[Scan]
initial_time=2016-01-28T21:52:29
final_time=2016-01-28T21:52:49
ip_count=19
run=1026
dataset=9
scan=662
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.81365E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.73168E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.44147E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.02087E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.63505E-8
mult1=-9.9812E-9
mult2=-2.79247E-9
rf_tmon=-4.26008E-3
rf_agc=3.27748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.55992E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.73439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05316E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0451E1
cs_ea1_imon=1.10237E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09082E0
lens1_imon=1.66548E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.39472E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.04829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.12305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11622E1
os_restr1_imon=4.31509E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15565E1
os_ea1_imon=2.46469E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.46634E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.87243E-8
tplens_vset=1.4E-1
tplens_vmon=1.62905E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.5225E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.5586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02869E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=8.81636E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=8.44345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.14704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47154E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06032E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.323E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.08423E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73718E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.86789E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.07362E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-8.28332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56645E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.6754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.75327E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21362E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33161E1
os_fil1_imon=9.42384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08074E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59899E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31749E1
cs_fil1_imon=7.91768E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86382E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.24551E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.07131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.97445E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.93239E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80002E1	-7.86781E-4	-8.80002E1	2.6226E-4	4.62532E-3	9.37462E-2	2.73381E1	-3.26791E1	-3.26183E1	2.681E1	1.19757E-7	2.50898E-3	2.50898E-3	6.33486E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80001E1	-4.29153E-4	-8.80003E1	7.15256E-5	4.76837E-3	9.38177E-2	2.73063E1	-3.26603E1	-3.26254E1	2.6822E1	1.1979E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.8E1	-5.24521E-4	-8.80003E1	4.76837E-5	4.52995E-3	9.40323E-2	2.72651E1	-3.26689E1	-3.26081E1	2.67902E1	1.19925E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.8E1	-5.24521E-4	-8.80004E1	-2.14577E-4	4.79221E-3	9.3627E-2	2.72751E1	-3.26891E1	-3.26116E1	2.6828E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80002E1	-1.90735E-4	-8.80006E1	2.14577E-4	4.48227E-3	9.37223E-2	2.72733E1	-3.265E1	-3.2614E1	2.68034E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.8E1	-2.6226E-4	-8.80005E1	2.14577E-4	4.81606E-3	9.36031E-2	2.72226E1	-3.26488E1	-3.26311E1	2.67976E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80003E1	-4.05312E-4	-8.80007E1	2.38419E-5	4.52995E-3	9.37223E-2	2.73178E1	-3.2689E1	-3.26216E1	2.68017E1	1.19979E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.00741E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80003E1	-3.09944E-4	-8.80004E1	3.09944E-4	4.79221E-3	9.35793E-2	2.71824E1	-3.26484E1	-3.26119E1	2.67986E1	1.20116E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.03139E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80003E1	-6.19888E-4	-8.80006E1	4.52995E-4	4.69685E-3	9.36508E-2	2.74084E1	-3.26579E1	-3.25954E1	2.6801E1	1.19907E-7	2.51918E-3	2.51918E-3	6.31012E-3	3.01414E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80001E1	-2.86102E-4	-8.80003E1	2.38419E-5	4.48227E-3	9.37223E-2	2.73597E1	-3.26807E1	-3.26015E1	2.68188E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80002E1	-3.57628E-4	-8.80004E1	-2.38419E-5	4.55379E-3	9.37939E-2	2.71585E1	-3.26728E1	-3.26703E1	2.68026E1	1.19732E-7	2.51679E-3	2.51679E-3	6.29703E-3	2.99753E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80004E1	-4.05312E-4	-8.80007E1	2.38419E-4	4.55379E-3	9.37939E-2	2.72018E1	-3.26567E1	-3.26272E1	2.6801E1	1.19883E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00522E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.79999E1	-5.72205E-4	-8.80005E1	2.86102E-4	4.86374E-3	9.36508E-2	2.74597E1	-3.26638E1	-3.26201E1	2.67956E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.79998E1	-4.76837E-4	-8.80007E1	4.29153E-4	5.19753E-3	9.36031E-2	2.73982E1	-3.2647E1	-3.26266E1	2.67992E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0148E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.8E1	-5.96046E-4	-8.80007E1	4.52995E-4	5.03063E-3	9.34839E-2	2.73225E1	-3.26651E1	-3.26386E1	2.67908E1	1.19978E-7	2.52473E-3	2.52473E-3	6.32978E-3	2.99348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80001E1	-5.96046E-4	-8.80005E1	2.86102E-4	5.05447E-3	9.40323E-2	2.72793E1	-3.2638E1	-3.26416E1	2.67992E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01223E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.79999E1	-9.05991E-4	-8.80001E1	1.43051E-4	4.69685E-3	9.35078E-2	2.73202E1	-3.26706E1	-3.26434E1	2.68186E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.8E1	-6.91414E-4	-8.80002E1	2.14577E-4	5.03063E-3	9.38416E-2	2.73877E1	-3.26389E1	-3.26597E1	2.6792E1	1.20092E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01356E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.8E1	-8.34465E-4	-8.80001E1	5.48363E-4	4.41074E-3	9.38416E-2	2.72108E1	-3.26488E1	-3.26476E1	2.6798E1	1.20297E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00676E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80006E1	-6.4373E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.39369E-2	2.73718E1	-3.26675E1	-3.2626E1	2.67758E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97445E-1