[Scan]
initial_time=2016-01-28T22:19:38
final_time=2016-01-28T22:20:03
ip_count=19
run=1026
dataset=9
scan=722
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.81754E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.16646E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.43423E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.54568E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.64332E-8
mult1=-9.97301E-9
mult2=-2.77434E-9
rf_tmon=-5.0337E-3
rf_agc=3.23122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.69379E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65989E0
bslens_imon=2.91316E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.96513E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05285E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=3.17126E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04774E1
cs_ea1_imon=1.08648E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09209E0
lens1_imon=1.53729E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6458E1
os_ef1alow_imon=2.98873E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03597E1
cs_ea2_imon=1.40554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.845E1
cs_ef1a_imon=3.04208E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12801E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11235E1
os_restr1_imon=4.32083E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15767E1
os_ea1_imon=2.49535E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6368E1
os_ef1bup_imon=3.08838E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2125E0
cs_ionrep_imon=9.20521E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93483E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01994E1
cs_anode1_imon=1.966E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.88339E-8
tplens_vset=1.4E-1
tplens_vmon=1.67553E0
tplens_imon=-3.00507E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2594E1
iondef3_imon=1.52828E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26948E1
iondef2_imon=1.5748E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02885E2
lens6_imon=2.9855E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.33297E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2686E0
ionrepsh_imon=8.50242E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33382E1
lens5b_imon=2.18058E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74552E1
cs_ef2b_imon=3.13469E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48251E0
os_ea2_imon=-6.89842E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00596E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71112E1
cs_ef2a_imon=3.19307E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08364E0
os_ef2alow_imon=-2.45558E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14947E-1
os_ef2bup_imon=-5.24394E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.37326E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30852E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01681E1
cs_anode2_imon=2.09484E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72982E1
iondef1_imon=1.09143E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67822E1
iondef4_imon=1.10131E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.84542E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.10599E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14189E0
cs_ionaccel_imon=-8.61762E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47307E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5631E1
einzel_imon=7.83212E-6
window_vset=0.0E0
window_vmon=2.34223E-1
window_imon=-9.49003E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86769E1
mask2_imon=-6.16817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.73035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.68773E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.90879E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34585E0
defgridb_imon=6.01134E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.41542E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07978E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60006E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31761E1
cs_fil1_imon=7.83027E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.4912E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61875E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14726E-2
