1	2.6807E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.79987E1	-3.09944E-4	-8.80007E1	5.00679E-4	4.60148E-3	9.41753E-2	2.72774E1	-3.26372E1	-3.26248E1	2.68023E1	1.19939E-7	2.52154E-3	2.52154E-3	6.31563E-3	3.00693E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.79992E1	-2.6226E-4	-8.80003E1	2.6226E-4	4.3869E-3	9.39846E-2	2.7102E1	-3.26422E1	-3.26422E1	2.67976E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.79989E1	-1.90735E-4	-8.80007E1	9.53674E-5	4.673E-3	9.40084E-2	2.71873E1	-3.26675E1	-3.2587E1	2.68028E1	1.20209E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.79989E1	-7.15256E-5	-8.80005E1	2.38419E-4	4.74453E-3	9.41038E-2	2.7266E1	-3.26392E1	-3.2638E1	2.67992E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31014E-3	3.00171E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79989E1	9.53674E-5	-8.80007E1	2.38419E-4	4.50611E-3	9.39131E-2	2.7203E1	-3.27062E1	-3.25965E1	2.68148E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.79987E1	7.15256E-5	-8.80009E1	4.05312E-4	4.64916E-3	9.40084E-2	2.74269E1	-3.26566E1	-3.26064E1	2.67746E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.79989E1	-1.66893E-4	-8.80005E1	3.09944E-4	4.76837E-3	9.39846E-2	2.71995E1	-3.2698E1	-3.26219E1	2.68076E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.79989E1	-7.15256E-5	-8.80007E1	2.38419E-4	4.55379E-3	9.41992E-2	2.72567E1	-3.26787E1	-3.26076E1	2.67854E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.79991E1	4.76837E-5	-8.80008E1	7.15256E-5	4.50611E-3	9.38416E-2	2.73116E1	-3.26531E1	-3.26331E1	2.68364E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.7999E1	-2.38419E-4	-8.80007E1	2.38419E-4	4.43459E-3	9.40323E-2	2.74559E1	-3.26975E1	-3.2617E1	2.67968E1	1.19959E-7	2.52026E-3	2.52026E-3	6.34007E-3	2.99217E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.79992E1	-2.38419E-4	-8.80008E1	2.14577E-4	4.64916E-3	9.41753E-2	2.7239E1	-3.2653E1	-3.25828E1	2.68406E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.79991E1	-1.66893E-4	-8.80003E1	2.38419E-4	4.57764E-3	9.40323E-2	2.72856E1	-3.2626E1	-3.26461E1	2.67839E1	1.19965E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.47923E-2	-8.7999E1	0.0E0	-8.80005E1	9.53674E-5	4.81606E-3	9.38654E-2	2.71937E1	-3.26829E1	-3.26395E1	2.68113E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.02253E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.79991E1	-1.66893E-4	-8.80007E1	-4.76837E-5	5.05447E-3	9.41753E-2	2.72402E1	-3.26797E1	-3.2629E1	2.68007E1	1.19978E-7	2.52027E-3	2.52027E-3	6.27954E-3	3.03081E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.7999E1	-3.33786E-4	-8.80005E1	1.43051E-4	4.91142E-3	9.41753E-2	2.73375E1	-3.26962E1	-3.26714E1	2.67722E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.03286E-1