[Scan]
initial_time=2016-01-28T22:18:34
final_time=2016-01-28T22:18:59
ip_count=19
run=1026
dataset=9
scan=720
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.83704E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.76746E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.44467E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.51212E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.64202E-8
mult1=-1.01754E-8
mult2=-2.82571E-9
rf_tmon=-4.49597E-3
rf_agc=3.30081E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.58436E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.59337E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19922E1
lens5a_imon=1.99033E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05221E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.0217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04767E1
cs_ea1_imon=1.09764E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07517E0
lens1_imon=1.7838E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64639E1
os_ef1alow_imon=2.96853E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03896E1
cs_ea2_imon=1.40757E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.04486E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12521E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11433E1
os_restr1_imon=4.31319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15485E1
os_ea1_imon=2.47268E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08317E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23819E0
cs_ionrep_imon=9.55814E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93476E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=1.9608E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.88288E-8
tplens_vset=1.4E-1
tplens_vmon=1.63525E0
tplens_imon=-3.29731E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26298E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.59327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98315E-4
ql6_vset=1.0E-1
ql6_vmon=9.41992E-2
ql6_imon=8.78584E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26961E0
ionrepsh_imon=8.76402E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17357E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74765E1
cs_ef2b_imon=3.1297E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44883E0
os_ea2_imon=-6.26367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.21119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05912E0
os_ef2alow_imon=-2.51116E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10263E-1
os_ef2bup_imon=-5.23272E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10941E1
os_restr2_imon=3.37053E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.31195E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01952E1
cs_anode2_imon=2.09855E-5
iondef1_vset=2.763E1
iondef1_vmon=2.733E1
iondef1_imon=1.08806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.84738E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.11517E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1048E0
cs_ionaccel_imon=-9.26878E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56152E1
einzel_imon=7.80643E-6
window_vset=0.0E0
window_vmon=2.20365E-1
window_imon=-1.20055E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3926E-4
mask2_vset=0.0E0
mask2_vmon=-1.86881E1
mask2_imon=-4.88996E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.43534E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.68448E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.23449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37621E0
defgridb_imon=6.20245E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33188E1
os_fil1_imon=9.41776E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07638E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60092E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31738E1
cs_fil1_imon=7.7754E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51882E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61682E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90836E-2
os_fil2_imon=-2.48239E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53474E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30198E-1
cs_fil2_imon=-2.01106E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21856E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3269E-3
