[Scan]
initial_time=2016-01-28T22:18:02
final_time=2016-01-28T22:18:26
ip_count=19
run=1026
dataset=9
scan=719
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.80824E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.75364E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.38249E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.52996E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.64101E-8
mult1=-9.28674E-9
mult2=-2.68403E-9
rf_tmon=-4.64125E-3
rf_agc=3.31042E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.45299E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65715E0
bslens_imon=2.81417E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19882E1
lens5a_imon=1.97074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05278E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5338E1
cs_ef1b_imon=3.18946E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.0217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05246E1
cs_ea1_imon=1.10034E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0657E0
lens1_imon=1.40861E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64727E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.40422E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84264E1
cs_ef1a_imon=3.04966E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.12493E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11318E1
os_restr1_imon=4.31725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1497E1
os_ea1_imon=2.47621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.09994E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26035E0
cs_ionrep_imon=9.56815E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02107E1
cs_anode1_imon=1.96599E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.88049E-8
tplens_vset=1.4E-1
tplens_vmon=1.64583E0
tplens_imon=-2.70812E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.50485E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.57711E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=8.47435E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2576E0
ionrepsh_imon=8.56181E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33547E1
lens5b_imon=2.17398E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74382E1
cs_ef2b_imon=3.13043E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44787E0
os_ea2_imon=-4.52282E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00491E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71279E1
cs_ef2a_imon=3.20892E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04537E0
os_ef2alow_imon=-2.54887E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.26049E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11042E1
os_restr2_imon=3.37726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.3072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01496E1
cs_anode2_imon=2.09313E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72483E1
iondef1_imon=1.09869E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6782E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.81596E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.09557E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12257E0
cs_ionaccel_imon=-7.68146E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02133E2
cs_ionfocb_imon=1.47382E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56032E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=1.92355E-1
window_imon=-1.01466E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.39068E-4
mask2_vset=0.0E0
mask2_vmon=-1.87177E1
mask2_imon=-5.4434E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.57528E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.68443E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.23543E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31557E0
defgridb_imon=6.18951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.41085E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60117E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31792E1
cs_fil1_imon=8.54777E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02398E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61754E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.11185E-2
os_fil2_imon=-2.38306E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10388E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31167E-1
