[Scan]
initial_time=2016-01-28T22:02:42
final_time=2016-01-28T22:03:01
ip_count=19
run=1026
dataset=9
scan=685
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.85238E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.42431E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.42397E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.70131E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.63579E-8
mult1=-1.03269E-8
mult2=-2.7017E-9
rf_tmon=-4.19683E-3
rf_agc=3.32147E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=4.78232E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53708E1
cs_ef1b_imon=3.17679E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=1.09589E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0762E0
lens1_imon=1.55721E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64516E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.38537E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84614E1
cs_ef1a_imon=3.04507E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12094E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=4.29895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.46073E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.09025E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=9.36193E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.88108E-8
tplens_vset=1.4E-1
tplens_vmon=1.67087E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26148E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26708E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=8.46446E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=8.55081E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74646E1
cs_ef2b_imon=3.15072E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40291E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.43905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71166E-1
os_ef2bup_imon=-5.11152E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10718E1
os_restr2_imon=3.36098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.09737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73818E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.77598E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.07795E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-9.62065E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=2.35062E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39307E-4
mask2_vset=0.0E0
mask2_vmon=-1.86894E1
mask2_imon=-5.17233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.96103E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.10523E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.40155E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08024E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59715E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=7.16578E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80697E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61624E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57102E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.12473E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50691E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21834E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19601E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.84315E-1
res40_imon=-2.45642E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80014E1	-7.39098E-4	-8.80005E1	4.76837E-4	4.8399E-3	9.39131E-2	2.72992E1	-3.26573E1	-3.26142E1	2.67998E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80011E1	-7.15256E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.377E-2	2.72733E1	-3.26639E1	-3.26392E1	2.68076E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80011E1	-8.34465E-4	-8.80003E1	1.43051E-4	4.74453E-3	9.37223E-2	2.72284E1	-3.26638E1	-3.26042E1	2.68442E1	1.19978E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.03349E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.45602E-2	-8.80013E1	-7.62939E-4	-8.80006E1	1.43051E-4	4.41074E-3	9.38177E-2	2.72997E1	-3.26591E1	-3.2608E1	2.68047E1	1.1979E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80011E1	-4.52995E-4	-8.80008E1	1.19209E-4	4.62532E-3	9.36031E-2	2.72491E1	-3.26502E1	-3.26514E1	2.67974E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80013E1	-6.19888E-4	-8.80006E1	4.52995E-4	4.50611E-3	9.38654E-2	2.73195E1	-3.26777E1	-3.2605E1	2.68202E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.8001E1	-6.4373E-4	-8.80005E1	4.29153E-4	4.62532E-3	9.36985E-2	2.7239E1	-3.26867E1	-3.26014E1	2.68076E1	1.19653E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80008E1	-5.24521E-4	-8.80007E1	5.24521E-4	4.3869E-3	9.377E-2	2.73352E1	-3.26679E1	-3.26195E1	2.67914E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.03185E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80012E1	-6.19888E-4	-8.80003E1	3.09944E-4	4.60148E-3	9.39131E-2	2.72672E1	-3.26603E1	-3.26002E1	2.68178E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80012E1	-4.05312E-4	-8.80005E1	1.43051E-4	4.24385E-3	9.37939E-2	2.72426E1	-3.26789E1	-3.25978E1	2.68169E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80012E1	-5.24521E-4	-8.80001E1	2.86102E-4	4.43459E-3	9.38177E-2	2.73914E1	-3.26817E1	-3.2637E1	2.68063E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.96634E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80011E1	-4.76837E-4	-8.80004E1	1.90735E-4	4.43459E-3	9.37939E-2	2.73393E1	-3.26506E1	-3.25834E1	2.68058E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.96185E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80011E1	-7.86781E-4	-8.80002E1	2.38419E-5	4.60148E-3	9.40561E-2	2.73364E1	-3.26531E1	-3.26083E1	2.67878E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.97704E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.8001E1	-3.09944E-4	-8.80004E1	2.6226E-4	4.62532E-3	9.38892E-2	2.72594E1	-3.26819E1	-3.2632E1	2.67818E1	1.20069E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80008E1	-4.29153E-4	-8.80003E1	2.14577E-4	4.72069E-3	9.37939E-2	2.73764E1	-3.26642E1	-3.26289E1	2.68138E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80008E1	-3.57628E-4	-8.80002E1	3.8147E-4	5.05447E-3	9.38892E-2	2.71728E1	-3.26667E1	-3.26305E1	2.68354E1	1.19585E-7	2.51162E-3	2.51162E-3	6.323E-3	2.99753E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.8001E1	-3.57628E-4	-8.80003E1	3.09944E-4	4.45843E-3	9.38892E-2	2.7349E1	-3.26464E1	-3.26452E1	2.68124E1	1.20092E-7	2.52328E-3	2.52328E-3	6.31304E-3	3.00869E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80009E1	-3.57628E-4	-8.80002E1	9.53674E-5	4.57764E-3	9.408E-2	2.74372E1	-3.26875E1	-3.26192E1	2.68233E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80009E1	-6.4373E-4	-8.80001E1	9.53674E-5	4.19617E-3	9.39608E-2	2.71882E1	-3.26854E1	-3.25672E1	2.67932E1	1.1969E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80007E1	-1.00136E-3	-8.80003E1	-7.15256E-5	4.50611E-3	9.39608E-2	2.73818E1	-3.26708E1	-3.26148E1	2.68154E1	1.19601E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1