[Scan]
initial_time=2016-01-28T22:21:27
final_time=2016-01-28T22:21:51
ip_count=19
run=1026
dataset=10
scan=725
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.19039E-1
ql1_imon=1.48493E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.96202E-9
ql3_vset=
ql3_vmon=-9.13055E0
ql3_imon=3.46138E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-5.38123E-10
mult1=-9.6234E-9
mult2=-2.73601E-9
rf_tmon=-3.26549E-3
rf_agc=3.38085E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.63004E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64945E0
bslens_imon=2.6723E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19865E1
lens5a_imon=1.99746E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05209E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53548E1
cs_ef1b_imon=3.17097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02058E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04812E1
cs_ea1_imon=1.0878E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38466E0
lens1_imon=2.61951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.647E1
os_ef1alow_imon=2.98284E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03531E1
cs_ea2_imon=1.41709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84573E1
cs_ef1a_imon=3.04447E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12288E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1115E1
os_restr1_imon=4.30914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15349E1
os_ea1_imon=2.45674E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63592E1
os_ef1bup_imon=3.0928E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23725E0
cs_ionrep_imon=9.58134E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93585E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01999E1
cs_anode1_imon=1.97085E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.07334E-8
tplens_vset=1.4E-1
tplens_vmon=1.67608E0
tplens_imon=-1.12438E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.50353E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.58767E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.83806E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26475E0
ionrepsh_imon=8.52882E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.1885E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74572E1
cs_ef2b_imon=3.12524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46161E0
os_ea2_imon=-6.37051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00692E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70998E1
cs_ef2a_imon=3.19757E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08429E0
os_ef2alow_imon=-2.51967E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18507E-1
os_ef2bup_imon=-5.1794E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1095E1
os_restr2_imon=3.35845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.29895E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01772E1
cs_anode2_imon=2.09832E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72935E1
iondef1_imon=1.09869E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09768E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.68379E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.09379E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13393E0
cs_ionaccel_imon=-8.23287E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56016E1
einzel_imon=7.69108E-6
window_vset=0.0E0
window_vmon=2.22088E-1
window_imon=-1.02439E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39334E-4
mask2_vset=0.0E0
mask2_vmon=-1.8709E1
mask2_imon=-5.47583E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.54558E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.40397E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.12985E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4532E0
defgridb_imon=6.2687E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.41696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59987E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31664E1
cs_fil1_imon=7.24494E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02398E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6174E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14726E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18497E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68412E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28254E-1
