[Scan]
initial_time=2016-01-28T22:14:15
final_time=2016-01-28T22:14:34
ip_count=19
run=1026
dataset=9
scan=711
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.83156E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-5.54264E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.44162E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.59044E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.63512E-8
mult1=-9.36486E-9
mult2=-2.78497E-9
rf_tmon=-5.72144E-3
rf_agc=3.20673E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.21445E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61867E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.1856E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=1.08075E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06779E0
lens1_imon=1.66896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0345E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83829E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.1225E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=2.48236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=9.52415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=1.95377E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.88216E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26566E1
iondef3_imon=1.52668E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26676E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.6062E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=8.48953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48101E0
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.21768E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.35931E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.3137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72959E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68026E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.78445E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.07662E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.87065E1
mask2_imon=-4.42708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.55945E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.71229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33165E1
os_fil1_imon=9.41375E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08176E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59869E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31784E1
cs_fil1_imon=7.56329E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.9359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61491E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29897E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.74761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-1.98121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.53906E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80016E1	-1.66893E-4	-8.80003E1	1.66893E-4	4.55379E-3	9.377E-2	2.73741E1	-3.26644E1	-3.26313E1	2.68221E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80015E1	-4.52995E-4	-8.80004E1	2.38419E-4	4.79221E-3	9.40323E-2	2.72941E1	-3.26462E1	-3.26272E1	2.67926E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02511E-1
3.0E0	0.0E0	1.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80015E1	-6.19888E-4	-8.80008E1	2.14577E-4	4.79221E-3	9.40084E-2	2.74628E1	-3.26713E1	-3.26467E1	2.68032E1	1.20031E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80014E1	-5.96046E-4	-8.80007E1	2.14577E-4	5.00679E-3	9.37462E-2	2.71753E1	-3.26608E1	-3.26496E1	2.68099E1	1.20113E-7	2.51854E-3	2.51854E-3	6.3023E-3	3.00392E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80013E1	-7.62939E-4	-8.80006E1	4.05312E-4	4.3869E-3	9.38654E-2	2.72666E1	-3.26428E1	-3.26777E1	2.68058E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80015E1	-4.76837E-4	-8.80003E1	5.00679E-4	4.62532E-3	9.37939E-2	2.73033E1	-3.26825E1	-3.26284E1	2.68118E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.98222E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80015E1	-4.76837E-4	-8.80003E1	2.6226E-4	4.48227E-3	9.40323E-2	2.70864E1	-3.26549E1	-3.26206E1	2.68016E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80015E1	-4.76837E-4	-8.80003E1	2.38419E-4	4.52995E-3	9.42469E-2	2.73171E1	-3.26777E1	-3.26026E1	2.68046E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80015E1	-8.34465E-4	-8.80002E1	1.66893E-4	4.55379E-3	9.377E-2	2.72642E1	-3.26338E1	-3.26212E1	2.68292E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80014E1	-5.00679E-4	-8.80001E1	3.09944E-4	4.57764E-3	9.37462E-2	2.72084E1	-3.26524E1	-3.26422E1	2.67848E1	1.19705E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80017E1	-7.62939E-4	-8.80005E1	-2.38419E-5	4.8399E-3	9.38654E-2	2.73517E1	-3.26142E1	-3.26402E1	2.67794E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80015E1	-5.72205E-4	-8.80004E1	2.14577E-4	4.69685E-3	9.41277E-2	2.7206E1	-3.26717E1	-3.26308E1	2.68124E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80016E1	-4.29153E-4	-8.80003E1	3.33786E-4	4.31538E-3	9.42469E-2	2.73472E1	-3.26819E1	-3.25882E1	2.6801E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80015E1	-2.6226E-4	-8.80003E1	6.91414E-4	4.52995E-3	9.40084E-2	2.73694E1	-3.26809E1	-3.25953E1	2.68082E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80018E1	-2.6226E-4	-8.80008E1	5.96046E-4	4.50611E-3	9.40084E-2	2.72762E1	-3.26726E1	-3.2626E1	2.67932E1	1.20311E-7	2.50989E-3	2.50989E-3	6.31817E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80019E1	-3.57628E-4	-8.80007E1	5.72205E-4	4.57764E-3	9.36508E-2	2.73375E1	-3.26828E1	-3.26127E1	2.67873E1	1.20209E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80016E1	-5.24521E-4	-8.80001E1	4.29153E-4	4.64916E-3	9.37939E-2	2.72384E1	-3.26915E1	-3.26639E1	2.67938E1	1.1979E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99093E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80016E1	-6.19888E-4	-8.80007E1	3.57628E-4	4.91142E-3	9.40561E-2	2.73309E1	-3.27161E1	-3.2599E1	2.68046E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80013E1	-3.8147E-4	-8.80007E1	2.86102E-4	4.76837E-3	9.377E-2	2.74007E1	-3.26673E1	-3.26313E1	2.67966E1	1.20278E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.80012E1	-3.09944E-4	-8.80006E1	5.24521E-4	4.64916E-3	9.37223E-2	2.72959E1	-3.26676E1	-3.26566E1	2.68026E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1