[Scan]
initial_time=2016-01-28T21:58:16
final_time=2016-01-28T21:58:35
ip_count=19
run=1026
dataset=9
scan=675
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.84141E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.34611E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.44757E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.7715E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.63265E-8
mult1=-1.05794E-8
mult2=-2.77887E-9
rf_tmon=-4.28286E-3
rf_agc=3.31631E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.47075E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63361E0
bslens_imon=2.59448E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20117E1
lens5a_imon=1.98648E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05218E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.18416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04915E1
cs_ea1_imon=1.10056E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09164E0
lens1_imon=1.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03862E1
cs_ea2_imon=1.40358E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.03856E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12425E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15416E1
os_ea1_imon=2.48564E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22149E0
cs_ionrep_imon=9.42253E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93508E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.87796E-8
tplens_vset=1.4E-1
tplens_vmon=1.65735E0
tplens_imon=-2.52073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26603E1
iondef3_imon=1.50532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26854E1
iondef2_imon=1.5909E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=7.91562E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2674E0
ionrepsh_imon=8.64754E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43697E0
os_ea2_imon=-7.88327E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.37589E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30516E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.73561E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=7.0947E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-9.94115E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.45015E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.60536E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.39138E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47709E0
defgridb_imon=6.25643E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.4251E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59994E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31792E1
cs_fil1_imon=7.31702E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02062E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61935E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97532E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50854E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21799E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56889E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80009E1	-4.29153E-4	-8.80004E1	1.00136E-3	4.55379E-3	9.37462E-2	2.73796E1	-3.26392E1	-3.26849E1	2.68226E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80011E1	4.76837E-5	-8.80006E1	4.52995E-4	4.50611E-3	9.36508E-2	2.72486E1	-3.26723E1	-3.26278E1	2.68118E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80007E1	-4.29153E-4	-8.80003E1	7.15256E-4	4.41074E-3	9.39608E-2	2.73027E1	-3.26396E1	-3.26372E1	2.68058E1	1.20069E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80011E1	-5.00679E-4	-8.80002E1	4.05312E-4	4.26769E-3	9.37939E-2	2.72904E1	-3.26578E1	-3.26321E1	2.67854E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.8001E1	-6.91414E-4	-8.80003E1	2.14577E-4	4.43459E-3	9.41753E-2	2.73411E1	-3.26638E1	-3.26425E1	2.6801E1	1.19554E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.98554E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80008E1	-2.86102E-4	-8.79999E1	1.19209E-4	4.48227E-3	9.39608E-2	2.73039E1	-3.26849E1	-3.26044E1	2.67926E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80006E1	-2.86102E-4	-8.8E1	2.86102E-4	4.43459E-3	9.37223E-2	2.7248E1	-3.26687E1	-3.26014E1	2.67938E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80008E1	-3.09944E-4	-8.80003E1	4.76837E-5	4.24385E-3	9.408E-2	2.73161E1	-3.26848E1	-3.26058E1	2.68076E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80007E1	-6.19888E-4	-8.80004E1	4.29153E-4	4.50611E-3	9.40323E-2	2.7288E1	-3.26655E1	-3.26437E1	2.6792E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.02813E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.8001E1	-6.91414E-4	-8.80004E1	6.19888E-4	4.50611E-3	9.377E-2	2.73334E1	-3.26685E1	-3.26354E1	2.68163E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.8001E1	-6.91414E-4	-8.80004E1	3.33786E-4	4.33922E-3	9.38654E-2	2.73963E1	-3.26603E1	-3.26297E1	2.67872E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80007E1	-4.05312E-4	-8.80005E1	4.52995E-4	4.50611E-3	9.39131E-2	2.72862E1	-3.26632E1	-3.25971E1	2.68034E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.47149E-2	-8.80008E1	-3.33786E-4	-8.80006E1	2.6226E-4	4.36306E-3	9.40561E-2	2.73092E1	-3.26661E1	-3.26189E1	2.68286E1	1.19953E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80008E1	-4.29153E-4	-8.80004E1	5.96046E-4	4.48227E-3	9.39131E-2	2.72903E1	-3.26856E1	-3.25995E1	2.68262E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80007E1	-4.29153E-4	-8.80003E1	-7.15256E-5	4.43459E-3	9.41038E-2	2.73363E1	-3.27111E1	-3.25844E1	2.67901E1	1.19595E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80009E1	-3.8147E-4	-8.80004E1	4.76837E-5	4.62532E-3	9.377E-2	2.71429E1	-3.26848E1	-3.26254E1	2.68028E1	1.19559E-7	2.51838E-3	2.51838E-3	6.29603E-3	3.00522E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80011E1	-3.8147E-4	-8.80004E1	2.86102E-4	5.05447E-3	9.38177E-2	2.72892E1	-3.26537E1	-3.26183E1	2.6801E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80007E1	-3.33786E-4	-8.80003E1	5.24521E-4	4.69685E-3	9.38177E-2	2.72535E1	-3.2655E1	-3.26225E1	2.67763E1	1.20158E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80006E1	-3.8147E-4	-8.80004E1	6.19888E-4	4.95911E-3	9.38654E-2	2.7413E1	-3.26343E1	-3.26378E1	2.67923E1	1.20142E-7	2.52659E-3	2.52659E-3	6.3074E-3	2.98092E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80009E1	-8.10623E-4	-8.80001E1	6.67572E-4	4.72069E-3	9.38892E-2	2.73027E1	-3.26854E1	-3.26603E1	2.68046E1	1.19705E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1