[Scan]
initial_time=2016-01-28T22:21:59
final_time=2016-01-28T22:22:23
ip_count=19
run=1026
dataset=10
scan=726
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.18443E-1
ql1_imon=1.45709E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.97235E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=2.52151E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-4.63414E-10
mult1=-1.02378E-8
mult2=-2.7461E-9
rf_tmon=-3.4455E-3
rf_agc=3.30047E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.64542E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64517E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19784E1
lens5a_imon=2.00519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05221E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5353E1
cs_ef1b_imon=3.16824E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02292E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=1.07649E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4671E0
lens1_imon=2.7533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64743E1
os_ef1alow_imon=2.98638E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03651E1
cs_ea2_imon=1.38963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84377E1
cs_ef1a_imon=3.03772E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.12249E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11381E1
os_restr1_imon=4.31378E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15613E1
os_ea1_imon=2.48346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63714E1
os_ef1bup_imon=3.08671E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24035E0
cs_ionrep_imon=9.54317E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93397E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.97707E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.07911E-8
tplens_vset=1.4E-1
tplens_vmon=1.63696E0
tplens_imon=-2.5733E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26067E1
iondef3_imon=1.49536E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.58967E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=3.91552E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27168E0
ionrepsh_imon=8.68395E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.17669E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13838E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4367E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71062E1
cs_ef2a_imon=3.20683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0691E0
os_ef2alow_imon=-2.47236E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93696E-1
os_ef2bup_imon=-5.16341E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.36621E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.31371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01826E1
cs_anode2_imon=2.09082E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73014E1
iondef1_imon=1.09293E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68063E1
iondef4_imon=1.08788E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.71234E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.07774E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10945E0
cs_ionaccel_imon=-8.24852E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.47404E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56427E1
einzel_imon=7.7281E-6
window_vset=0.0E0
window_vmon=2.20802E-1
window_imon=-1.03624E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82585E2
mask1_imon=2.39316E-4
mask2_vset=0.0E0
mask2_vmon=-1.86859E1
mask2_imon=-6.33594E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.63006E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.5661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.23066E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68552E0
defgridb_imon=6.30095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33133E1
os_fil1_imon=9.41223E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07598E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59838E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31627E1
cs_fil1_imon=6.96905E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00448E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61395E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06504E-2
os_fil2_imon=-2.42612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05336E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61938E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29893E-1
cs_fil2_imon=-2.19124E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68986E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21543E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30171E-3
