[Scan]
initial_time=2016-01-28T22:17:29
final_time=2016-01-28T22:17:54
ip_count=19
run=1026
dataset=9
scan=718
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.8844E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.89657E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.40804E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.58118E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63231E-8
mult1=-1.00989E-8
mult2=-2.66361E-9
rf_tmon=-5.27027E-3
rf_agc=3.16052E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.85146E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62979E0
bslens_imon=2.60636E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20294E1
lens5a_imon=1.97949E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05179E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53641E1
cs_ef1b_imon=3.18565E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=1.10075E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06798E0
lens1_imon=1.62085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97826E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.41039E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84308E1
cs_ef1a_imon=3.05063E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.12339E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1163E1
os_restr1_imon=4.30711E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15401E1
os_ea1_imon=2.4695E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63645E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21763E0
cs_ionrep_imon=9.43797E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.95897E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.8802E-8
tplens_vset=1.4E-1
tplens_vmon=1.67945E0
tplens_imon=-2.25444E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.49769E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.6005E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98361E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.15094E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30381E0
ionrepsh_imon=8.59847E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33672E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.14277E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44981E0
os_ea2_imon=-5.72196E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.19386E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05861E0
os_ef2alow_imon=-2.46555E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82389E-1
os_ef2bup_imon=-5.16278E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10814E1
os_restr2_imon=3.37844E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01846E1
cs_anode2_imon=2.09824E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.08554E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67423E1
iondef4_imon=1.10723E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.78414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.09955E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12102E0
cs_ionaccel_imon=-9.90736E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5641E1
einzel_imon=7.61182E-6
window_vset=0.0E0
window_vmon=2.21378E-1
window_imon=-8.81265E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86967E1
mask2_imon=-3.5824E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.80459E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.56054E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.19017E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37497E0
defgridb_imon=6.10125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.41706E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08246E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6006E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=8.0136E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77729E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61846E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.48746E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45763E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28013E-1
cs_fil2_imon=-2.24926E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26799E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33794E-3
inlet_lpb_pmon=3.00778E-1
chamber_ion_pmon=1.19743E-7
chamber_cvt_pmon=2.52106E-3