os_fil2_imon=-2.39816E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54491E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28567E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14181E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21581E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32087E-3
inlet_lpb_pmon=2.99899E-1
chamber_ion_pmon=1.19842E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20083E-1
res40_imon=-2.45558E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=114
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80013E1	-9.05991E-4	-8.80005E1	-1.43051E-4	4.86374E-3	9.38416E-2	2.73335E1	-3.26596E1	-3.26173E1	2.68151E1	1.20161E-7	2.5165E-3	2.5165E-3	6.32273E-3	2.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80015E1	-7.15256E-4	-8.80001E1	4.05312E-4	4.72069E-3	9.377E-2	2.73352E1	-3.26416E1	-3.26369E1	2.67994E1	1.20226E-7	2.51679E-3	2.51679E-3	6.31779E-3	2.97786E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80016E1	-5.00679E-4	-8.80003E1	2.86102E-4	4.74453E-3	9.377E-2	2.73255E1	-3.26502E1	-3.26483E1	2.68199E1	1.20031E-7	2.51675E-3	2.51675E-3	6.30503E-3	3.00197E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80015E1	-5.96046E-4	-8.80004E1	2.38419E-4	4.50611E-3	9.36985E-2	2.73612E1	-3.26826E1	-3.25848E1	2.68151E1	1.20188E-7	2.51675E-3	2.51675E-3	6.33112E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80012E1	-5.00679E-4	-8.80003E1	-9.53674E-5	4.673E-3	9.38892E-2	2.72463E1	-3.26427E1	-3.26356E1	2.68148E1	1.19931E-7	2.51793E-3	2.51793E-3	6.30318E-3	2.99996E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80013E1	-5.72205E-4	-8.80002E1	9.53674E-5	4.81606E-3	9.40323E-2	2.72653E1	-3.26762E1	-3.26277E1	2.67972E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31666E-3	3.00946E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.8001E1	-5.24521E-4	-8.80005E1	1.90735E-4	4.98295E-3	9.39846E-2	2.72765E1	-3.26537E1	-3.2627E1	2.67953E1	1.19695E-7	2.52197E-3	2.52197E-3	6.31519E-3	3.00308E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80011E1	-5.72205E-4	-8.80001E1	2.6226E-4	4.57764E-3	9.36747E-2	2.74063E1	-3.26299E1	-3.26464E1	2.6801E1	1.19918E-7	2.52049E-3	2.52049E-3	6.30299E-3	3.00871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80013E1	-4.52995E-4	-8.80003E1	5.00679E-4	5.03063E-3	9.35793E-2	2.72178E1	-3.2669E1	-3.26168E1	2.67968E1	1.20074E-7	2.52019E-3	2.52019E-3	6.33357E-3	2.99742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80016E1	-4.29153E-4	-8.80005E1	5.00679E-4	4.8399E-3	9.377E-2	2.73412E1	-3.2663E1	-3.25972E1	2.6805E1	1.19744E-7	2.52016E-3	2.52016E-3	6.32743E-3	3.00273E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80016E1	-4.76837E-4	-8.80002E1	5.72205E-4	4.86374E-3	9.36747E-2	2.73263E1	-3.26609E1	-3.25686E1	2.6792E1	1.19665E-7	2.52152E-3	2.52152E-3	6.31962E-3	3.00662E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80012E1	-3.33786E-4	-8.80002E1	1.43051E-4	5.07832E-3	9.38654E-2	2.73277E1	-3.2663E1	-3.26165E1	2.67865E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80011E1	-5.00679E-4	-8.80004E1	2.14577E-4	4.76837E-3	9.34124E-2	2.72831E1	-3.26728E1	-3.26022E1	2.68141E1	1.19838E-7	2.51883E-3	2.51883E-3	6.33319E-3	3.00994E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80012E1	-7.39098E-4	-8.80008E1	0.0E0	4.45843E-3	9.36985E-2	2.73714E1	-3.26941E1	-3.26224E1	2.68091E1	1.19661E-7	2.51498E-3	2.51498E-3	6.31176E-3	3.0057E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80012E1	-4.76837E-4	-8.80004E1	-3.33786E-4	4.8399E-3	9.35793E-2	2.72776E1	-3.26417E1	-3.26059E1	2.68126E1	1.19922E-7	2.51685E-3	2.51685E-3	6.29075E-3	2.99722E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80013E1	-7.39098E-4	-8.80005E1	-4.76837E-5	4.69685E-3	9.377E-2	2.73406E1	-3.2678E1	-3.26312E1	2.68134E1	1.20055E-7	2.51811E-3	2.51811E-3	6.32536E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80014E1	-5.00679E-4	-8.80004E1	2.38419E-5	4.24385E-3	9.38892E-2	2.73066E1	-3.26636E1	-3.26289E1	2.68032E1	1.20059E-7	2.51641E-3	2.51641E-3	6.3074E-3	3.00016E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80011E1	-7.86781E-4	-8.80004E1	0.0E0	4.19617E-3	9.37462E-2	2.73145E1	-3.26422E1	-3.26304E1	2.68045E1	1.20195E-7	2.51334E-3	2.51334E-3	6.32057E-3	3.00354E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80012E1	-6.91414E-4	-8.80004E1	-9.53674E-5	4.64916E-3	9.38177E-2	2.72647E1	-3.26679E1	-3.2632E1	2.68031E1	1.19785E-7	2.51527E-3	2.51527E-3	6.27268E-3	3.03139E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80013E1	-7.15256E-4	-8.80005E1	1.66893E-4	4.41074E-3	9.38654E-2	2.72982E1	-3.26948E1	-3.2594E1	2.67822E1	1.19842E-7	2.51632E-3	2.51632E-3	6.32087E-3	2.99899E-1