cs_fil2_imon=-2.55064E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40111E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21611E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09327E-1
res40_imon=-2.40615E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=142
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.19564E-1	-7.98559E-1	-9.13064E0	-9.1419E0	4.31538E-3	9.38892E-2	2.73185E1	-3.26523E1	-3.26109E1	2.68104E1	1.1986E-7	2.51423E-3	2.51423E-3	6.32247E-3	2.99816E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.19707E-1	-7.98869E-1	-9.1305E0	-9.14204E0	4.36306E-3	9.40323E-2	2.72918E1	-3.26783E1	-3.26184E1	2.68208E1	1.19919E-7	2.51549E-3	2.51549E-3	6.31251E-3	2.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.19778E-1	-7.98917E-1	-9.13038E0	-9.1419E0	4.55379E-3	9.38177E-2	2.72919E1	-3.26705E1	-3.26464E1	2.67998E1	1.19833E-7	2.51783E-3	2.51783E-3	6.30979E-3	3.01153E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.19397E-1	-7.98845E-1	-9.13062E0	-9.14185E0	4.55379E-3	9.39846E-2	2.72778E1	-3.26509E1	-3.26208E1	2.68163E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02133E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.19612E-1	-7.98559E-1	-9.1305E0	-9.14204E0	4.74453E-3	9.40323E-2	2.73295E1	-3.26443E1	-3.26128E1	2.67929E1	1.1994E-7	2.51647E-3	2.51647E-3	6.32028E-3	3.01097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19373E-1	-7.98726E-1	-9.13055E0	-9.14207E0	4.62532E-3	9.37462E-2	2.7327E1	-3.26666E1	-3.26439E1	2.68041E1	1.19818E-7	2.51562E-3	2.51562E-3	6.29027E-3	3.01097E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.19468E-1	-7.98607E-1	-9.13084E0	-9.14209E0	4.50611E-3	9.34839E-2	2.72808E1	-3.26393E1	-3.26205E1	2.67975E1	1.19991E-7	2.51498E-3	2.51498E-3	6.30001E-3	3.01255E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.19612E-1	-7.98917E-1	-9.13088E0	-9.14216E0	4.64916E-3	9.39608E-2	2.72827E1	-3.26511E1	-3.26306E1	2.68037E1	1.20058E-7	2.52073E-3	2.52073E-3	6.32612E-3	3.01237E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.19635E-1	-7.98655E-1	-9.13081E0	-9.14235E0	4.64916E-3	9.377E-2	2.72881E1	-3.26518E1	-3.25931E1	2.68108E1	1.19922E-7	2.52018E-3	2.52018E-3	6.30323E-3	3.00118E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.1954E-1	-7.98726E-1	-9.13033E0	-9.14171E0	4.72069E-3	9.377E-2	2.72978E1	-3.26708E1	-3.26397E1	2.6812E1	1.20092E-7	2.51896E-3	2.51896E-3	6.3168E-3	3.006E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.19445E-1	-7.98798E-1	-9.13067E0	-9.14168E0	4.64916E-3	9.38177E-2	2.73074E1	-3.26829E1	-3.26016E1	2.68114E1	1.19991E-7	2.52042E-3	2.52042E-3	6.3074E-3	3.00308E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.19468E-1	-7.98678E-1	-9.13095E0	-9.14178E0	4.86374E-3	9.40561E-2	2.72769E1	-3.26524E1	-3.26362E1	2.68138E1	1.19898E-7	2.51941E-3	2.51941E-3	6.31234E-3	3.01255E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.19302E-1	-7.98869E-1	-9.13079E0	-9.14176E0	4.673E-3	9.41753E-2	2.72998E1	-3.26885E1	-3.26231E1	2.68018E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.19373E-1	-7.98869E-1	-9.13081E0	-9.1418E0	4.48227E-3	9.41038E-2	2.73406E1	-3.26073E1	-3.25748E1	2.67895E1	1.20064E-7	2.5165E-3	2.5165E-3	6.31761E-3	3.00878E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.19349E-1	-7.98583E-1	-9.13074E0	-9.14207E0	4.60148E-3	9.408E-2	2.73094E1	-3.26529E1	-3.25756E1	2.67972E1	1.20079E-7	2.5159E-3	2.5159E-3	6.32592E-3	3.03605E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.19182E-1	-7.98583E-1	-9.13069E0	-9.14199E0	4.673E-3	9.39369E-2	2.73182E1	-3.2673E1	-3.26183E1	2.68072E1	1.19843E-7	2.51731E-3	2.51731E-3	6.31519E-3	3.00308E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.19492E-1	-7.98583E-1	-9.13069E0	-9.14185E0	4.673E-3	9.36031E-2	2.73252E1	-3.26457E1	-3.26384E1	2.68009E1	1.20074E-7	2.51585E-3	2.51585E-3	6.32047E-3	3.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.19516E-1	-7.98655E-1	-9.13062E0	-9.14192E0	4.48227E-3	9.37939E-2	2.72907E1	-3.26645E1	-3.26164E1	2.67998E1	1.2E-7	2.51516E-3	2.51516E-3	6.32883E-3	2.99316E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.19564E-1	-7.98655E-1	-9.13069E0	-9.14195E0	4.57764E-3	9.36747E-2	2.72762E1	-3.26602E1	-3.26508E1	2.67902E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.19039E-1	-7.98655E-1	-9.13055E0	-9.14192E0	4.31538E-3	9.38416E-2	2.72935E1	-3.26933E1	-3.26018E1	2.67944E1	1.20042E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.00852E-1