[Scan]
initial_time=2016-01-28T21:58:42
final_time=2016-01-28T21:59:02
ip_count=19
run=1026
dataset=9
scan=676
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.8035E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.39868E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.44608E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.81078E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.63617E-8
mult1=-1.00775E-8
mult2=-2.79446E-9
rf_tmon=-4.99909E-3
rf_agc=3.221E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.88334E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.77332E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.18452E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02493E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=1.09529E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07017E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.40145E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84052E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.12519E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.46575E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.10235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20491E0
cs_ionrep_imon=9.39909E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=1.95593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.87897E-8
tplens_vset=1.4E-1
tplens_vmon=1.62669E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.57913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.88503E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=8.50008E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.19746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44795E0
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.36508E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.10081E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68275E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.85898E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.10937E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-8.5356E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56111E1
einzel_imon=7.9257E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.86975E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.70372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.41615E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0808E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59958E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31736E1
cs_fil1_imon=7.40111E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3893E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61881E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54517E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21812E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46988E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80004E1	-4.29153E-4	-8.80002E1	3.33786E-4	4.48227E-3	9.36985E-2	2.73147E1	-3.26506E1	-3.26188E1	2.68157E1	1.20004E-7	2.52599E-3	2.52599E-3	6.32896E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80006E1	-2.38419E-4	-8.80005E1	6.19888E-4	5.03063E-3	9.38892E-2	2.73075E1	-3.26717E1	-3.2647E1	2.67963E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80009E1	-4.76837E-4	-8.80002E1	5.48363E-4	4.93526E-3	9.39131E-2	2.7168E1	-3.26568E1	-3.26394E1	2.68098E1	1.19653E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.99E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80009E1	-5.24521E-4	-8.80004E1	3.57628E-4	4.36306E-3	9.36747E-2	2.7415E1	-3.26308E1	-3.26416E1	2.67819E1	1.19967E-7	2.51244E-3	2.51244E-3	6.33297E-3	2.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80008E1	-5.24521E-4	-8.80003E1	2.86102E-4	4.88758E-3	9.36747E-2	2.71966E1	-3.26644E1	-3.26296E1	2.68212E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80007E1	-7.86781E-4	-8.80004E1	1.43051E-4	4.64916E-3	9.38654E-2	2.72953E1	-3.26566E1	-3.25954E1	2.6795E1	1.198E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80007E1	-5.48363E-4	-8.80003E1	3.57628E-4	4.95911E-3	9.39846E-2	2.7361E1	-3.26573E1	-3.26266E1	2.68154E1	1.19872E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80008E1	-7.62939E-4	-8.80004E1	2.38419E-5	4.62532E-3	9.35555E-2	2.72931E1	-3.2644E1	-3.26224E1	2.67864E1	1.20278E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80007E1	-8.34465E-4	-8.80007E1	3.8147E-4	4.55379E-3	9.35793E-2	2.72107E1	-3.2649E1	-3.25776E1	2.67902E1	1.19913E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.03449E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80009E1	-6.67572E-4	-8.80003E1	3.8147E-4	4.45843E-3	9.37939E-2	2.73634E1	-3.27131E1	-3.26434E1	2.68094E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.44831E-2	-8.80009E1	-5.00679E-4	-8.80003E1	3.33786E-4	4.26769E-3	9.377E-2	2.72432E1	-3.26885E1	-3.26119E1	2.68094E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.8001E1	-9.29832E-4	-8.80003E1	2.6226E-4	4.36306E-3	9.38654E-2	2.73327E1	-3.2623E1	-3.26236E1	2.67826E1	1.19646E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80008E1	-4.76837E-4	-8.80002E1	4.29153E-4	4.41074E-3	9.38654E-2	2.73424E1	-3.26368E1	-3.26338E1	2.68316E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80007E1	-4.76837E-4	-8.80003E1	2.6226E-4	4.43459E-3	9.36508E-2	2.7266E1	-3.26296E1	-3.25882E1	2.67926E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80008E1	-5.72205E-4	-8.80008E1	2.38419E-4	4.45843E-3	9.37939E-2	2.73622E1	-3.2644E1	-3.26416E1	2.67682E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80008E1	-6.4373E-4	-8.80007E1	2.6226E-4	4.8399E-3	9.37939E-2	2.71789E1	-3.26555E1	-3.26083E1	2.6813E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80006E1	-7.15256E-4	-8.8001E1	1.43051E-4	4.81606E-3	9.36031E-2	2.73748E1	-3.27059E1	-3.26158E1	2.68352E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80007E1	-3.33786E-4	-8.80007E1	3.8147E-4	4.36306E-3	9.34601E-2	2.72137E1	-3.26166E1	-3.26891E1	2.67902E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80009E1	-7.15256E-4	-8.80004E1	3.8147E-4	4.62532E-3	9.35793E-2	2.74853E1	-3.26711E1	-3.25942E1	2.68157E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.8001E1	-3.33786E-4	-8.80005E1	1.90735E-4	4.41074E-3	9.37223E-2	2.73021E1	-3.26675E1	-3.2635E1	2.68275E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01738E-1