inlet_lpb_pmon=2.99753E-1
chamber_ion_pmon=1.20028E-7
chamber_cvt_pmon=2.51653E-3
foreline_cvt_pmon=2.51653E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04022E-1
res40_imon=-2.41081E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.45602E-2	-8.80013E1	-1.90735E-4	-8.80003E1	3.09944E-4	4.673E-3	9.36985E-2	2.7267E1	-3.26687E1	-3.26545E1	2.68047E1	1.19651E-7	2.51926E-3	2.51926E-3	6.32174E-3	3.02523E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80015E1	-4.05312E-4	-8.80006E1	1.90735E-4	4.48227E-3	9.35793E-2	2.73076E1	-3.26557E1	-3.26186E1	2.68033E1	1.19628E-7	2.52058E-3	2.52058E-3	6.31761E-3	3.00878E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80013E1	-2.6226E-4	-8.80003E1	2.14577E-4	4.72069E-3	9.38892E-2	2.73305E1	-3.26884E1	-3.26565E1	2.68004E1	1.19903E-7	2.51659E-3	2.51659E-3	6.30243E-3	2.99299E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80011E1	-3.8147E-4	-8.80003E1	1.90735E-4	4.93526E-3	9.37223E-2	2.73086E1	-3.26874E1	-3.26002E1	2.68411E1	1.19907E-7	2.51085E-3	2.51085E-3	6.3074E-3	3.01043E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80013E1	-5.00679E-4	-8.80004E1	3.33786E-4	4.55379E-3	9.41277E-2	2.72768E1	-3.2663E1	-3.26192E1	2.68136E1	1.19728E-7	2.52236E-3	2.52236E-3	6.28893E-3	2.99626E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80013E1	-7.15256E-4	-8.80004E1	2.14577E-4	4.36306E-3	9.40323E-2	2.7218E1	-3.26928E1	-3.26098E1	2.67873E1	1.2003E-7	2.52072E-3	2.52072E-3	6.31974E-3	3.02988E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80014E1	-6.4373E-4	-8.80005E1	1.90735E-4	4.673E-3	9.38892E-2	2.73136E1	-3.26378E1	-3.26246E1	2.68125E1	1.20144E-7	2.52161E-3	2.52161E-3	6.31169E-3	3.01711E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80013E1	-4.05312E-4	-8.80003E1	4.29153E-4	4.93526E-3	9.38892E-2	2.7308E1	-3.26394E1	-3.25974E1	2.67939E1	1.19737E-7	2.51647E-3	2.51647E-3	6.33319E-3	3.01097E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80013E1	-7.62939E-4	-8.80005E1	3.57628E-4	4.76837E-3	9.38177E-2	2.73113E1	-3.26864E1	-3.2617E1	2.68082E1	1.20092E-7	2.51877E-3	2.51877E-3	6.29895E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80014E1	-7.39098E-4	-8.80009E1	4.29153E-4	4.93526E-3	9.38177E-2	2.73286E1	-3.26782E1	-3.26072E1	2.67554E1	1.19976E-7	2.51278E-3	2.51278E-3	6.3074E-3	3.00857E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80011E1	-6.19888E-4	-8.80007E1	3.8147E-4	4.62532E-3	9.39608E-2	2.73975E1	-3.26796E1	-3.2627E1	2.6818E1	1.20157E-7	2.51324E-3	2.51324E-3	6.3292E-3	3.0057E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80013E1	-6.4373E-4	-8.80007E1	3.8147E-4	4.52995E-3	9.37223E-2	2.72303E1	-3.2658E1	-3.26269E1	2.67854E1	1.20098E-7	2.519E-3	2.519E-3	6.32536E-3	2.99899E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80014E1	-8.10623E-4	-8.80005E1	3.33786E-4	4.98295E-3	9.39608E-2	2.72858E1	-3.26443E1	-3.26204E1	2.68374E1	1.19926E-7	2.52463E-3	2.52463E-3	6.33508E-3	3.01138E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80014E1	-7.39098E-4	-8.80005E1	-1.43051E-4	4.74453E-3	9.408E-2	2.73862E1	-3.27056E1	-3.25252E1	2.68111E1	1.20063E-7	2.51904E-3	2.51904E-3	6.32458E-3	3.00483E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80017E1	-6.19888E-4	-8.80006E1	2.38419E-4	4.95911E-3	9.40561E-2	2.73257E1	-3.2644E1	-3.2576E1	2.68319E1	1.20226E-7	2.52438E-3	2.52438E-3	6.29844E-3	2.9926E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80015E1	-8.34465E-4	-8.80003E1	-9.53674E-5	4.64916E-3	9.38892E-2	2.72501E1	-3.26666E1	-3.26532E1	2.68166E1	1.19665E-7	2.51695E-3	2.51695E-3	6.33309E-3	3.00886E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80015E1	-8.34465E-4	-8.80002E1	0.0E0	4.74453E-3	9.40323E-2	2.73251E1	-3.26729E1	-3.26404E1	2.6805E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80014E1	-1.09673E-3	-8.80006E1	0.0E0	4.74453E-3	9.40561E-2	2.731E1	-3.26578E1	-3.26174E1	2.68364E1	1.19851E-7	2.5155E-3	2.5155E-3	6.33532E-3	3.01859E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80014E1	-6.19888E-4	-8.80005E1	3.57628E-4	4.8399E-3	9.41992E-2	2.72958E1	-3.26551E1	-3.26315E1	2.67941E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00942E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80013E1	-6.91414E-4	-8.80003E1	1.19209E-4	4.95911E-3	9.41992E-2	2.733E1	-3.26585E1	-3.26298E1	2.68337E1	1.20028E-7	2.51653E-3	2.51653E-3	6.3269E-3	2.99753E-1