inlet_lpb_pmon=2.99981E-1
chamber_ion_pmon=1.19829E-7
chamber_cvt_pmon=2.51158E-3
foreline_cvt_pmon=2.51158E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2959E-1
res40_imon=-2.30124E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=139
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.19063E-1	-7.9906E-1	-9.13074E0	-9.14223E0	4.673E-3	9.34362E-2	2.72957E1	-3.26326E1	-3.26519E1	2.67953E1	1.20064E-7	2.51142E-3	2.51142E-3	6.32273E-3	3.03321E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18992E-1	-7.98941E-1	-9.13084E0	-9.14233E0	4.673E-3	9.38892E-2	2.73199E1	-3.26695E1	-3.26178E1	2.68062E1	1.20051E-7	2.51823E-3	2.51823E-3	6.30239E-3	3.01729E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.18872E-1	-7.98821E-1	-9.13072E0	-9.14216E0	4.76837E-3	9.39846E-2	2.72797E1	-3.26809E1	-3.26238E1	2.68252E1	1.19893E-7	2.52489E-3	2.52489E-3	6.30366E-3	2.99378E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.18896E-1	-7.98774E-1	-9.13081E0	-9.14211E0	4.57764E-3	9.38416E-2	2.73187E1	-3.26608E1	-3.26044E1	2.68012E1	1.19959E-7	2.51565E-3	2.51565E-3	6.33436E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.18825E-1	-7.98869E-1	-9.131E0	-9.14211E0	4.52995E-3	9.377E-2	2.73603E1	-3.26406E1	-3.2632E1	2.67941E1	1.20104E-7	2.51733E-3	2.51733E-3	6.31169E-3	3.01097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18896E-1	-7.99036E-1	-9.13093E0	-9.14199E0	4.31538E-3	9.38416E-2	2.72977E1	-3.26543E1	-3.26283E1	2.68015E1	1.19851E-7	2.5199E-3	2.5199E-3	6.33211E-3	3.00667E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18968E-1	-7.98798E-1	-9.13119E0	-9.14185E0	3.95775E-3	9.40084E-2	2.72782E1	-3.26767E1	-3.26204E1	2.67939E1	1.19971E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.01205E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.18801E-1	-7.9875E-1	-9.131E0	-9.14187E0	4.57764E-3	9.38416E-2	2.72855E1	-3.26632E1	-3.26196E1	2.67784E1	1.19903E-7	2.51682E-3	2.51682E-3	6.33985E-3	3.00065E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.18753E-1	-7.98869E-1	-9.13105E0	-9.14178E0	4.50611E-3	9.408E-2	2.72742E1	-3.26564E1	-3.25972E1	2.6791E1	1.20102E-7	2.51575E-3	2.51575E-3	6.29962E-3	3.01051E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.18682E-1	-7.99108E-1	-9.13105E0	-9.14207E0	4.33922E-3	9.40084E-2	2.72758E1	-3.263E1	-3.26478E1	2.6783E1	1.20059E-7	2.52117E-3	2.52117E-3	6.32174E-3	3.01153E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.18849E-1	-7.98917E-1	-9.13086E0	-9.14235E0	4.57764E-3	9.37223E-2	2.73286E1	-3.26649E1	-3.26307E1	2.67988E1	1.2002E-7	2.51882E-3	2.51882E-3	6.3074E-3	3.01706E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.18753E-1	-7.98869E-1	-9.13103E0	-9.14204E0	4.45843E-3	9.38177E-2	2.72949E1	-3.26538E1	-3.26302E1	2.68068E1	1.1988E-7	2.52197E-3	2.52197E-3	6.3269E-3	2.99753E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.18753E-1	-7.98821E-1	-9.13088E0	-9.14214E0	4.72069E-3	9.36508E-2	2.72786E1	-3.2658E1	-3.26365E1	2.68016E1	1.19724E-7	2.52018E-3	2.52018E-3	6.3074E-3	2.9992E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18634E-1	-7.99012E-1	-9.13093E0	-9.14185E0	4.3869E-3	9.40323E-2	2.74235E1	-3.27554E1	-3.26041E1	2.67841E1	1.20344E-7	2.51682E-3	2.51682E-3	6.32129E-3	3.0183E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.18753E-1	-7.98917E-1	-9.13105E0	-9.14178E0	4.72069E-3	9.42469E-2	2.72524E1	-3.26843E1	-3.2681E1	2.6817E1	1.19934E-7	2.51538E-3	2.51538E-3	6.3114E-3	3.00845E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.18634E-1	-7.98821E-1	-9.1306E0	-9.1418E0	4.8399E-3	9.38177E-2	2.73468E1	-3.26348E1	-3.261E1	2.68171E1	1.19859E-7	2.51562E-3	2.51562E-3	6.29883E-3	2.9865E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.18944E-1	-7.98917E-1	-9.13041E0	-9.14204E0	4.50611E-3	9.38892E-2	2.72771E1	-3.26535E1	-3.26288E1	2.68196E1	1.19824E-7	2.51521E-3	2.51521E-3	6.34037E-3	3.01048E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.18729E-1	-7.98798E-1	-9.13062E0	-9.14178E0	4.62532E-3	9.38654E-2	2.72477E1	-3.26655E1	-3.26439E1	2.67834E1	1.1993E-7	2.52093E-3	2.52093E-3	6.323E-3	2.99753E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.1861E-1	-7.98821E-1	-9.13076E0	-9.14159E0	4.93526E-3	9.408E-2	2.73394E1	-3.2631E1	-3.2646E1	2.68514E1	1.20081E-7	2.52351E-3	2.52351E-3	6.29907E-3	2.98536E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.18443E-1	-7.98655E-1	-9.13084E0	-9.14202E0	4.81606E-3	9.41277E-2	2.73014E1	-3.26747E1	-3.26067E1	2.68063E1	1.19829E-7	2.51158E-3	2.51158E-3	6.30171E-3	2.99981E-1