[Scan]
initial_time=2016-01-28T21:55:36
final_time=2016-01-28T21:55:55
ip_count=19
run=1026
dataset=9
scan=669
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.83754E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.68228E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.43521E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.85571E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.63868E-8
mult1=-1.03505E-8
mult2=-3.02311E-9
rf_tmon=-3.91957E-3
rf_agc=3.28726E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.45192E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.77928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12435E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5346E1
cs_ef1b_imon=3.18164E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=1.09085E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08101E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.39402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.05946E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.12298E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.32302E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.47947E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=9.45566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=1.96206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87715E-8
tplens_vset=1.4E-1
tplens_vmon=1.61199E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26101E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26815E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.74221E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33459E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45337E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.21047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.36184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72491E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.8196E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.07044E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-8.3554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.42234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.082E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60153E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31763E1
cs_fil1_imon=7.305E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.14303E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26933E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7609E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18757E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80006E1	-3.09944E-4	-8.80004E1	2.14577E-4	4.60148E-3	9.36747E-2	2.73088E1	-3.26927E1	-3.26242E1	2.68256E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80007E1	-4.76837E-4	-8.80002E1	-2.38419E-5	4.55379E-3	9.377E-2	2.73417E1	-3.2662E1	-3.26136E1	2.67878E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80005E1	-2.6226E-4	-8.79999E1	3.57628E-4	4.8399E-3	9.36508E-2	2.73311E1	-3.26632E1	-3.26172E1	2.68136E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80007E1	-2.14577E-4	-8.80003E1	3.8147E-4	4.86374E-3	9.39369E-2	2.72732E1	-3.26596E1	-3.26343E1	2.68012E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80005E1	-3.57628E-4	-8.80003E1	4.52995E-4	5.17368E-3	9.38654E-2	2.72292E1	-3.2664E1	-3.25942E1	2.68069E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80008E1	-5.00679E-4	-8.80002E1	2.14577E-4	4.74453E-3	9.39131E-2	2.73345E1	-3.26506E1	-3.26524E1	2.67968E1	1.19872E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80007E1	-4.29153E-4	-8.80006E1	4.76837E-4	4.50611E-3	9.38892E-2	2.73694E1	-3.26615E1	-3.2635E1	2.68004E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80007E1	-5.24521E-4	-8.80004E1	7.86781E-4	4.33922E-3	9.42469E-2	2.72594E1	-3.26452E1	-3.26296E1	2.67607E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.47923E-2	-8.80005E1	-5.96046E-4	-8.80006E1	4.05312E-4	4.62532E-3	9.39369E-2	2.73246E1	-3.26366E1	-3.2636E1	2.68088E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80005E1	-7.86781E-4	-8.80007E1	3.09944E-4	4.673E-3	9.39131E-2	2.73141E1	-3.26573E1	-3.26362E1	2.67794E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80005E1	-6.67572E-4	-8.80004E1	5.00679E-4	4.76837E-3	9.42945E-2	2.72967E1	-3.26723E1	-3.259E1	2.67962E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80006E1	-6.91414E-4	-8.80005E1	4.29153E-4	4.81606E-3	9.41277E-2	2.73772E1	-3.26855E1	-3.2626E1	2.67884E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80003E1	-5.96046E-4	-8.80006E1	5.00679E-4	4.62532E-3	9.40323E-2	2.73766E1	-3.26747E1	-3.26314E1	2.6798E1	1.20278E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80004E1	-5.72205E-4	-8.80005E1	3.8147E-4	5.126E-3	9.40084E-2	2.73051E1	-3.26585E1	-3.26284E1	2.6804E1	1.19851E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80008E1	-5.24521E-4	-8.80006E1	6.4373E-4	4.98295E-3	9.408E-2	2.72078E1	-3.27197E1	-3.26332E1	2.68172E1	1.20158E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80006E1	-5.00679E-4	-8.80004E1	5.72205E-4	5.126E-3	9.39608E-2	2.73231E1	-3.26717E1	-3.26002E1	2.67613E1	1.19872E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.0041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80004E1	-5.72205E-4	-8.80004E1	8.82149E-4	4.98295E-3	9.40084E-2	2.73129E1	-3.26819E1	-3.26164E1	2.67994E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80005E1	-5.96046E-4	-8.80004E1	5.00679E-4	4.95911E-3	9.377E-2	2.73116E1	-3.26136E1	-3.26413E1	2.67946E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01995E-1
2.2E1	0.0E0	1.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80005E1	-3.8147E-4	-8.80002E1	4.76837E-4	5.126E-3	9.40084E-2	2.72889E1	-3.26687E1	-3.26188E1	2.6792E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80009E1	-1.19209E-4	-8.80005E1	4.52995E-4	5.03063E-3	9.38416E-2	2.72491E1	-3.26815E1	-3.26101E1	2.67938E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1