[Scan]
initial_time=2016-01-28T22:20:55
final_time=2016-01-28T22:21:20
ip_count=19
run=1026
dataset=10
scan=724
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.19659E-1
ql1_imon=1.64004E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.86095E-9
ql3_vset=
ql3_vmon=-9.13033E0
ql3_imon=7.29233E-9
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=-8.65638E-10
mult1=-9.75526E-9
mult2=-2.75695E-9
rf_tmon=-4.57445E-3
rf_agc=3.23694E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.56661E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65439E0
bslens_imon=2.54697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19685E1
lens5a_imon=1.99171E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53477E1
cs_ef1b_imon=3.16708E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05137E1
cs_ea1_imon=1.09113E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37841E0
lens1_imon=2.60761E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64738E1
os_ef1alow_imon=2.99809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03887E1
cs_ea2_imon=1.40706E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84302E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.12559E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=4.32114E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.46178E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63565E1
os_ef1bup_imon=3.08275E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24678E0
cs_ionrep_imon=9.70818E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02107E1
cs_anode1_imon=1.9822E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.07262E-8
tplens_vset=1.4E-1
tplens_vmon=1.67441E0
tplens_imon=-3.79573E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26322E1
iondef3_imon=1.49802E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26642E1
iondef2_imon=1.58482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.91076E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2622E0
ionrepsh_imon=8.54975E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33833E1
lens5b_imon=2.18925E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74426E1
cs_ef2b_imon=3.13075E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43187E0
os_ea2_imon=-7.11315E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71441E1
cs_ef2a_imon=3.2047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07456E0
os_ef2alow_imon=-2.61374E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.22481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10918E1
os_restr2_imon=3.37207E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.31141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.10286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.09751E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67987E1
iondef4_imon=1.09119E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.33751E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.10081E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1323E0
cs_ionaccel_imon=-8.20043E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56302E1
einzel_imon=7.7819E-6
window_vset=0.0E0
window_vmon=2.24791E-1
window_imon=-1.04709E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.3936E-4
mask2_vset=0.0E0
mask2_vmon=-1.86895E1
mask2_imon=-5.57314E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.23176E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.8137E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.57641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47734E0
defgridb_imon=6.42756E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33204E1
os_fil1_imon=9.42631E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08016E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31714E1
cs_fil1_imon=8.03421E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2992E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61833E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.08669E-2
os_fil2_imon=-2.35603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19578E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58702E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.58308E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50382E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21734E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31586E-3
