[Scan]
initial_time=2016-01-28T21:53:23
final_time=2016-01-28T21:53:42
ip_count=19
run=1026
dataset=9
scan=664
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.84693E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.13217E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.44898E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.94796E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.64153E-8
mult1=-9.63202E-9
mult2=-2.79446E-9
rf_tmon=-5.44971E-3
rf_agc=3.24804E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.57065E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68627E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19529E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53534E1
cs_ef1b_imon=3.19729E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02238E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=1.09069E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04953E0
lens1_imon=1.54868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64539E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.38906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.03187E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12342E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11204E1
os_restr1_imon=4.30937E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15418E1
os_ea1_imon=2.47672E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.09512E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.5973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=1.96462E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.87954E-8
tplens_vset=1.4E-1
tplens_vmon=1.66857E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.59045E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=9.07683E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=8.59919E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45856E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.1886E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.12869E-1
os_ef2bup_imon=-5.14974E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.08869E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74217E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.10588E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.82039E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.09732E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16026E0
cs_ionaccel_imon=-1.02114E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56538E1
einzel_imon=7.8338E-6
window_vset=0.0E0
window_vmon=2.20582E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86964E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.44888E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.60815E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.40932E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59851E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31778E1
cs_fil1_imon=8.40529E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.39573E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61757E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04557E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62363E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27155E-1
cs_fil2_imon=-2.16527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.57469E-1
res40_imon=-2.27919E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80003E1	2.38419E-5	-8.80003E1	7.39098E-4	4.64916E-3	9.37939E-2	2.75082E1	-3.2632E1	-3.26398E1	2.67884E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.02253E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80004E1	1.66893E-4	-8.80003E1	2.14577E-4	4.55379E-3	9.37939E-2	2.74737E1	-3.26735E1	-3.26214E1	2.67885E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80005E1	-1.90735E-4	-8.80004E1	6.19888E-4	4.48227E-3	9.39608E-2	2.74128E1	-3.26548E1	-3.2634E1	2.67963E1	1.20042E-7	2.52025E-3	2.52025E-3	6.32858E-3	2.99845E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80004E1	-4.29153E-4	-8.80004E1	3.09944E-4	4.673E-3	9.39131E-2	2.7489E1	-3.26573E1	-3.26344E1	2.6804E1	1.2035E-7	2.52027E-3	2.52027E-3	6.29624E-3	2.99613E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80005E1	-5.48363E-4	-8.80005E1	1.19209E-4	4.43459E-3	9.41277E-2	2.7495E1	-3.26691E1	-3.26012E1	2.68024E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80006E1	-7.15256E-4	-8.80003E1	3.09944E-4	4.95911E-3	9.42945E-2	2.74765E1	-3.2664E1	-3.26205E1	2.67939E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80005E1	-2.86102E-4	-8.80004E1	4.52995E-4	4.07696E-3	9.38892E-2	2.73971E1	-3.26655E1	-3.26018E1	2.67856E1	1.19978E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80005E1	-4.76837E-5	-8.80002E1	1.19209E-4	4.3869E-3	9.38416E-2	2.72163E1	-3.26597E1	-3.26517E1	2.68028E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80003E1	-4.29153E-4	-8.80001E1	2.6226E-4	4.76837E-3	9.36747E-2	2.71669E1	-3.26669E1	-3.26134E1	2.67914E1	1.20031E-7	2.51025E-3	2.51025E-3	6.31858E-3	2.99879E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.8E1	-6.67572E-4	-8.80002E1	4.05312E-4	4.72069E-3	9.408E-2	2.7419E1	-3.26909E1	-3.26065E1	2.68128E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80002E1	-6.4373E-4	-8.80006E1	7.15256E-5	4.81606E-3	9.38416E-2	2.73063E1	-3.26903E1	-3.26452E1	2.68238E1	1.19953E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80003E1	-7.15256E-4	-8.80004E1	2.38419E-4	4.93526E-3	9.377E-2	2.716E1	-3.26378E1	-3.26012E1	2.68088E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80003E1	-3.57628E-4	-8.80004E1	3.09944E-4	4.74453E-3	9.35793E-2	2.71945E1	-3.26675E1	-3.26218E1	2.6831E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80003E1	-5.24521E-4	-8.80004E1	2.6226E-4	4.64916E-3	9.36508E-2	2.73748E1	-3.26506E1	-3.26284E1	2.68202E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80002E1	-3.8147E-4	-8.80003E1	2.14577E-4	4.8399E-3	9.35793E-2	2.71104E1	-3.26374E1	-3.26284E1	2.68064E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80004E1	-5.96046E-4	-8.8E1	3.8147E-4	4.72069E-3	9.37223E-2	2.7233E1	-3.26386E1	-3.25689E1	2.6777E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80005E1	-5.96046E-4	-8.80001E1	4.29153E-4	4.69685E-3	9.38654E-2	2.74467E1	-3.2685E1	-3.25947E1	2.68221E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80005E1	-6.4373E-4	-8.80001E1	2.38419E-4	4.91142E-3	9.38654E-2	2.73234E1	-3.26549E1	-3.26449E1	2.6795E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80007E1	-5.72205E-4	-8.80002E1	3.57628E-4	5.00679E-3	9.39131E-2	2.72703E1	-3.26195E1	-3.26514E1	2.6814E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80005E1	-9.53674E-4	-8.8E1	9.53674E-5	4.69685E-3	9.408E-2	2.74217E1	-3.26518E1	-3.26362E1	2.6795E1	1.20311E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1