[Scan]
initial_time=2016-01-28T22:01:48
final_time=2016-01-28T22:02:08
ip_count=19
run=1026
dataset=9
scan=683
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.83746E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-5.72121E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.4657E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.73212E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63401E-8
mult1=-1.02341E-8
mult2=-2.83838E-9
rf_tmon=-5.37761E-3
rf_agc=3.2937E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.31101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.20038E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02456E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=1.0876E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09783E0
lens1_imon=1.61488E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03474E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83793E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12036E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.30788E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=2.48777E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.22134E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.87751E-8
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.42707E-2
ql6_imon=8.49473E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23047E0
ionrepsh_imon=8.69501E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44977E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10595E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.79985E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.07185E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-8.3554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55985E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.82982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.54646E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.39975E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08314E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60044E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31875E1
cs_fil1_imon=8.09187E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.50342E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6164E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67543E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21746E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9714E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33774E-1
res40_imon=-2.35641E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.45602E-2	-8.8001E1	-2.86102E-4	-8.80005E1	3.09944E-4	4.36306E-3	9.38654E-2	2.72538E1	-3.26891E1	-3.26189E1	2.68279E1	1.19443E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.44059E-2	-8.8001E1	-4.05312E-4	-8.80003E1	4.29153E-4	4.60148E-3	9.42469E-2	2.73129E1	-3.26518E1	-3.2644E1	2.68275E1	1.20106E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80012E1	-4.05312E-4	-8.80003E1	6.91414E-4	4.62532E-3	9.40084E-2	2.73561E1	-3.26515E1	-3.25959E1	2.67908E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.9829E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80011E1	-2.86102E-4	-8.80006E1	4.52995E-4	4.33922E-3	9.38892E-2	2.72709E1	-3.26855E1	-3.2641E1	2.67974E1	1.1954E-7	2.50762E-3	2.50762E-3	6.3074E-3	2.97593E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80013E1	-5.24521E-4	-8.80008E1	5.96046E-4	4.48227E-3	9.38416E-2	2.72823E1	-3.26789E1	-3.26362E1	2.6768E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80013E1	-7.15256E-4	-8.80007E1	4.29153E-4	4.33922E-3	9.38654E-2	2.73008E1	-3.26621E1	-3.26272E1	2.68106E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8001E1	-1.00136E-3	-8.80004E1	6.67572E-4	4.60148E-3	9.35793E-2	2.7288E1	-3.26644E1	-3.25965E1	2.67752E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80008E1	-5.48363E-4	-8.80005E1	5.48363E-4	4.69685E-3	9.36747E-2	2.73029E1	-3.26562E1	-3.26087E1	2.68216E1	1.19965E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.8001E1	-7.39098E-4	-8.80006E1	5.72205E-4	4.60148E-3	9.377E-2	2.73447E1	-3.26617E1	-3.25923E1	2.67832E1	1.19822E-7	2.5267E-3	2.5267E-3	6.31761E-3	2.99906E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.8001E1	-5.00679E-4	-8.80005E1	6.67572E-4	4.57764E-3	9.37223E-2	2.73225E1	-3.26693E1	-3.26338E1	2.67932E1	1.19785E-7	2.51527E-3	2.51527E-3	6.33065E-3	2.99811E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80009E1	-4.52995E-4	-8.80004E1	6.67572E-4	4.74453E-3	9.36508E-2	2.72738E1	-3.26933E1	-3.26065E1	2.68094E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.8001E1	-5.96046E-4	-8.80006E1	2.6226E-4	4.74453E-3	9.36508E-2	2.73472E1	-3.26591E1	-3.26272E1	2.6813E1	1.19991E-7	2.51826E-3	2.51826E-3	6.3074E-3	2.9991E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80009E1	-5.48363E-4	-8.80005E1	2.38419E-4	4.64916E-3	9.36747E-2	2.71783E1	-3.26785E1	-3.26337E1	2.67836E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.8001E1	-8.34465E-4	-8.80005E1	5.24521E-4	4.74453E-3	9.38654E-2	2.73351E1	-3.26499E1	-3.26376E1	2.67992E1	1.20106E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9841E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.8001E1	-7.62939E-4	-8.80004E1	3.8147E-4	4.57764E-3	9.39846E-2	2.73718E1	-3.26681E1	-3.26158E1	2.68232E1	1.19893E-7	2.51898E-3	2.51898E-3	6.30464E-3	2.99566E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80009E1	-6.4373E-4	-8.80006E1	5.00679E-4	4.673E-3	9.38892E-2	2.73117E1	-3.26687E1	-3.26669E1	2.6798E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80009E1	-5.72205E-4	-8.80008E1	6.4373E-4	4.64916E-3	9.35078E-2	2.73063E1	-3.26596E1	-3.26189E1	2.68058E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80006E1	-2.86102E-4	-8.80005E1	5.72205E-4	4.79221E-3	9.38416E-2	2.73321E1	-3.26759E1	-3.25785E1	2.67968E1	1.19601E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80009E1	9.53674E-5	-8.80008E1	2.86102E-4	4.74453E-3	9.39846E-2	2.73605E1	-3.26349E1	-3.26166E1	2.68094E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80008E1	-5.48363E-4	-8.80007E1	3.33786E-4	4.64916E-3	9.42707E-2	2.73183E1	-3.26807E1	-3.26206E1	2.68094E1	1.19749E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.9714E-1