foreline_cvt_pmon=2.52106E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.56224E-1
res40_imon=-2.34087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.45602E-2	-8.80017E1	-7.15256E-4	-8.80004E1	-2.38419E-5	4.98295E-3	9.37939E-2	2.73127E1	-3.26595E1	-3.2619E1	2.6805E1	1.20035E-7	2.51221E-3	2.51221E-3	6.32592E-3	2.99845E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80016E1	-1.90735E-4	-8.80002E1	4.76837E-5	4.52995E-3	9.37939E-2	2.73079E1	-3.26726E1	-3.26216E1	2.68141E1	1.19757E-7	2.51891E-3	2.51891E-3	6.31234E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80016E1	-3.57628E-4	-8.80004E1	-4.76837E-5	4.673E-3	9.40323E-2	2.73031E1	-3.26453E1	-3.26656E1	2.6791E1	1.19698E-7	2.51913E-3	2.51913E-3	6.31315E-3	2.99623E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80017E1	-4.05312E-4	-8.80003E1	1.90735E-4	4.43459E-3	9.377E-2	2.73352E1	-3.26506E1	-3.26381E1	2.68286E1	1.19894E-7	2.51838E-3	2.51838E-3	6.28468E-3	3.00631E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80016E1	-4.05312E-4	-8.80002E1	2.14577E-4	4.45843E-3	9.37462E-2	2.72901E1	-3.26622E1	-3.26128E1	2.67896E1	1.199E-7	2.51562E-3	2.51562E-3	6.33319E-3	3.00075E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80017E1	-5.48363E-4	-8.80003E1	9.53674E-5	4.86374E-3	9.36985E-2	2.73097E1	-3.2664E1	-3.26306E1	2.67832E1	1.20132E-7	2.51371E-3	2.51371E-3	6.33282E-3	2.99594E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80015E1	-5.48363E-4	-8.80005E1	3.57628E-4	4.55379E-3	9.37939E-2	2.72989E1	-3.26394E1	-3.26179E1	2.67982E1	1.20185E-7	2.51135E-3	2.51135E-3	6.31169E-3	3.01917E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.54877E-2	-8.80017E1	-6.4373E-4	-8.80006E1	3.57628E-4	4.72069E-3	9.39131E-2	2.72233E1	-3.26909E1	-3.26753E1	2.68307E1	1.19785E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01193E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80016E1	-9.53674E-4	-8.80009E1	4.05312E-4	4.79221E-3	9.36985E-2	2.73355E1	-3.2645E1	-3.26195E1	2.6803E1	1.19626E-7	2.51675E-3	2.51675E-3	6.33112E-3	3.00761E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80016E1	-5.48363E-4	-8.80007E1	2.86102E-4	4.76837E-3	9.38654E-2	2.72808E1	-3.2627E1	-3.26637E1	2.68087E1	1.19946E-7	2.5178E-3	2.5178E-3	6.29168E-3	3.00557E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80014E1	-5.00679E-4	-8.80004E1	7.15256E-5	4.79221E-3	9.38654E-2	2.72712E1	-3.26235E1	-3.2642E1	2.68006E1	1.19859E-7	2.52075E-3	2.52075E-3	6.31599E-3	2.99056E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80015E1	-5.72205E-4	-8.80004E1	3.57628E-4	4.72069E-3	9.38177E-2	2.73128E1	-3.26734E1	-3.26196E1	2.67847E1	1.1964E-7	2.52051E-3	2.52051E-3	6.33056E-3	3.0183E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80015E1	-2.86102E-4	-8.80006E1	-1.19209E-4	4.88758E-3	9.408E-2	2.7341E1	-3.26339E1	-3.26516E1	2.67861E1	1.19806E-7	2.51575E-3	2.51575E-3	6.30351E-3	3.01237E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80016E1	-5.48363E-4	-8.80005E1	9.53674E-5	4.74453E-3	9.41277E-2	2.73664E1	-3.26417E1	-3.25535E1	2.67915E1	1.198E-7	2.51542E-3	2.51542E-3	6.31189E-3	3.01823E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80019E1	-7.86781E-4	-8.80005E1	1.19209E-4	4.60148E-3	9.39131E-2	2.7307E1	-3.26382E1	-3.26138E1	2.68114E1	1.19816E-7	2.51037E-3	2.51037E-3	6.32129E-3	3.00505E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80018E1	-6.91414E-4	-8.80002E1	2.14577E-4	4.74453E-3	9.39131E-2	2.72917E1	-3.26532E1	-3.26241E1	2.67963E1	1.19981E-7	2.50964E-3	2.50964E-3	6.29027E-3	3.01097E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80018E1	-7.39098E-4	-8.80006E1	2.86102E-4	4.95911E-3	9.38654E-2	2.73033E1	-3.26716E1	-3.26286E1	2.67942E1	1.19818E-7	2.5199E-3	2.5199E-3	6.32028E-3	2.97839E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80017E1	-8.82149E-4	-8.80004E1	5.24521E-4	4.88758E-3	9.35555E-2	2.72956E1	-3.26616E1	-3.26489E1	2.68213E1	1.19952E-7	2.51746E-3	2.51746E-3	6.3074E-3	2.98367E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80016E1	-4.05312E-4	-8.80007E1	-2.38419E-5	5.03063E-3	9.36508E-2	2.73204E1	-3.26375E1	-3.26313E1	2.67929E1	1.19785E-7	2.51874E-3	2.51874E-3	6.32483E-3	2.98985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80016E1	-6.91414E-4	-8.80007E1	3.33786E-4	4.86374E-3	9.35555E-2	2.73201E1	-3.26585E1	-3.26018E1	2.67423E1	1.19743E-7	2.52106E-3	2.52106E-3	6.33794E-3	3.00778E-1