[Scan]
initial_time=2016-01-28T22:01:22
final_time=2016-01-28T22:01:41
ip_count=19
run=1026
dataset=9
scan=682
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.7906E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.38127E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.41194E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.71402E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.63615E-8
mult1=-9.94144E-9
mult2=-2.79514E-9
rf_tmon=-4.01963E-3
rf_agc=3.37385E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.00536E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65064E0
bslens_imon=2.69109E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19735E1
lens5a_imon=1.97314E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05257E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=3.18269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04568E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05121E1
cs_ea1_imon=1.08428E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07826E0
lens1_imon=1.60999E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03783E1
cs_ea2_imon=1.402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84128E1
cs_ef1a_imon=3.04299E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.12044E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11546E1
os_restr1_imon=4.31007E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15178E1
os_ea1_imon=2.47129E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22139E0
cs_ionrep_imon=9.4106E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.9341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.8738E-8
tplens_vset=1.4E-1
tplens_vmon=1.66519E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26076E1
iondef3_imon=1.51568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26395E1
iondef2_imon=1.5779E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98419E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.24988E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26716E0
ionrepsh_imon=8.58326E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.19562E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4485E0
os_ea2_imon=-6.80827E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.20285E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.61629E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70008E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=3.35437E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29754E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.08799E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72463E1
iondef1_imon=1.1027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.09893E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.80702E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.06399E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-8.09154E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.92068E-6
window_vset=0.0E0
window_vmon=1.95676E-1
window_imon=-8.57807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86842E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.89845E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.90078E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.41178E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3949E0
defgridb_imon=6.03868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33175E1
os_fil1_imon=9.41198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08325E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59844E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31836E1
cs_fil1_imon=7.82029E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0363E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61503E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97884E-2
os_fil2_imon=-2.46646E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.77505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27654E-1
cs_fil2_imon=-2.51859E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21789E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.75424E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80008E1	-5.72205E-4	-8.80005E1	5.24521E-4	4.17233E-3	9.39846E-2	2.72793E1	-3.26543E1	-3.26416E1	2.67908E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80013E1	-6.19888E-4	-8.80006E1	6.4373E-4	4.57764E-3	9.37223E-2	2.7361E1	-3.26657E1	-3.26206E1	2.6792E1	1.19953E-7	2.52492E-3	2.52492E-3	6.33977E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80008E1	-4.76837E-4	-8.80006E1	5.00679E-4	4.33922E-3	9.38892E-2	2.73322E1	-3.26549E1	-3.26213E1	2.68221E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80007E1	-5.96046E-4	-8.80007E1	4.29153E-4	4.69685E-3	9.36508E-2	2.72374E1	-3.26366E1	-3.26232E1	2.68007E1	1.19891E-7	2.51077E-3	2.51077E-3	6.31798E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80009E1	-7.39098E-4	-8.80005E1	1.90735E-4	4.3869E-3	9.37939E-2	2.73165E1	-3.26521E1	-3.25917E1	2.68038E1	1.20028E-7	2.52509E-3	2.52509E-3	6.33863E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.8001E1	-6.19888E-4	-8.80004E1	3.09944E-4	4.26769E-3	9.35078E-2	2.73946E1	-3.26518E1	-3.26344E1	2.67968E1	1.20337E-7	2.51527E-3	2.51527E-3	6.3074E-3	3.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80009E1	-3.57628E-4	-8.80006E1	6.67572E-4	4.62532E-3	9.37223E-2	2.72066E1	-3.26723E1	-3.26026E1	2.67541E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80009E1	-5.24521E-4	-8.80005E1	5.24521E-4	4.8399E-3	9.39369E-2	2.73437E1	-3.26965E1	-3.25969E1	2.68076E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.47149E-2	-8.80011E1	-6.4373E-4	-8.80006E1	5.00679E-4	4.3869E-3	9.41038E-2	2.72335E1	-3.26389E1	-3.26303E1	2.68202E1	1.19732E-7	2.51265E-3	2.51265E-3	6.33341E-3	3.01733E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80008E1	-4.52995E-4	-8.80003E1	2.14577E-4	5.14984E-3	9.38892E-2	2.74541E1	-3.26278E1	-3.26128E1	2.6792E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80009E1	-4.29153E-4	-8.80007E1	-2.38419E-5	5.126E-3	9.36508E-2	2.72278E1	-3.26803E1	-3.25853E1	2.67974E1	1.19861E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80008E1	-5.72205E-4	-8.80006E1	3.09944E-4	4.95911E-3	9.37223E-2	2.74259E1	-3.26693E1	-3.26506E1	2.67896E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80006E1	-2.86102E-4	-8.80004E1	4.05312E-4	4.55379E-3	9.39369E-2	2.72218E1	-3.26505E1	-3.26285E1	2.68016E1	1.19809E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80007E1	-6.19888E-4	-8.80006E1	6.4373E-4	4.98295E-3	9.38654E-2	2.72496E1	-3.2685E1	-3.26166E1	2.67698E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97704E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80007E1	-7.62939E-4	-8.80003E1	4.29153E-4	4.74453E-3	9.39131E-2	2.73546E1	-3.26573E1	-3.26337E1	2.68099E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32087E-3	3.01095E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80011E1	-5.24521E-4	-8.80003E1	4.76837E-5	4.673E-3	9.39131E-2	2.72325E1	-3.26449E1	-3.26437E1	2.68046E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80011E1	-6.19888E-4	-8.80003E1	3.8147E-4	4.52995E-3	9.39131E-2	2.74048E1	-3.26591E1	-3.26098E1	2.67878E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80011E1	-7.39098E-4	-8.80006E1	2.38419E-4	4.36306E-3	9.38654E-2	2.72296E1	-3.26596E1	-3.26396E1	2.67938E1	1.19965E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.8001E1	-5.96046E-4	-8.80007E1	1.66893E-4	4.62532E-3	9.40323E-2	2.7406E1	-3.2662E1	-3.26136E1	2.6814E1	1.19809E-7	2.50898E-3	2.50898E-3	6.34037E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80009E1	-3.8147E-4	-8.80004E1	1.90735E-4	4.60148E-3	9.377E-2	2.72463E1	-3.26395E1	-3.26076E1	2.68388E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99175E-1