[Scan]
initial_time=2016-01-28T22:19:07
final_time=2016-01-28T22:19:30
ip_count=19
run=1026
dataset=9
scan=721
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.8387E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.32246E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.44845E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.58311E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.63074E-8
mult1=-9.6308E-9
mult2=-2.96132E-9
rf_tmon=-5.05958E-3
rf_agc=3.23342E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.17559E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61678E0
bslens_imon=2.46977E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19891E1
lens5a_imon=1.99342E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53491E1
cs_ef1b_imon=3.16913E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02257E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05014E1
cs_ea1_imon=1.08405E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06848E0
lens1_imon=1.6293E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64661E1
os_ef1alow_imon=2.9833E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.39428E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84389E1
cs_ef1a_imon=3.03855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12697E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11312E1
os_restr1_imon=4.31139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.46588E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07998E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22789E0
cs_ionrep_imon=9.36965E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0193E1
cs_anode1_imon=1.96817E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.87888E-8
tplens_vset=1.4E-1
tplens_vmon=1.64658E0
tplens_imon=-2.49392E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.50706E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26925E1
iondef2_imon=1.58277E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98358E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.79896E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26549E0
ionrepsh_imon=8.5539E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74637E1
cs_ef2b_imon=3.12989E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41844E0
os_ea2_imon=-6.01647E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00617E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71064E1
cs_ef2a_imon=3.19487E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06555E0
os_ef2alow_imon=-2.4729E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65337E-1
os_ef2bup_imon=-5.28539E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.36751E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.31041E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01894E1
cs_anode2_imon=2.09875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.731E1
iondef1_imon=1.07416E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68241E1
iondef4_imon=1.10559E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.82931E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.11203E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12229E0
cs_ionaccel_imon=-7.87293E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02042E2
cs_ionfocb_imon=1.47361E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56128E1
einzel_imon=7.60309E-6
window_vset=0.0E0
window_vmon=2.31662E-1
window_imon=-9.12851E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86773E1
mask2_imon=-5.70707E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.51877E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.60105E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.28393E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39684E0
defgridb_imon=6.18699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33188E1
os_fil1_imon=9.4027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0802E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60137E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=7.81169E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33408E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9968E-2
os_fil2_imon=-2.33754E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17207E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51817E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28411E-1
