[Scan]
initial_time=2016-01-28T21:57:49
final_time=2016-01-28T21:58:09
ip_count=19
run=1026
dataset=9
scan=674
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.79144E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.66547E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.42258E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.87688E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.63558E-8
mult1=-9.70033E-9
mult2=-2.89964E-9
rf_tmon=-4.66285E-3
rf_agc=3.35215E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.26035E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.1611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04553E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=1.096E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03124E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03496E1
cs_ea2_imon=1.37738E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.03388E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12545E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.32121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.48486E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64014E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=9.53713E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=1.96854E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.88209E-8
tplens_vset=1.4E-1
tplens_vmon=1.655E0
tplens_imon=-1.43153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.51754E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.59824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.40104E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=8.59211E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.19321E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44854E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02194E1
cs_anode2_imon=2.11162E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7229E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.78083E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.08554E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-8.85996E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02168E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86957E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.71433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.75515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.32146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.39735E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08458E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59888E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=8.04382E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.91187E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61718E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.25151E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61857E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-1.88511E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64077E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.217E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.578E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80004E1	-5.24521E-4	-8.80003E1	2.14577E-4	5.17368E-3	9.37462E-2	2.72793E1	-3.26422E1	-3.26116E1	2.67682E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80005E1	-4.76837E-4	-8.80005E1	2.86102E-4	4.79221E-3	9.39131E-2	2.7218E1	-3.26681E1	-3.2653E1	2.67783E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80004E1	-4.52995E-4	-8.80003E1	3.57628E-4	4.74453E-3	9.39369E-2	2.74007E1	-3.26791E1	-3.26266E1	2.67775E1	1.19607E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80004E1	-6.91414E-4	-8.80002E1	1.90735E-4	4.673E-3	9.37223E-2	2.72266E1	-3.27033E1	-3.26313E1	2.67914E1	1.1979E-7	2.51393E-3	2.51393E-3	6.34982E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80007E1	-4.76837E-4	-8.80003E1	6.19888E-4	4.86374E-3	9.37939E-2	2.72204E1	-3.26579E1	-3.26717E1	2.68064E1	1.19809E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80006E1	-5.72205E-4	-8.80004E1	5.24521E-4	4.8399E-3	9.40084E-2	2.74084E1	-3.26723E1	-3.2605E1	2.68129E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80008E1	-2.86102E-4	-8.80003E1	4.29153E-4	4.48227E-3	9.41753E-2	2.73506E1	-3.26556E1	-3.26237E1	2.68304E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.8001E1	-2.38419E-4	-8.80003E1	3.09944E-4	5.07832E-3	9.39608E-2	2.72003E1	-3.2641E1	-3.26372E1	2.68388E1	1.19979E-7	2.51886E-3	2.51886E-3	6.29703E-3	3.01485E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80009E1	-5.00679E-4	-8.80003E1	4.52995E-4	4.45843E-3	9.38654E-2	2.73902E1	-3.2648E1	-3.25997E1	2.67806E1	1.19895E-7	2.51874E-3	2.51874E-3	6.33648E-3	3.01748E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80006E1	-4.05312E-4	-8.80002E1	4.29153E-4	4.45843E-3	9.38177E-2	2.72113E1	-3.26537E1	-3.26337E1	2.6804E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80006E1	-3.57628E-4	-8.80002E1	6.19888E-4	4.36306E-3	9.377E-2	2.73399E1	-3.26885E1	-3.26194E1	2.67944E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80009E1	-6.4373E-4	-8.80005E1	3.8147E-4	4.673E-3	9.36508E-2	2.73742E1	-3.26416E1	-3.26206E1	2.67806E1	1.19851E-7	2.53139E-3	2.53139E-3	6.28056E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.8001E1	-5.24521E-4	-8.8E1	4.05312E-4	4.74453E-3	9.37939E-2	2.71765E1	-3.26627E1	-3.26422E1	2.6777E1	1.19978E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.00144E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80009E1	-4.76837E-4	-8.80003E1	5.00679E-4	4.62532E-3	9.36985E-2	2.72528E1	-3.26494E1	-3.2629E1	2.68016E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.02511E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80007E1	-5.48363E-4	-8.80003E1	3.09944E-4	4.64916E-3	9.38177E-2	2.7367E1	-3.26927E1	-3.25978E1	2.67962E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01475E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80006E1	-3.8147E-4	-8.80004E1	3.8147E-4	4.57764E-3	9.36985E-2	2.7206E1	-3.27035E1	-3.26344E1	2.67824E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80008E1	-2.6226E-4	-8.80001E1	3.33786E-4	4.50611E-3	9.38654E-2	2.74385E1	-3.26811E1	-3.26187E1	2.67962E1	1.19953E-7	2.52707E-3	2.52707E-3	6.31817E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80005E1	-4.52995E-4	-8.8E1	-4.76837E-5	4.57764E-3	9.36508E-2	2.72501E1	-3.26162E1	-3.2626E1	2.68099E1	1.20084E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00942E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80007E1	-7.39098E-4	-8.80003E1	1.19209E-4	4.60148E-3	9.38416E-2	2.7324E1	-3.26596E1	-3.26113E1	2.6774E1	1.19841E-7	2.51287E-3	2.51287E-3	6.3445E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80007E1	-6.67572E-4	-8.80002E1	2.38419E-4	4.33922E-3	9.37462E-2	2.7229E1	-3.26773E1	-3.26354E1	2.67914E1	1.19902E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9943E-1