[Scan]
initial_time=2016-01-28T22:10:42
final_time=2016-01-28T22:11:01
ip_count=19
run=1026
dataset=9
scan=703
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.83069E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.04796E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.40188E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.61966E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.64008E-8
mult1=-9.48754E-9
mult2=-2.72859E-9
rf_tmon=-4.14592E-3
rf_agc=3.30932E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.53536E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.80517E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.17443E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.09423E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10203E0
lens1_imon=1.49913E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.38764E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83986E1
cs_ef1a_imon=3.05082E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.11799E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.31689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.47955E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63293E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=9.37786E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02109E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.87424E-8
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25749E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.60178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=8.53777E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=8.71953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44146E0
os_ea2_imon=-4.29845E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.19858E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81206E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.35679E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.32866E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.10658E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72348E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.7901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.0676E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.01213E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-2.22866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.75515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50595E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.41777E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08651E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60067E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=8.34415E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.71966E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61452E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60971E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-1.71092E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19653E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83919E-1
res40_imon=-2.26631E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80012E1	-7.15256E-4	-8.80004E1	3.8147E-4	4.45843E-3	9.35793E-2	2.73207E1	-3.26868E1	-3.26498E1	2.68105E1	1.198E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01995E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80013E1	-7.62939E-4	-8.80002E1	2.6226E-4	4.55379E-3	9.37462E-2	2.73026E1	-3.26716E1	-3.26079E1	2.68219E1	1.20092E-7	2.51287E-3	2.51287E-3	6.32328E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80013E1	-6.19888E-4	-8.80004E1	4.76837E-5	4.81606E-3	9.37462E-2	2.73257E1	-3.26596E1	-3.26136E1	2.67816E1	1.201E-7	2.51611E-3	2.51611E-3	6.30171E-3	3.00794E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80012E1	-1.00136E-3	-8.80001E1	2.14577E-4	4.81606E-3	9.39608E-2	2.73532E1	-3.26717E1	-3.26432E1	2.67963E1	1.198E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-9.05991E-4	-8.80003E1	3.33786E-4	4.45843E-3	9.39131E-2	2.72282E1	-3.2644E1	-3.25761E1	2.68118E1	1.19729E-7	2.51871E-3	2.51871E-3	6.32883E-3	3.01353E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80013E1	-8.10623E-4	-8.80001E1	1.90735E-4	4.1008E-3	9.39846E-2	2.73473E1	-3.26395E1	-3.26315E1	2.684E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80016E1	-7.86781E-4	-8.80003E1	-2.38419E-5	4.45843E-3	9.38892E-2	2.72148E1	-3.26378E1	-3.26248E1	2.6855E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80013E1	-5.48363E-4	-8.79999E1	0.0E0	4.41074E-3	9.39131E-2	2.73016E1	-3.26425E1	-3.25989E1	2.67896E1	1.20158E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80014E1	-7.15256E-4	-8.80001E1	3.33786E-4	4.24385E-3	9.41277E-2	2.7218E1	-3.26639E1	-3.2635E1	2.67937E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80015E1	-7.39098E-4	-8.80002E1	3.57628E-4	4.74453E-3	9.38892E-2	2.7391E1	-3.26837E1	-3.26026E1	2.67842E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80013E1	-6.67572E-4	-8.80002E1	3.57628E-4	4.98295E-3	9.377E-2	2.71918E1	-3.25959E1	-3.26449E1	2.67938E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80013E1	-6.91414E-4	-8.79998E1	2.38419E-4	5.05447E-3	9.36031E-2	2.7311E1	-3.26885E1	-3.26413E1	2.68012E1	1.20106E-7	2.51954E-3	2.51954E-3	6.36687E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80014E1	-5.72205E-4	-8.80002E1	1.43051E-4	4.52995E-3	9.39131E-2	2.73464E1	-3.2652E1	-3.26449E1	2.6804E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.9841E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80015E1	-5.72205E-4	-8.80003E1	1.66893E-4	4.95911E-3	9.36747E-2	2.73351E1	-3.27031E1	-3.26236E1	2.6813E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80015E1	-7.86781E-4	-8.80004E1	-4.76837E-5	5.03063E-3	9.38892E-2	2.72853E1	-3.2648E1	-3.26174E1	2.68161E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00676E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80012E1	-6.4373E-4	-8.80004E1	1.43051E-4	4.8399E-3	9.377E-2	2.73234E1	-3.26703E1	-3.26154E1	2.67956E1	1.19976E-7	2.51662E-3	2.51662E-3	6.32057E-3	3.01138E-1
2.0E1	0.0E0	1.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80009E1	-5.72205E-4	-8.80005E1	6.91414E-4	4.93526E-3	9.36508E-2	2.72848E1	-3.25814E1	-3.25706E1	2.67933E1	1.19902E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80014E1	-4.76837E-4	-8.80003E1	7.62939E-4	4.72069E-3	9.41992E-2	2.73196E1	-3.26289E1	-3.26579E1	2.67723E1	1.19991E-7	2.51252E-3	2.51252E-3	6.3074E-3	2.99845E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80014E1	-6.91414E-4	-8.80002E1	6.91414E-4	4.673E-3	9.41277E-2	2.73189E1	-3.26452E1	-3.26074E1	2.68076E1	1.1979E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80014E1	-6.91414E-4	-8.80003E1	2.14577E-4	4.57764E-3	9.40323E-2	2.72348E1	-3.26771E1	-3.25749E1	2.6819E1	1.19653E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1