[Scan]
initial_time=2016-01-28T21:54:16
final_time=2016-01-28T21:54:35
ip_count=19
run=1026
dataset=9
scan=666
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.81444E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.10225E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.47107E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.92355E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.64134E-8
mult1=-1.01618E-8
mult2=-2.75654E-9
rf_tmon=-4.47037E-3
rf_agc=3.35198E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=6.2294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62341E0
bslens_imon=2.61462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20147E1
lens5a_imon=1.98844E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05055E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53435E1
cs_ef1b_imon=3.18478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04791E1
cs_ea1_imon=1.09506E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08116E0
lens1_imon=1.48485E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.40618E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84579E1
cs_ef1a_imon=3.03917E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.12251E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11094E1
os_restr1_imon=4.32223E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.4692E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24862E0
cs_ionrep_imon=9.42798E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93472E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.96184E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.86554E-8
tplens_vset=1.4E-1
tplens_vmon=1.63274E0
tplens_imon=-3.99255E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.50142E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.58138E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98575E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.48567E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23935E0
ionrepsh_imon=8.40597E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33779E1
lens5b_imon=2.17616E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.14655E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44792E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.19416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07367E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.20535E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=3.37279E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.30415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.09911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73568E1
iondef1_imon=1.07559E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08399E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.9222E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.08519E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47358E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-5.45035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92687E3
multa_neg_imon=7.4083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.36544E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.05025E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.14644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33183E1
os_fil1_imon=9.40926E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07868E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=5.88573E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.54633E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61476E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1032E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21934E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61471E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.20582E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.89498E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21743E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20023E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80004E1	-2.86102E-4	-8.80004E1	4.05312E-4	4.86374E-3	9.41038E-2	2.73141E1	-3.2647E1	-3.26416E1	2.68016E1	1.20042E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.00348E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80003E1	-4.05312E-4	-8.80004E1	4.52995E-4	4.72069E-3	9.41992E-2	2.73216E1	-3.26542E1	-3.26193E1	2.68094E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80005E1	-7.86781E-4	-8.80008E1	2.38419E-4	4.48227E-3	9.39131E-2	2.72949E1	-3.26778E1	-3.26072E1	2.67972E1	1.20191E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80007E1	-5.24521E-4	-8.80004E1	5.48363E-4	4.91142E-3	9.38177E-2	2.74373E1	-3.26711E1	-3.26158E1	2.68046E1	1.20474E-7	2.52197E-3	2.52197E-3	6.33863E-3	2.99506E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80004E1	-5.24521E-4	-8.80005E1	2.86102E-4	4.57764E-3	9.39131E-2	2.72342E1	-3.26639E1	-3.26404E1	2.68011E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80007E1	-1.90735E-4	-8.80004E1	3.8147E-4	4.95911E-3	9.38654E-2	2.73207E1	-3.26374E1	-3.26326E1	2.67946E1	1.20011E-7	2.51809E-3	2.51809E-3	6.31012E-3	3.01025E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80008E1	-4.29153E-4	-8.80004E1	3.8147E-4	5.22137E-3	9.37223E-2	2.73051E1	-3.26663E1	-3.25846E1	2.68176E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80007E1	-4.76837E-4	-8.80001E1	3.09944E-4	4.673E-3	9.37462E-2	2.72703E1	-3.2682E1	-3.26319E1	2.67995E1	1.19766E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80007E1	-5.72205E-4	-8.80001E1	3.33786E-4	4.79221E-3	9.34839E-2	2.73375E1	-3.26518E1	-3.262E1	2.68184E1	1.20311E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80007E1	-4.29153E-4	-8.80003E1	1.90735E-4	4.95911E-3	9.38177E-2	2.71789E1	-3.26603E1	-3.26278E1	2.67944E1	1.19902E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80005E1	-4.05312E-4	-8.80002E1	9.53674E-5	4.45843E-3	9.39369E-2	2.74384E1	-3.26815E1	-3.26431E1	2.67998E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80007E1	-3.8147E-4	-8.80004E1	3.09944E-4	4.60148E-3	9.41277E-2	2.7263E1	-3.26687E1	-3.2632E1	2.67878E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80007E1	-6.19888E-4	-8.80003E1	1.43051E-4	4.69685E-3	9.36508E-2	2.73081E1	-3.26368E1	-3.26422E1	2.6825E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80004E1	-4.76837E-4	-8.80004E1	1.90735E-4	4.91142E-3	9.41753E-2	2.73778E1	-3.26579E1	-3.26326E1	2.68004E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80005E1	-4.76837E-4	-8.79998E1	3.33786E-4	4.8399E-3	9.38177E-2	2.7203E1	-3.26703E1	-3.26425E1	2.67873E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80003E1	-3.09944E-4	-8.80003E1	3.33786E-4	5.03063E-3	9.38416E-2	2.74796E1	-3.26744E1	-3.26254E1	2.67932E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.03286E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80004E1	-4.29153E-4	-8.80005E1	3.33786E-4	4.62532E-3	9.39608E-2	2.72308E1	-3.26449E1	-3.26567E1	2.68058E1	1.20174E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80009E1	2.38419E-5	-8.80002E1	1.43051E-4	4.74453E-3	9.39131E-2	2.72786E1	-3.26319E1	-3.26236E1	2.67782E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.02253E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80009E1	2.38419E-5	-8.80005E1	2.14577E-4	4.98295E-3	9.39369E-2	2.74036E1	-3.26969E1	-3.2632E1	2.68134E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80008E1	0.0E0	-8.80001E1	2.14577E-4	4.673E-3	9.37462E-2	2.73568E1	-3.26609E1	-3.26188E1	2.67914E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01223E-1