[Scan]
initial_time=2016-01-28T21:47:10
final_time=2016-01-28T21:47:29
ip_count=19
run=1026
dataset=9
scan=650
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.90809E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-9.7543E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.46182E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.88899E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.64241E-8
mult1=-9.91312E-9
mult2=-2.79381E-9
rf_tmon=-2.86955E-3
rf_agc=3.41173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.42355E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68193E0
bslens_imon=2.59376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19637E1
lens5a_imon=1.98844E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05364E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=3.17818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04551E2
lens23_imon=1.02166E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05231E1
cs_ea1_imon=1.09436E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05741E0
lens1_imon=1.4049E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03551E1
cs_ea2_imon=1.3947E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=3.05098E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.13112E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14958E1
os_ea1_imon=2.47129E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23472E0
cs_ionrep_imon=9.45231E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01607E1
cs_anode1_imon=1.96323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.88196E-8
tplens_vset=1.4E-1
tplens_vmon=1.65244E0
tplens_imon=-1.62873E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.5188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.56991E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98561E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.73518E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2689E0
ionrepsh_imon=8.63888E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33715E1
lens5b_imon=2.19979E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45082E0
os_ea2_imon=-8.3378E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06151E0
os_ef2alow_imon=-2.46337E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=3.35959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.3038E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01937E1
cs_anode2_imon=2.08973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73954E1
iondef1_imon=1.09401E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.83241E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.1074E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-9.06461E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.66004E-6
window_vset=0.0E0
window_vmon=2.19423E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39258E-4
mask2_vset=0.0E0
mask2_vmon=-1.86703E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.74897E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.9112E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.31444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3108E0
defgridb_imon=6.25768E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.41134E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07682E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60214E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=7.5191E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25672E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61878E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12808E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14404E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4668E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30651E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5127E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21777E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28711E-1
res40_imon=-2.43557E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.44059E-2	-8.79992E1	-1.43051E-4	-8.80006E1	9.53674E-5	4.91142E-3	9.38177E-2	2.71681E1	-3.26651E1	-3.26122E1	2.68112E1	1.20192E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.02115E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.79991E1	-1.90735E-4	-8.80009E1	2.38419E-4	4.48227E-3	9.35793E-2	2.7406E1	-3.26595E1	-3.26108E1	2.68312E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.79989E1	-5.00679E-4	-8.80005E1	2.14577E-4	4.60148E-3	9.35078E-2	2.73296E1	-3.26678E1	-3.26217E1	2.67899E1	1.19779E-7	2.51521E-3	2.51521E-3	6.3121E-3	3.01048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.79989E1	-6.19888E-4	-8.80006E1	1.90735E-4	4.86374E-3	9.39369E-2	2.7275E1	-3.26543E1	-3.26567E1	2.67781E1	1.2039E-7	2.52075E-3	2.52075E-3	6.33319E-3	3.00075E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.7999E1	-2.14577E-4	-8.80007E1	3.09944E-4	4.62532E-3	9.41277E-2	2.72378E1	-3.26765E1	-3.26098E1	2.67962E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.79991E1	-3.8147E-4	-8.8001E1	3.8147E-4	5.126E-3	9.37223E-2	2.7123E1	-3.26903E1	-3.26068E1	2.67914E1	1.20062E-7	2.51755E-3	2.51755E-3	6.31012E-3	2.99088E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.79993E1	-3.09944E-4	-8.80008E1	5.24521E-4	5.126E-3	9.39369E-2	2.72282E1	-3.26855E1	-3.25761E1	2.68382E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.79993E1	-5.96046E-4	-8.80004E1	2.38419E-4	4.95911E-3	9.36508E-2	2.73605E1	-3.26703E1	-3.26319E1	2.68136E1	1.19861E-7	2.52318E-3	2.52318E-3	6.36244E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.79989E1	-3.57628E-4	-8.80009E1	4.76837E-4	4.79221E-3	9.377E-2	2.75124E1	-3.26404E1	-3.26843E1	2.68034E1	1.20158E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.79989E1	-2.86102E-4	-8.80007E1	1.43051E-4	4.79221E-3	9.39369E-2	2.73327E1	-3.26843E1	-3.26296E1	2.68232E1	1.19705E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.79993E1	-1.43051E-4	-8.80009E1	3.09944E-4	5.34058E-3	9.37939E-2	2.71573E1	-3.26867E1	-3.26248E1	2.6783E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.79992E1	-2.6226E-4	-8.8001E1	2.6226E-4	5.10216E-3	9.39131E-2	2.73327E1	-3.26687E1	-3.26116E1	2.67866E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.79991E1	-2.86102E-4	-8.80007E1	3.33786E-4	4.74453E-3	9.36747E-2	2.72925E1	-3.26975E1	-3.26428E1	2.67926E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79991E1	-3.33786E-4	-8.80008E1	1.43051E-4	4.72069E-3	9.38416E-2	2.73051E1	-3.26472E1	-3.26154E1	2.68841E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.79993E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.76837E-3	9.40084E-2	2.74104E1	-3.26903E1	-3.26425E1	2.67951E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.7999E1	-5.00679E-4	-8.80006E1	3.09944E-4	4.48227E-3	9.41038E-2	2.72019E1	-3.26484E1	-3.26419E1	2.68018E1	1.20191E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.00144E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.79991E1	-5.00679E-4	-8.80003E1	5.96046E-4	4.86374E-3	9.377E-2	2.73105E1	-3.26567E1	-3.26296E1	2.67722E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.79994E1	-3.33786E-4	-8.80005E1	2.14577E-4	4.95911E-3	9.40084E-2	2.73541E1	-3.26384E1	-3.26284E1	2.67794E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.79991E1	-2.86102E-4	-8.80002E1	3.8147E-4	4.69685E-3	9.40084E-2	2.71995E1	-3.26785E1	-3.25877E1	2.6814E1	1.19646E-7	2.51686E-3	2.51686E-3	6.31009E-3	3.00582E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.79994E1	-4.29153E-4	-8.80004E1	2.6226E-4	4.64916E-3	9.38177E-2	2.73954E1	-3.26661E1	-3.26419E1	2.67974E1