[Scan]
initial_time=2016-01-28T22:16:58
final_time=2016-01-28T22:17:21
ip_count=19
run=1026
dataset=9
scan=717
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.82094E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.80716E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.40742E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.5556E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.63569E-8
mult1=-1.0109E-8
mult2=-2.8584E-9
rf_tmon=-4.39791E-3
rf_agc=3.28895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.3674E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6471E0
bslens_imon=2.73888E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19918E1
lens5a_imon=1.99364E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05048E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.20032E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02141E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.09817E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08546E0
lens1_imon=1.50114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64842E1
os_ef1alow_imon=2.96649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03632E1
cs_ea2_imon=1.39308E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84127E1
cs_ef1a_imon=3.04176E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.12151E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11324E1
os_restr1_imon=4.31763E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15285E1
os_ea1_imon=2.47625E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.09299E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.255E0
cs_ionrep_imon=9.40115E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93307E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.96452E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.88109E-8
tplens_vset=1.4E-1
tplens_vmon=1.65402E0
tplens_imon=-2.91544E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.50639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26542E1
iondef2_imon=1.59269E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=8.6292E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29229E0
ionrepsh_imon=8.56147E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.18192E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74568E1
cs_ef2b_imon=3.1342E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43369E0
os_ea2_imon=-6.14053E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00687E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71215E1
cs_ef2a_imon=3.19631E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06648E0
os_ef2alow_imon=-2.48647E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13483E-1
os_ef2bup_imon=-5.1939E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10875E1
os_restr2_imon=3.37203E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.2865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0193E1
cs_anode2_imon=2.08787E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72583E1
iondef1_imon=1.09963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.08446E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.82058E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.08267E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10772E0
cs_ionaccel_imon=-8.89493E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56124E1
einzel_imon=7.75939E-6
window_vset=0.0E0
window_vmon=2.18367E-1
window_imon=-9.78215E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39304E-4
mask2_vset=0.0E0
mask2_vmon=-1.87012E1
mask2_imon=-4.83093E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.63462E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.61479E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.17846E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47568E0
defgridb_imon=6.23127E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.41065E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08045E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59875E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=8.51057E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01085E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.98904E-2
os_fil2_imon=-2.46987E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15222E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27904E-1
cs_fil2_imon=-2.04534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09329E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3201E-3
