[Scan]
initial_time=2016-01-28T22:08:55
final_time=2016-01-28T22:09:15
ip_count=19
run=1026
dataset=9
scan=699
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.8928E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.84877E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.455E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.57558E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63309E-8
mult1=-1.03906E-8
mult2=-2.71861E-9
rf_tmon=-5.12527E-3
rf_agc=3.25285E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.26357E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12433E2
lens4a_imon=2.05316E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5304E1
cs_ef1b_imon=3.15497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=1.0894E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11526E0
lens1_imon=1.46348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=3.00504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.40484E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84851E1
cs_ef1a_imon=3.05766E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.11895E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.47983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63101E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=9.53857E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02506E1
cs_anode1_imon=2.01143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.86325E-8
tplens_vset=1.4E-1
tplens_vmon=1.67628E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98602E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.37076E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=8.67338E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.1074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43114E0
os_ea2_imon=-4.83199E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70573E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.28433E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-4.98731E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.38022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.11487E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.11139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67978E1
iondef4_imon=1.07296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.82089E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.07068E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-6.66154E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55774E1
einzel_imon=7.2842E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82662E2
mask1_imon=2.39401E-4
mask2_vset=0.0E0
mask2_vmon=-1.87107E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.39723E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.38063E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33188E1
os_fil1_imon=9.42192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.079E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59824E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31796E1
cs_fil1_imon=7.81557E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69564E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61322E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.17943E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.78886E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27192E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21902E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.16335E-1
res40_imon=-1.95998E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.44831E-2	-8.8001E1	-2.86102E-4	-8.80001E1	3.33786E-4	4.91142E-3	9.40084E-2	2.73874E1	-3.26681E1	-3.26404E1	2.68052E1	1.2026E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02253E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.46377E-2	-8.8001E1	-6.19888E-4	-8.80004E1	3.57628E-4	5.19753E-3	9.38654E-2	2.72396E1	-3.26664E1	-3.2645E1	2.68244E1	1.19653E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.8001E1	-2.86102E-4	-8.80003E1	2.14577E-4	4.79221E-3	9.37939E-2	2.73284E1	-3.26709E1	-3.26271E1	2.67959E1	1.19872E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80013E1	-3.57628E-4	-8.80005E1	1.90735E-4	5.05447E-3	9.36985E-2	2.73167E1	-3.26713E1	-3.26272E1	2.67932E1	1.19717E-7	2.51723E-3	2.51723E-3	6.31242E-3	2.99339E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80012E1	-5.00679E-4	-8.80006E1	2.14577E-4	4.91142E-3	9.39131E-2	2.73328E1	-3.26579E1	-3.26189E1	2.68046E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80009E1	-5.96046E-4	-8.80004E1	1.66893E-4	4.8399E-3	9.377E-2	2.73002E1	-3.2664E1	-3.25942E1	2.68076E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80013E1	-3.33786E-4	-8.80005E1	3.09944E-4	4.91142E-3	9.38416E-2	2.72919E1	-3.26482E1	-3.26434E1	2.68112E1	1.20122E-7	2.52647E-3	2.52647E-3	6.29645E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.8001E1	-8.58307E-4	-8.80003E1	3.09944E-4	4.72069E-3	9.37939E-2	2.73051E1	-3.26549E1	-3.2602E1	2.68082E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80012E1	-2.86102E-4	-8.80006E1	4.76837E-5	4.62532E-3	9.39846E-2	2.73255E1	-3.2635E1	-3.26104E1	2.6822E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80012E1	-2.6226E-4	-8.80004E1	-4.76837E-5	4.64916E-3	9.40084E-2	2.72261E1	-3.27051E1	-3.26242E1	2.68111E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80013E1	-5.72205E-4	-8.80006E1	2.14577E-4	4.79221E-3	9.38177E-2	2.72678E1	-3.262E1	-3.2614E1	2.67776E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.03545E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80011E1	-6.19888E-4	-8.80007E1	1.19209E-4	4.33922E-3	9.40084E-2	2.7344E1	-3.26526E1	-3.26183E1	2.67938E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80013E1	-5.72205E-4	-8.80005E1	1.19209E-4	4.55379E-3	9.377E-2	2.72943E1	-3.26633E1	-3.26308E1	2.67914E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80014E1	-4.76837E-4	-8.80007E1	9.53674E-5	4.74453E-3	9.39846E-2	2.7257E1	-3.26482E1	-3.26458E1	2.67956E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99175E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80012E1	-5.48363E-4	-8.80007E1	2.86102E-4	4.69685E-3	9.39131E-2	2.73145E1	-3.26803E1	-3.25995E1	2.68285E1	1.20278E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.46377E-2	-8.80015E1	-7.86781E-4	-8.80007E1	0.0E0	4.60148E-3	9.37939E-2	2.72348E1	-3.26543E1	-3.26518E1	2.67932E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80014E1	-8.34465E-4	-8.80002E1	2.14577E-4	4.95911E-3	9.38654E-2	2.73598E1	-3.26657E1	-3.26362E1	2.67872E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80016E1	-2.6226E-4	-8.8E1	3.33786E-4	4.76837E-3	9.39846E-2	2.72668E1	-3.26608E1	-3.25953E1	2.67944E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.8001E1	-5.24521E-4	-8.80002E1	2.6226E-4	4.60148E-3	9.37223E-2	2.72962E1	-3.26762E1	-3.26396E1	2.68082E1	1.19646E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80014E1	-5.96046E-4	-8.80006E1	2.14577E-4	4.673E-3	9.36985E-2	2.72787E1	-3.26705E1	-3.26332E1	2.67978E1	1.19809E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1