[Scan]
initial_time=2016-01-28T21:47:36
final_time=2016-01-28T21:47:56
ip_count=19
run=1026
dataset=9
scan=651
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80154E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-9.14741E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.46568E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.75701E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.64237E-8
mult1=-9.64702E-9
mult2=-2.83378E-9
rf_tmon=-4.92563E-3
rf_agc=3.23428E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.46169E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=3.18128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04554E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=1.0876E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06719E0
lens1_imon=1.66896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.39582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83493E1
cs_ef1a_imon=3.03207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12855E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=2.46866E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=1.97215E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.87939E-8
tplens_vset=1.4E-1
tplens_vmon=1.66547E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25979E1
iondef3_imon=1.51875E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=8.6447E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=8.54E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.14812E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46179E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.33949E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23002E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.82302E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.12903E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-6.01282E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-3.52609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=6.38424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.41003E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0805E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60172E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31739E1
cs_fil1_imon=8.14593E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76771E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61997E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64449E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21837E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.71015E-1
res40_imon=-2.22307E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.7999E1	-3.09944E-4	-8.80005E1	4.52995E-4	4.76837E-3	9.377E-2	2.72114E1	-3.26747E1	-3.26236E1	2.6819E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.79988E1	-4.52995E-4	-8.80007E1	4.29153E-4	4.55379E-3	9.40561E-2	2.73659E1	-3.26741E1	-3.26081E1	2.68082E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.7999E1	-3.8147E-4	-8.8E1	4.76837E-4	4.95911E-3	9.40561E-2	2.74594E1	-3.26499E1	-3.2634E1	2.68148E1	1.19891E-7	2.52131E-3	2.52131E-3	6.29684E-3	3.00097E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79992E1	-2.86102E-4	-8.80004E1	4.05312E-4	4.91142E-3	9.39369E-2	2.72125E1	-3.26738E1	-3.26649E1	2.68184E1	1.19713E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.99879E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44059E-2	-8.79991E1	-2.38419E-4	-8.80006E1	7.39098E-4	5.03063E-3	9.38654E-2	2.72907E1	-3.26314E1	-3.26597E1	2.6801E1	1.20106E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.7999E1	-3.09944E-4	-8.80006E1	5.00679E-4	5.00679E-3	9.38177E-2	2.73117E1	-3.26705E1	-3.26044E1	2.67974E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44831E-2	-8.7999E1	-3.57628E-4	-8.80004E1	6.91414E-4	5.07832E-3	9.38892E-2	2.72603E1	-3.26467E1	-3.26313E1	2.67619E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.79994E1	-2.86102E-4	-8.80007E1	6.4373E-4	4.76837E-3	9.40084E-2	2.72787E1	-3.26669E1	-3.25882E1	2.68334E1	1.20311E-7	2.50989E-3	2.50989E-3	6.32896E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.79992E1	-2.86102E-4	-8.80008E1	2.14577E-4	4.72069E-3	9.38892E-2	2.73033E1	-3.26621E1	-3.26119E1	2.67826E1	1.20017E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.79989E1	-4.29153E-4	-8.80005E1	6.19888E-4	4.52995E-3	9.39608E-2	2.73706E1	-3.2652E1	-3.26225E1	2.67682E1	1.19872E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.03349E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.79995E1	-5.96046E-4	-8.80008E1	2.14577E-4	4.3869E-3	9.40323E-2	2.73596E1	-3.26756E1	-3.26254E1	2.68038E1	1.20209E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.79992E1	-2.6226E-4	-8.80005E1	3.09944E-4	4.07696E-3	9.41515E-2	2.71543E1	-3.26765E1	-3.25936E1	2.67842E1	1.19872E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.0041E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.79991E1	-2.6226E-4	-8.8001E1	0.0E0	4.36306E-3	9.42469E-2	2.72336E1	-3.26615E1	-3.2638E1	2.67992E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.79995E1	-4.29153E-4	-8.8001E1	3.09944E-4	4.60148E-3	9.39846E-2	2.73446E1	-3.26661E1	-3.2659E1	2.6803E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.79993E1	-4.29153E-4	-8.80008E1	7.15256E-5	4.88758E-3	9.42469E-2	2.72855E1	-3.26321E1	-3.26548E1	2.67901E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.79992E1	-5.48363E-4	-8.80007E1	2.38419E-5	4.52995E-3	9.44138E-2	2.73411E1	-3.26633E1	-3.26296E1	2.6807E1	1.19713E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.79993E1	-1.90735E-4	-8.80008E1	7.15256E-5	4.72069E-3	9.41753E-2	2.73145E1	-3.26673E1	-3.26107E1	2.6843E1	1.20174E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.79994E1	-3.57628E-4	-8.80008E1	2.14577E-4	4.33922E-3	9.39846E-2	2.73309E1	-3.26669E1	-3.26404E1	2.67637E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.79992E1	-3.8147E-4	-8.80008E1	1.66893E-4	4.673E-3	9.36985E-2	2.73021E1	-3.26331E1	-3.26166E1	2.67848E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.03185E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.79995E1	-5.00679E-4	-8.80007E1	3.33786E-4	5.03063E-3	9.408E-2	2.72898E1	-3.26744E1	-3.25979E1	2.67992E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.02253E-1