[Scan]
initial_time=2016-01-28T22:12:28
final_time=2016-01-28T22:12:48
ip_count=19
run=1026
dataset=9
scan=707
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.82217E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.05679E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.46077E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.63138E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.63511E-8
mult1=-9.82467E-9
mult2=-2.80844E-9
rf_tmon=-4.99309E-3
rf_agc=3.2901E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.24688E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12432E2
lens4a_imon=2.05161E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=1.09193E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0756E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.41313E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.11822E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.31941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1572E1
os_ea1_imon=2.46397E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=9.52776E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.8783E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98609E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=8.81088E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45337E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10441E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.36652E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.7038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.07536E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0215E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39322E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.74113E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.39362E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.41087E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59927E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=7.41913E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67762E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61401E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61356E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2771E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21753E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32483E-3
inlet_lpb_pmon=2.9871E-1
chamber_ion_pmon=1.20171E-7
chamber_cvt_pmon=2.51874E-3
foreline_cvt_pmon=2.51874E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.1215E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.46377E-2	-8.80016E1	-7.62939E-4	-8.80004E1	-1.43051E-4	4.50611E-3	9.36031E-2	2.72847E1	-3.26627E1	-3.26422E1	2.6819E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80017E1	-6.91414E-4	-8.80008E1	2.6226E-4	4.24385E-3	9.35078E-2	2.73105E1	-3.26783E1	-3.26074E1	2.68004E1	1.19819E-7	2.52473E-3	2.52473E-3	6.33538E-3	3.03887E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80012E1	-5.48363E-4	-8.80006E1	-1.19209E-4	4.55379E-3	9.36747E-2	2.72732E1	-3.26868E1	-3.26202E1	2.68053E1	1.19953E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.00453E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80012E1	-5.72205E-4	-8.80005E1	9.53674E-5	4.62532E-3	9.38654E-2	2.73171E1	-3.26933E1	-3.2635E1	2.68184E1	1.20209E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80012E1	-1.66893E-4	-8.80007E1	1.90735E-4	4.62532E-3	9.408E-2	2.72054E1	-3.2635E1	-3.26392E1	2.67848E1	1.19601E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80012E1	-5.00679E-4	-8.80003E1	1.43051E-4	4.52995E-3	9.39846E-2	2.73165E1	-3.26543E1	-3.26152E1	2.68148E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80012E1	-6.91414E-4	-8.80007E1	9.53674E-5	4.26769E-3	9.38654E-2	2.73479E1	-3.26768E1	-3.26205E1	2.6822E1	1.19601E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80014E1	-5.48363E-4	-8.80005E1	2.38419E-5	4.86374E-3	9.39369E-2	2.7279E1	-3.26573E1	-3.26434E1	2.67937E1	1.19757E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80013E1	-5.00679E-4	-8.80006E1	2.38419E-4	4.52995E-3	9.37462E-2	2.7266E1	-3.26657E1	-3.26254E1	2.68275E1	1.19902E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80013E1	-4.76837E-4	-8.80005E1	1.66893E-4	4.48227E-3	9.36985E-2	2.74373E1	-3.26549E1	-3.26711E1	2.67989E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80013E1	-4.76837E-4	-8.80006E1	2.38419E-5	4.36306E-3	9.38892E-2	2.72642E1	-3.26182E1	-3.25924E1	2.67974E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80014E1	-4.76837E-4	-8.80004E1	2.38419E-4	4.74453E-3	9.37939E-2	2.73806E1	-3.26608E1	-3.26526E1	2.68076E1	1.20031E-7	2.52362E-3	2.52362E-3	6.33538E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.80014E1	-8.34465E-4	-8.80005E1	2.38419E-4	4.69685E-3	9.38177E-2	2.72048E1	-3.26146E1	-3.26651E1	2.67649E1	1.19749E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.01738E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80013E1	-4.76837E-4	-8.80004E1	2.86102E-4	4.79221E-3	9.36985E-2	2.72985E1	-3.26512E1	-3.26146E1	2.6786E1	1.20017E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80013E1	-5.96046E-4	-8.80007E1	5.48363E-4	4.88758E-3	9.34362E-2	2.73117E1	-3.26921E1	-3.26344E1	2.68124E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80015E1	-7.15256E-4	-8.80004E1	2.86102E-4	4.8399E-3	9.377E-2	2.73093E1	-3.26476E1	-3.26386E1	2.681E1	1.19925E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00942E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80017E1	-5.96046E-4	-8.80005E1	4.52995E-4	4.64916E-3	9.39131E-2	2.7229E1	-3.2649E1	-3.26331E1	2.68047E1	1.19705E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80017E1	-8.58307E-4	-8.80004E1	1.19209E-4	4.55379E-3	9.37223E-2	2.72922E1	-3.26652E1	-3.26366E1	2.68163E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80015E1	-4.52995E-4	-8.80001E1	3.09944E-4	4.41074E-3	9.37223E-2	2.74139E1	-3.26705E1	-3.26158E1	2.67988E1	1.19676E-7	2.52364E-3	2.52364E-3	6.34322E-3	2.98696E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80014E1	-6.19888E-4	-8.80005E1	4.76837E-4	4.69685E-3	9.39369E-2	2.73339E1	-3.26855E1	-3.26212E1	2.68118E1	1.20171E-7	2.51874E-3	2.51874E-3	6.32483E-3	2.9871E-1