[Scan]
initial_time=2016-01-28T22:05:48
final_time=2016-01-28T22:06:08
ip_count=19
run=1026
dataset=9
scan=692
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.774E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.4404E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.42907E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.60754E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.6389E-8
mult1=-9.54774E-9
mult2=-2.78847E-9
rf_tmon=-5.17934E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.46432E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6547E0
bslens_imon=2.33652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.18164E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.09714E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06494E0
lens1_imon=1.35971E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64308E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0409E1
cs_ea2_imon=1.40687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.03424E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12186E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.32698E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14848E1
os_ea1_imon=2.46086E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25499E0
cs_ionrep_imon=9.57398E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93444E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=1.95953E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.87128E-8
tplens_vset=1.4E-1
tplens_vmon=1.6339E0
tplens_imon=-2.04587E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26693E1
iondef3_imon=1.50768E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57477E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98513E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.5901E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.60412E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33542E1
lens5b_imon=2.20814E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74249E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40331E0
os_ea2_imon=-6.77351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.36076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.28781E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.0881E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.12017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.86343E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.08189E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02177E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.94733E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39484E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.47783E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.64816E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3224E0
defgridb_imon=6.08039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33195E1
os_fil1_imon=9.41801E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59822E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31779E1
cs_fil1_imon=9.55748E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.06867E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61684E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07833E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.71402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40072E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35576E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80015E1	-5.96046E-4	-8.80005E1	-1.43051E-4	4.8399E-3	9.37939E-2	2.72895E1	-3.26699E1	-3.26591E1	2.68046E1	1.19941E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.03383E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80013E1	-7.62939E-4	-8.80003E1	1.66893E-4	4.41074E-3	9.36985E-2	2.72811E1	-3.26567E1	-3.26482E1	2.68082E1	1.20069E-7	2.51116E-3	2.51116E-3	6.36244E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80014E1	-9.29832E-4	-8.80004E1	2.38419E-4	4.52995E-3	9.34839E-2	2.7367E1	-3.26655E1	-3.26443E1	2.67694E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80013E1	-1.0252E-3	-8.80008E1	2.86102E-4	4.55379E-3	9.39131E-2	2.74637E1	-3.26909E1	-3.26104E1	2.68094E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80012E1	-8.34465E-4	-8.80005E1	2.38419E-4	4.64916E-3	9.37939E-2	2.73405E1	-3.26467E1	-3.26236E1	2.68088E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.8001E1	-7.39098E-4	-8.80007E1	3.57628E-4	4.62532E-3	9.37939E-2	2.72138E1	-3.26921E1	-3.25924E1	2.68244E1	1.19809E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80012E1	-6.67572E-4	-8.80005E1	3.09944E-4	4.88758E-3	9.37939E-2	2.72817E1	-3.26693E1	-3.259E1	2.68202E1	1.2026E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.8001E1	-1.07288E-3	-8.80003E1	4.76837E-4	4.52995E-3	9.36985E-2	2.7218E1	-3.26284E1	-3.26152E1	2.68431E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80011E1	-7.86781E-4	-8.80004E1	4.52995E-4	4.00543E-3	9.37223E-2	2.74649E1	-3.26717E1	-3.26098E1	2.6798E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80012E1	-6.19888E-4	-8.80006E1	2.86102E-4	4.45843E-3	9.39369E-2	2.74457E1	-3.265E1	-3.26212E1	2.68124E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80013E1	-6.91414E-4	-8.80007E1	4.52995E-4	4.3869E-3	9.37939E-2	2.72108E1	-3.26873E1	-3.26759E1	2.68004E1	1.19757E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.8001E1	-6.4373E-4	-8.80004E1	3.57628E-4	4.72069E-3	9.39369E-2	2.737E1	-3.26759E1	-3.26224E1	2.68151E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80011E1	-6.4373E-4	-8.80006E1	3.57628E-4	4.76837E-3	9.39131E-2	2.73141E1	-3.26849E1	-3.26314E1	2.68016E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80009E1	-7.39098E-4	-8.80007E1	2.38419E-4	4.57764E-3	9.36031E-2	2.73021E1	-3.26531E1	-3.26626E1	2.68106E1	1.19727E-7	2.51809E-3	2.51809E-3	6.31555E-3	3.01284E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80012E1	-3.57628E-4	-8.80004E1	5.24521E-4	4.17233E-3	9.38654E-2	2.72592E1	-3.26597E1	-3.26358E1	2.67902E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.8001E1	-7.15256E-4	-8.80007E1	1.19209E-4	4.81606E-3	9.38654E-2	2.7242E1	-3.26685E1	-3.2629E1	2.6807E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.44831E-2	-8.8001E1	-7.39098E-4	-8.80004E1	3.57628E-4	4.45843E-3	9.40323E-2	2.73886E1	-3.26428E1	-3.26254E1	2.6831E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80011E1	-5.00679E-4	-8.80002E1	3.57628E-4	4.50611E-3	9.37223E-2	2.71895E1	-3.26431E1	-3.2636E1	2.68053E1	1.20122E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9978E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80012E1	-4.29153E-4	-8.80002E1	4.76837E-4	4.62532E-3	9.377E-2	2.72178E1	-3.25458E1	-3.27298E1	2.67854E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80011E1	-4.76837E-4	-8.80002E1	-1.19209E-4	5.00679E-3	9.35793E-2	2.73411E1	-3.26543E1	-3.26693E1	2.67896E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99686E-1