cs_fil2_imon=-2.60958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22515E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33131E-3
inlet_lpb_pmon=3.00243E-1
chamber_ion_pmon=1.20059E-7
chamber_cvt_pmon=2.51736E-3
foreline_cvt_pmon=2.51736E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.34735E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=113
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80015E1	-7.62939E-4	-8.80003E1	1.66893E-4	4.33922E-3	9.38654E-2	2.72756E1	-3.26579E1	-3.26266E1	2.67989E1	1.20002E-7	2.51802E-3	2.51802E-3	6.32151E-3	3.01497E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80014E1	-8.58307E-4	-8.80003E1	2.86102E-4	4.79221E-3	9.40561E-2	2.73332E1	-3.26598E1	-3.26312E1	2.68175E1	1.19991E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80015E1	-6.19888E-4	-8.80005E1	4.05312E-4	4.76837E-3	9.4223E-2	2.73382E1	-3.26803E1	-3.26267E1	2.68205E1	1.19997E-7	2.51362E-3	2.51362E-3	6.32234E-3	3.01193E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80014E1	-8.82149E-4	-8.80003E1	3.8147E-4	4.52995E-3	9.40561E-2	2.73024E1	-3.26571E1	-3.26411E1	2.67722E1	1.19805E-7	2.51588E-3	2.51588E-3	6.31344E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80015E1	-8.10623E-4	-8.80001E1	4.52995E-4	4.62532E-3	9.42945E-2	2.72968E1	-3.26668E1	-3.26441E1	2.6782E1	1.19922E-7	2.52101E-3	2.52101E-3	6.31992E-3	3.00316E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80009E1	-8.34465E-4	-8.8E1	4.52995E-4	4.88758E-3	9.39131E-2	2.73187E1	-3.26434E1	-3.26317E1	2.68202E1	1.19931E-7	2.51793E-3	2.51793E-3	6.33706E-3	3.01205E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80014E1	-7.86781E-4	-8.80002E1	-2.14577E-4	4.64916E-3	9.39131E-2	2.72689E1	-3.26854E1	-3.2602E1	2.67928E1	1.20074E-7	2.51151E-3	2.51151E-3	6.3074E-3	3.00985E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.8001E1	-6.4373E-4	-8.80004E1	-1.66893E-4	4.69685E-3	9.41753E-2	2.73018E1	-3.2658E1	-3.26155E1	2.67915E1	1.20055E-7	2.51785E-3	2.51785E-3	6.31509E-3	3.02253E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80016E1	-5.72205E-4	-8.80002E1	-3.33786E-4	4.64916E-3	9.39131E-2	2.73306E1	-3.26834E1	-3.25956E1	2.67949E1	1.20074E-7	2.51238E-3	2.51238E-3	6.31176E-3	3.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80013E1	-2.14577E-4	-8.80004E1	2.6226E-4	4.48227E-3	9.377E-2	2.72889E1	-3.26492E1	-3.26221E1	2.6817E1	1.1998E-7	2.51657E-3	2.51657E-3	6.34393E-3	2.99332E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80012E1	-7.15256E-4	-8.80004E1	2.6226E-4	4.72069E-3	9.39608E-2	2.72282E1	-3.2641E1	-3.2644E1	2.67758E1	1.19926E-7	2.52069E-3	2.52069E-3	6.29951E-3	3.00949E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80014E1	-4.76837E-4	-8.80007E1	-4.76837E-5	5.03063E-3	9.38416E-2	2.74218E1	-3.26678E1	-3.26148E1	2.67895E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.80016E1	-6.19888E-4	-8.80003E1	-7.15256E-5	4.69685E-3	9.41038E-2	2.72142E1	-3.2664E1	-3.26106E1	2.68069E1	1.2006E-7	2.52454E-3	2.52454E-3	6.32483E-3	3.01193E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80014E1	-6.91414E-4	-8.80002E1	-1.19209E-4	4.98295E-3	9.40561E-2	2.72688E1	-3.26568E1	-3.26095E1	2.6839E1	1.20128E-7	2.51172E-3	2.51172E-3	6.31509E-3	2.99868E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80015E1	-3.57628E-4	-8.80004E1	-3.09944E-4	4.52995E-3	9.36985E-2	2.73138E1	-3.26538E1	-3.26393E1	2.67966E1	1.19967E-7	2.51854E-3	2.51854E-3	6.32273E-3	2.99663E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80014E1	-4.05312E-4	-8.80004E1	-1.19209E-4	4.45843E-3	9.38654E-2	2.72886E1	-3.26516E1	-3.26324E1	2.68041E1	1.1988E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.00494E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80017E1	-5.72205E-4	-8.80005E1	2.6226E-4	4.57764E-3	9.3627E-2	2.727E1	-3.27049E1	-3.2573E1	2.6831E1	1.1973E-7	2.52046E-3	2.52046E-3	6.29473E-3	3.01003E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80014E1	-1.14441E-3	-8.80004E1	3.33786E-4	4.17233E-3	9.36508E-2	2.73382E1	-3.26542E1	-3.26327E1	2.67689E1	1.19776E-7	2.52147E-3	2.52147E-3	6.2877E-3	3.00573E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80016E1	-7.86781E-4	-8.80006E1	1.19209E-4	4.79221E-3	9.38654E-2	2.72886E1	-3.26888E1	-3.26021E1	2.67601E1	1.19829E-7	2.51384E-3	2.51384E-3	6.29603E-3	3.00794E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80014E1	-6.67572E-4	-8.80006E1	4.29153E-4	4.52995E-3	9.34839E-2	2.731E1	-3.26925E1	-3.26425E1	2.68241E1	1.20059E-7	2.51736E-3	2.51736E-3	6.33131E-3	3.00243E-1