inlet_lpb_pmon=3.01205E-1
chamber_ion_pmon=1.20172E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.01769E-1
res40_imon=-2.43534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.21114E-1	-7.99084E-1	-9.13231E0	-9.14195E0	4.74453E-3	9.37939E-2	2.71637E1	-3.26585E1	-3.26422E1	2.68062E1	1.19891E-7	2.51761E-3	2.51761E-3	6.33123E-3	2.9972E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.20994E-1	-7.99036E-1	-9.13193E0	-9.14195E0	4.95911E-3	9.33647E-2	2.73108E1	-3.26558E1	-3.26371E1	2.68052E1	1.20092E-7	2.50867E-3	2.50867E-3	6.32858E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.20494E-1	-7.98821E-1	-9.13181E0	-9.14216E0	4.8399E-3	9.37462E-2	2.7272E1	-3.26465E1	-3.26664E1	2.68024E1	1.20062E-7	2.51645E-3	2.51645E-3	6.3148E-3	3.00197E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.20088E-1	-7.98583E-1	-9.13188E0	-9.14161E0	4.48227E-3	9.32932E-2	2.7343E1	-3.26515E1	-3.25976E1	2.68036E1	1.19977E-7	2.5195E-3	2.5195E-3	6.29533E-3	3.00312E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.20231E-1	-7.98821E-1	-9.13186E0	-9.14195E0	4.93526E-3	9.34839E-2	2.72798E1	-3.2645E1	-3.26188E1	2.67916E1	1.20067E-7	2.51838E-3	2.51838E-3	6.31651E-3	2.97823E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.19969E-1	-7.98678E-1	-9.13162E0	-9.14195E0	4.86374E-3	9.34839E-2	2.73414E1	-3.26465E1	-3.26193E1	2.68182E1	1.20025E-7	2.51895E-3	2.51895E-3	6.31557E-3	2.98647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19683E-1	-7.98512E-1	-9.13179E0	-9.14195E0	4.55379E-3	9.377E-2	2.72541E1	-3.26667E1	-3.26116E1	2.68356E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.20112E-1	-7.98607E-1	-9.13165E0	-9.14166E0	4.91142E-3	9.36031E-2	2.72355E1	-3.26508E1	-3.26303E1	2.68113E1	1.20047E-7	2.51521E-3	2.51521E-3	6.32151E-3	3.02847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.20041E-1	-7.98965E-1	-9.13162E0	-9.14173E0	4.41074E-3	9.38177E-2	2.73272E1	-3.265E1	-3.26143E1	2.67892E1	1.19806E-7	2.51343E-3	2.51343E-3	6.3074E-3	3.03289E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.19874E-1	-7.98655E-1	-9.13153E0	-9.14183E0	4.62532E-3	9.37223E-2	2.73445E1	-3.26924E1	-3.2611E1	2.67944E1	1.19859E-7	2.51733E-3	2.51733E-3	6.3375E-3	3.02327E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.19683E-1	-7.98821E-1	-9.13117E0	-9.14168E0	4.62532E-3	9.35316E-2	2.72863E1	-3.26713E1	-3.26294E1	2.67968E1	1.19894E-7	2.51657E-3	2.51657E-3	6.30285E-3	3.03027E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.19445E-1	-7.98512E-1	-9.13126E0	-9.14168E0	4.88758E-3	9.34362E-2	2.72676E1	-3.26742E1	-3.26214E1	2.68031E1	1.20214E-7	2.52119E-3	2.52119E-3	6.323E-3	3.01795E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.19683E-1	-7.98678E-1	-9.13105E0	-9.14176E0	4.76837E-3	9.35316E-2	2.73437E1	-3.26703E1	-3.26425E1	2.67849E1	1.19971E-7	2.52553E-3	2.52553E-3	6.29473E-3	3.00398E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.19874E-1	-7.98702E-1	-9.13126E0	-9.14183E0	4.64916E-3	9.34601E-2	2.7372E1	-3.26771E1	-3.26545E1	2.68234E1	1.20002E-7	2.51615E-3	2.51615E-3	6.33093E-3	2.99483E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.19731E-1	-7.9813E-1	-9.13055E0	-9.14197E0	4.41074E-3	9.37462E-2	2.72672E1	-3.27124E1	-3.26673E1	2.68065E1	1.20226E-7	2.52348E-3	2.52348E-3	6.32536E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.19659E-1	-7.98368E-1	-9.13036E0	-9.14204E0	4.48227E-3	9.377E-2	2.73588E1	-3.26536E1	-3.26241E1	2.67998E1	1.19939E-7	2.51762E-3	2.51762E-3	6.31052E-3	2.99901E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.19683E-1	-7.98583E-1	-9.13064E0	-9.14185E0	4.69685E-3	9.42469E-2	2.73143E1	-3.26573E1	-3.26286E1	2.67986E1	1.20002E-7	2.51696E-3	2.51696E-3	6.33396E-3	3.01714E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.19969E-1	-7.98583E-1	-9.13045E0	-9.14211E0	4.48227E-3	9.37939E-2	2.72921E1	-3.26481E1	-3.26695E1	2.67907E1	1.20151E-7	2.519E-3	2.519E-3	6.32087E-3	3.01448E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.19945E-1	-7.98607E-1	-9.13026E0	-9.14176E0	4.29153E-3	9.41038E-2	2.72768E1	-3.26617E1	-3.26014E1	2.67813E1	1.19851E-7	2.51557E-3	2.51557E-3	6.31925E-3	3.02459E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.19659E-1	-7.9875E-1	-9.13033E0	-9.14156E0	4.62532E-3	9.40084E-2	2.73261E1	-3.26642E1	-3.26322E1	2.67987E1	1.20172E-7	2.52384E-3	2.52384E-3	6.31586E-3	3.01205E-1