inlet_lpb_pmon=2.99996E-1
chamber_ion_pmon=1.20213E-7
chamber_cvt_pmon=2.51793E-3
foreline_cvt_pmon=2.51793E-3
chamber_tmon=1.40082E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77877E-1
res40_imon=-2.50365E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=831
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80015E1	-1.00136E-3	-8.80006E1	1.90735E-4	4.95911E-3	9.39131E-2	2.73415E1	-3.26772E1	-3.26397E1	2.68088E1	1.20002E-7	2.5196E-3	2.5196E-3	6.30299E-3	3.00871E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80017E1	-9.29832E-4	-8.80006E1	-7.15256E-5	4.69685E-3	9.4223E-2	2.73328E1	-3.26628E1	-3.26064E1	2.67853E1	1.19732E-7	2.51369E-3	2.51369E-3	6.31779E-3	3.00494E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80015E1	-1.14441E-3	-8.80004E1	2.38419E-5	4.79221E-3	9.40323E-2	2.72605E1	-3.26564E1	-3.26088E1	2.68036E1	1.19911E-7	2.5187E-3	2.5187E-3	6.31192E-3	3.00154E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80014E1	-8.82149E-4	-8.80002E1	0.0E0	4.31538E-3	9.39608E-2	2.73195E1	-3.26462E1	-3.26556E1	2.6806E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80013E1	-5.72205E-4	-8.80003E1	-3.57628E-4	4.79221E-3	9.40084E-2	2.7329E1	-3.26735E1	-3.26045E1	2.67948E1	1.19736E-7	2.519E-3	2.519E-3	6.31413E-3	3.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80014E1	-6.19888E-4	-8.80006E1	0.0E0	4.93526E-3	9.38416E-2	2.72969E1	-3.26579E1	-3.26178E1	2.67948E1	1.1983E-7	2.52014E-3	2.52014E-3	6.31097E-3	3.00673E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80017E1	-7.62939E-4	-8.80007E1	9.53674E-5	5.17368E-3	9.41277E-2	2.72822E1	-3.26661E1	-3.26279E1	2.67958E1	1.20113E-7	2.51752E-3	2.51752E-3	6.31761E-3	2.99421E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80015E1	-5.96046E-4	-8.80007E1	9.53674E-5	5.24521E-3	9.37462E-2	2.73168E1	-3.26723E1	-3.26226E1	2.68237E1	1.19931E-7	2.51371E-3	2.51371E-3	6.32434E-3	2.99795E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80015E1	-8.10623E-4	-8.80003E1	-3.8147E-4	4.81606E-3	9.39369E-2	2.73173E1	-3.26806E1	-3.26208E1	2.68101E1	1.20135E-7	2.52053E-3	2.52053E-3	6.31058E-3	3.00773E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80015E1	-7.86781E-4	-8.80003E1	0.0E0	4.74453E-3	9.408E-2	2.73366E1	-3.27093E1	-3.25887E1	2.68225E1	1.20052E-7	2.51709E-3	2.51709E-3	6.31163E-3	3.01811E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80015E1	-5.00679E-4	-8.80005E1	-4.76837E-5	4.76837E-3	9.377E-2	2.73451E1	-3.26599E1	-3.2619E1	2.68017E1	1.20098E-7	2.51811E-3	2.51811E-3	6.32087E-3	2.99047E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80015E1	-6.91414E-4	-8.80003E1	-4.76837E-5	4.72069E-3	9.408E-2	2.72804E1	-3.26634E1	-3.26321E1	2.67724E1	1.199E-7	2.51733E-3	2.51733E-3	6.3375E-3	2.98244E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-5.00679E-4	-8.80002E1	3.8147E-4	4.8399E-3	9.38177E-2	2.72982E1	-3.26749E1	-3.26273E1	2.67916E1	1.1986E-7	2.51923E-3	2.51923E-3	6.34261E-3	2.98863E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80018E1	-4.52995E-4	-8.80003E1	1.19209E-4	4.69685E-3	9.35078E-2	2.7364E1	-3.27206E1	-3.26306E1	2.68082E1	1.20151E-7	2.51832E-3	2.51832E-3	6.31135E-3	3.01326E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80015E1	-5.96046E-4	-8.80002E1	7.15256E-5	5.07832E-3	9.36031E-2	2.73025E1	-3.26533E1	-3.25807E1	2.67818E1	1.1965E-7	2.51793E-3	2.51793E-3	6.34131E-3	3.01003E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80017E1	-1.12057E-3	-8.80008E1	-2.86102E-4	4.74453E-3	9.37223E-2	2.73115E1	-3.26789E1	-3.26384E1	2.68064E1	1.19816E-7	2.51682E-3	2.51682E-3	6.33056E-3	2.99626E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80017E1	-1.16825E-3	-8.80006E1	-2.38419E-5	4.69685E-3	9.34601E-2	2.73123E1	-3.26392E1	-3.2622E1	2.68062E1	1.20001E-7	2.52305E-3	2.52305E-3	6.31135E-3	2.99822E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80014E1	-1.07288E-3	-8.80001E1	-4.76837E-5	4.72069E-3	9.37939E-2	2.73427E1	-3.26572E1	-3.26429E1	2.68277E1	1.20156E-7	2.51625E-3	2.51625E-3	6.32936E-3	3.00128E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80016E1	-7.39098E-4	-8.80003E1	-1.19209E-4	4.64916E-3	9.35793E-2	2.74093E1	-3.26383E1	-3.26443E1	2.67929E1	1.1984E-7	2.51874E-3	2.51874E-3	6.31902E-3	3.02581E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80017E1	-9.29832E-4	-8.80005E1	-2.38419E-5	4.60148E-3	9.39608E-2	2.72583E1	-3.26542E1	-3.26122E1	2.68106E1	1.20213E-7	2.51793E-3	2.51793E-3	6.3201E-3	2.99996E-1