[Scan]
initial_time=2016-01-28T22:07:35
final_time=2016-01-28T22:07:55
ip_count=19
run=1026
dataset=9
scan=696
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.77653E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-5.58603E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.46049E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.6032E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.634E-8
mult1=-9.88488E-9
mult2=-2.76253E-9
rf_tmon=-4.54847E-3
rf_agc=3.36881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.03612E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=3.19425E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=1.10058E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0738E0
lens1_imon=1.64012E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.41493E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83866E1
cs_ef1a_imon=3.03964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.11609E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11886E1
os_restr1_imon=4.32013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.47551E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.37995E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01479E1
cs_anode1_imon=1.95629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.87068E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-8.30488E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.44717E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=8.57244E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.16182E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44556E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71546E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.77447E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02121E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72739E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.80777E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.07269E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-1.19954E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02019E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56729E1
einzel_imon=7.99418E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-1.25E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.87161E1
mask2_imon=-1.86826E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.42306E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0835E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59949E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=6.53616E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.14903E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61415E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48466E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7549E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.4879E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80009E1	-4.76837E-4	-8.80001E1	-2.38419E-4	4.22001E-3	9.41277E-2	2.72976E1	-3.26683E1	-3.26081E1	2.67788E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80009E1	-4.05312E-4	-8.80003E1	1.66893E-4	4.05312E-3	9.39846E-2	2.73045E1	-3.26383E1	-3.26015E1	2.67932E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80008E1	-3.8147E-4	-8.80001E1	1.43051E-4	4.00543E-3	9.40323E-2	2.73045E1	-3.2675E1	-3.26408E1	2.68088E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80011E1	-5.24521E-4	-8.8E1	1.19209E-4	4.24385E-3	9.37223E-2	2.72114E1	-3.26567E1	-3.26314E1	2.6831E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.8001E1	-7.86781E-4	-8.80001E1	2.38419E-4	4.22001E-3	9.41753E-2	2.7409E1	-3.26362E1	-3.26332E1	2.68046E1	1.19913E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80011E1	-3.57628E-4	-8.80004E1	2.86102E-4	4.41074E-3	9.39608E-2	2.72249E1	-3.26579E1	-3.26472E1	2.67968E1	1.19653E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80011E1	-4.29153E-4	-8.80002E1	1.66893E-4	4.81606E-3	9.39608E-2	2.73375E1	-3.26714E1	-3.26207E1	2.68196E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80012E1	-2.6226E-4	-8.80003E1	4.05312E-4	4.60148E-3	9.38654E-2	2.73314E1	-3.2648E1	-3.26199E1	2.67974E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80012E1	-1.66893E-4	-8.80003E1	4.76837E-4	4.57764E-3	9.37462E-2	2.72552E1	-3.26404E1	-3.26308E1	2.6819E1	1.20031E-7	2.51248E-3	2.51248E-3	6.32978E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80013E1	-1.66893E-4	-8.80001E1	5.00679E-4	4.81606E-3	9.37939E-2	2.7403E1	-3.26419E1	-3.26024E1	2.68004E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80013E1	-1.66893E-4	-8.80001E1	3.57628E-4	4.74453E-3	9.36985E-2	2.71645E1	-3.26158E1	-3.26536E1	2.68036E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80012E1	-2.86102E-4	-8.80001E1	6.19888E-4	4.64916E-3	9.37462E-2	2.73564E1	-3.26921E1	-3.26095E1	2.67944E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80012E1	-4.76837E-4	-8.80003E1	4.05312E-4	4.43459E-3	9.36031E-2	2.73712E1	-3.26897E1	-3.25917E1	2.68286E1	1.20055E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80013E1	-5.00679E-4	-8.80002E1	6.67572E-4	4.673E-3	9.37939E-2	2.72803E1	-3.26549E1	-3.26844E1	2.67956E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80013E1	-1.90735E-4	-8.80004E1	5.96046E-4	4.79221E-3	9.38177E-2	2.74253E1	-3.26723E1	-3.26512E1	2.68202E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80011E1	-8.34465E-4	-8.80003E1	4.05312E-4	4.64916E-3	9.37462E-2	2.71977E1	-3.26579E1	-3.26148E1	2.6786E1	1.19809E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80013E1	-7.86781E-4	-8.80003E1	6.19888E-4	4.72069E-3	9.40084E-2	2.73748E1	-3.26873E1	-3.2617E1	2.6825E1	1.19697E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.8001E1	-6.4373E-4	-8.80003E1	5.48363E-4	5.05447E-3	9.39369E-2	2.73128E1	-3.26425E1	-3.25947E1	2.67974E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03976E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80011E1	-4.29153E-4	-8.80004E1	4.05312E-4	4.74453E-3	9.39131E-2	2.73936E1	-3.27711E1	-3.25676E1	2.6794E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80011E1	-8.34465E-4	-8.80008E1	3.09944E-4	4.41074E-3	9.377E-2	2.72739E1	-3.26669E1	-3.26356E1	2.681E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1