cs_fil2_imon=-1.70731E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31461E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21762E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32888E-3
inlet_lpb_pmon=3.01711E-1
chamber_ion_pmon=1.20063E-7
chamber_cvt_pmon=2.51819E-3
foreline_cvt_pmon=2.51819E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70955E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80014E1	-6.19888E-4	-8.80007E1	2.38419E-4	4.52995E-3	9.38654E-2	2.73154E1	-3.26585E1	-3.26092E1	2.67802E1	1.1986E-7	2.51923E-3	2.51923E-3	6.29738E-3	3.00532E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80015E1	-7.39098E-4	-8.80007E1	-2.38419E-4	4.74453E-3	9.42707E-2	2.72794E1	-3.26533E1	-3.26187E1	2.67928E1	1.19765E-7	2.51623E-3	2.51623E-3	6.3275E-3	3.01729E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80015E1	-7.39098E-4	-8.80007E1	1.43051E-4	4.74453E-3	9.43184E-2	2.72612E1	-3.26686E1	-3.26495E1	2.679E1	1.19873E-7	2.51817E-3	2.51817E-3	6.31214E-3	3.00535E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80013E1	-5.72205E-4	-8.80007E1	0.0E0	4.76837E-3	9.40323E-2	2.72594E1	-3.26521E1	-3.26299E1	2.68013E1	1.1984E-7	2.5118E-3	2.5118E-3	6.3074E-3	3.00916E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80014E1	-5.24521E-4	-8.80004E1	2.14577E-4	5.03063E-3	9.39131E-2	2.73004E1	-3.26614E1	-3.26219E1	2.67986E1	1.19974E-7	2.51758E-3	2.51758E-3	6.31487E-3	3.01906E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80015E1	-4.29153E-4	-8.80006E1	1.90735E-4	5.03063E-3	9.39131E-2	2.73023E1	-3.26617E1	-3.26149E1	2.68208E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80014E1	-6.91414E-4	-8.80005E1	-4.76837E-5	4.88758E-3	9.41038E-2	2.7344E1	-3.26277E1	-3.26498E1	2.68047E1	1.19874E-7	2.51826E-3	2.51826E-3	6.31974E-3	3.01412E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80015E1	-4.29153E-4	-8.80003E1	4.76837E-5	4.98295E-3	9.38177E-2	2.7325E1	-3.26446E1	-3.26001E1	2.68082E1	1.19963E-7	2.51911E-3	2.51911E-3	6.32716E-3	3.00761E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80013E1	-1.00136E-3	-8.80005E1	1.19209E-4	4.26769E-3	9.36508E-2	2.72497E1	-3.26664E1	-3.26105E1	2.68151E1	1.19811E-7	2.52131E-3	2.52131E-3	6.33282E-3	3.02216E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80014E1	-1.00136E-3	-8.80004E1	-1.19209E-4	4.48227E-3	9.38654E-2	2.73717E1	-3.26736E1	-3.26156E1	2.68038E1	1.19937E-7	2.51747E-3	2.51747E-3	6.30285E-3	3.01282E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80014E1	-5.96046E-4	-8.80006E1	2.86102E-4	4.45843E-3	9.40561E-2	2.73035E1	-3.26718E1	-3.26329E1	2.68024E1	1.19813E-7	2.52384E-3	2.52384E-3	6.31135E-3	3.00385E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.8001E1	-7.39098E-4	-8.80004E1	2.38419E-5	4.64916E-3	9.37939E-2	2.73578E1	-3.26603E1	-3.26138E1	2.68192E1	1.20332E-7	2.51545E-3	2.51545E-3	6.33131E-3	3.01381E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80011E1	-5.48363E-4	-8.80002E1	4.76837E-5	4.3869E-3	9.36985E-2	2.72777E1	-3.26635E1	-3.26315E1	2.68014E1	1.19981E-7	2.51562E-3	2.51562E-3	6.31599E-3	3.00892E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80014E1	-5.48363E-4	-8.80007E1	9.53674E-5	4.48227E-3	9.36985E-2	2.7339E1	-3.26828E1	-3.25664E1	2.68092E1	1.19891E-7	2.51709E-3	2.51709E-3	6.29051E-3	3.006E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80013E1	-5.96046E-4	-8.80003E1	7.15256E-5	4.81606E-3	9.377E-2	2.73216E1	-3.26232E1	-3.2626E1	2.67948E1	1.1994E-7	2.50879E-3	2.50879E-3	6.31169E-3	3.00687E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.8001E1	-4.76837E-4	-8.80003E1	3.09944E-4	4.673E-3	9.37223E-2	2.72286E1	-3.2658E1	-3.26061E1	2.68036E1	1.19826E-7	2.51324E-3	2.51324E-3	6.30305E-3	3.01401E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80012E1	-5.72205E-4	-8.80007E1	2.14577E-4	4.62532E-3	9.37462E-2	2.72582E1	-3.2647E1	-3.26475E1	2.67998E1	1.20001E-7	2.52434E-3	2.52434E-3	6.32828E-3	2.9992E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80012E1	-4.76837E-4	-8.80008E1	2.86102E-4	4.50611E-3	9.35078E-2	2.72845E1	-3.26698E1	-3.26482E1	2.67935E1	1.20123E-7	2.52144E-3	2.52144E-3	6.30278E-3	3.00946E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80015E1	-2.86102E-4	-8.80007E1	1.90735E-4	4.43459E-3	9.41038E-2	2.7323E1	-3.26538E1	-3.25969E1	2.67758E1	1.19824E-7	2.52177E-3	2.52177E-3	6.3121E-3	3.02847E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80013E1	-3.57628E-4	-8.80006E1	2.38419E-4	4.72069E-3	9.408E-2	2.72483E1	-3.26723E1	-3.26212E1	2.6782E1	1.20063E-7	2.51819E-3	2.51819E-3	6.32888E-3	3.01711E-1