[Scan]
initial_time=2016-01-28T22:04:02
final_time=2016-01-28T22:04:21
ip_count=19
run=1026
dataset=9
scan=688
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.83126E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.80494E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.48505E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.64037E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.64231E-8
mult1=-9.31021E-9
mult2=-2.66054E-9
rf_tmon=-5.13477E-3
rf_agc=3.28077E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.41961E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63672E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1973E1
lens5a_imon=1.97129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53615E1
cs_ef1b_imon=3.18235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=1.05919E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0743E0
lens1_imon=1.74335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04156E1
cs_ea2_imon=1.41242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84661E1
cs_ef1a_imon=3.06141E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.11889E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11506E1
os_restr1_imon=4.30868E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.47141E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25505E0
cs_ionrep_imon=9.50527E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=1.95767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.87275E-8
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.51825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2649E1
iondef2_imon=1.59966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.49962E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=8.34081E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74478E1
cs_ef2b_imon=3.15177E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46092E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07715E0
os_ef2alow_imon=-2.44947E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00706E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.36862E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.09668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73889E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.83249E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.0677E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10581E0
cs_ionaccel_imon=-9.48164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47469E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56382E1
einzel_imon=7.77125E-6
window_vset=0.0E0
window_vmon=2.46646E-1
window_imon=-9.69015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.87161E1
mask2_imon=-4.06024E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.1091E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53548E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.4143E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59878E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=6.88776E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33202E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61504E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24363E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02241E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60845E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27779E-1
cs_fil2_imon=-2.0726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15359E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21793E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41251E-1
res40_imon=-2.24096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80008E1	-3.33786E-4	-8.80008E1	1.66893E-4	4.79221E-3	9.40561E-2	2.72522E1	-3.26639E1	-3.26693E1	2.67896E1	1.20293E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.00097E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80008E1	-7.15256E-4	-8.80005E1	-2.38419E-5	4.79221E-3	9.41038E-2	2.74138E1	-3.26723E1	-3.26302E1	2.67878E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80009E1	-8.34465E-4	-8.80007E1	3.33786E-4	4.52995E-3	9.408E-2	2.72131E1	-3.26673E1	-3.26313E1	2.67926E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02133E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.8001E1	-5.72205E-4	-8.80007E1	2.38419E-5	4.86374E-3	9.40561E-2	2.73614E1	-3.26688E1	-3.26214E1	2.67765E1	1.201E-7	2.52018E-3	2.52018E-3	6.31574E-3	3.01509E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80011E1	-6.19888E-4	-8.80007E1	4.76837E-5	4.79221E-3	9.39608E-2	2.73011E1	-3.26385E1	-3.263E1	2.68206E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80011E1	-8.82149E-4	-8.80008E1	2.6226E-4	5.14984E-3	9.39846E-2	2.73142E1	-3.26594E1	-3.26284E1	2.68459E1	1.20164E-7	2.51861E-3	2.51861E-3	6.33658E-3	3.01957E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8001E1	-5.24521E-4	-8.8001E1	1.43051E-4	5.05447E-3	9.408E-2	2.73786E1	-3.26606E1	-3.26022E1	2.6785E1	1.20116E-7	2.51411E-3	2.51411E-3	6.32483E-3	3.00778E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80012E1	-3.8147E-4	-8.80005E1	-9.53674E-5	4.62532E-3	9.37223E-2	2.72025E1	-3.26472E1	-3.26236E1	2.68046E1	1.19663E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02081E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80013E1	-9.29832E-4	-8.80008E1	2.86102E-4	4.64916E-3	9.377E-2	2.73802E1	-3.2644E1	-3.26302E1	2.68052E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80011E1	-8.10623E-4	-8.80003E1	1.19209E-4	4.62532E-3	9.408E-2	2.7352E1	-3.26573E1	-3.26561E1	2.67911E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98156E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.8001E1	-4.76837E-4	-8.80004E1	2.38419E-5	4.8399E-3	9.39608E-2	2.71836E1	-3.2626E1	-3.26349E1	2.682E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80012E1	-7.62939E-4	-8.80005E1	1.43051E-4	4.64916E-3	9.41038E-2	2.74144E1	-3.26735E1	-3.2632E1	2.68298E1	1.2033E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80009E1	-7.39098E-4	-8.80005E1	1.90735E-4	4.76837E-3	9.408E-2	2.72132E1	-3.2638E1	-3.26801E1	2.68058E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.8001E1	-8.10623E-4	-8.80008E1	5.00679E-4	4.43459E-3	9.39608E-2	2.74529E1	-3.26488E1	-3.2617E1	2.68028E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80009E1	-7.15256E-4	-8.80006E1	4.05312E-4	4.26769E-3	9.37462E-2	2.72576E1	-3.26843E1	-3.2614E1	2.6798E1	1.19913E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80008E1	-5.00679E-4	-8.80005E1	4.29153E-4	4.72069E-3	9.36985E-2	2.72514E1	-3.26579E1	-3.26189E1	2.68304E1	1.20383E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80008E1	-9.05991E-4	-8.80005E1	5.48363E-4	4.48227E-3	9.377E-2	2.72438E1	-3.26554E1	-3.26062E1	2.67937E1	1.19749E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80008E1	-1.16825E-3	-8.80004E1	3.8147E-4	4.41074E-3	9.39846E-2	2.7367E1	-3.26714E1	-3.26236E1	2.68088E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80011E1	-8.34465E-4	-8.80005E1	2.14577E-4	4.45843E-3	9.39846E-2	2.73417E1	-3.27143E1	-3.2605E1	2.67932E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.8001E1	-6.4373E-4	-8.80005E1	2.6226E-4	4.79221E-3	9.38177E-2	2.73889E1	-3.2649E1	-3.26384E1	2.68034E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00824E-1