[Scan]
initial_time=2016-01-28T22:23:32
final_time=2016-01-28T22:23:55
ip_count=19
run=1026
dataset=10
scan=729
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.0885E-4
ql1_vset=
ql1_vmon=-8.17657E-1
ql1_imon=1.42693E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=1.98505E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=1.43993E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-3.57509E-10
mult1=-9.85204E-9
mult2=-2.75853E-9
rf_tmon=-4.62057E-3
rf_agc=3.22532E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.69197E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60038E0
bslens_imon=2.54248E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19974E1
lens5a_imon=1.98071E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05137E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53423E1
cs_ef1b_imon=3.15783E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04998E1
cs_ea1_imon=1.09375E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39791E0
lens1_imon=2.71282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.99743E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.39974E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84399E1
cs_ef1a_imon=3.02568E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.11586E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10993E1
os_restr1_imon=4.31359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=2.4622E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6397E1
os_ef1bup_imon=3.09536E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23435E0
cs_ionrep_imon=9.43189E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01627E1
cs_anode1_imon=1.96284E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.08212E-8
tplens_vset=1.4E-1
tplens_vmon=1.65816E0
tplens_imon=-3.59278E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26265E1
iondef3_imon=1.50712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.58225E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=4.01276E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24247E0
ionrepsh_imon=8.43726E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33662E1
lens5b_imon=2.19758E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75061E1
cs_ef2b_imon=3.14559E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41584E0
os_ea2_imon=-7.57738E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70871E1
cs_ef2a_imon=3.17729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10583E0
os_ef2alow_imon=-2.29398E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82601E-1
os_ef2bup_imon=-5.32306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1059E1
os_restr2_imon=3.35433E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02066E1
cs_anode2_imon=2.0975E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7282E1
iondef1_imon=1.11018E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68048E1
iondef4_imon=1.11344E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.83811E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.05388E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13119E0
cs_ionaccel_imon=-1.10119E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.47518E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.62506E-6
window_vset=0.0E0
window_vmon=2.61481E-1
window_imon=-9.00295E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.3932E-4
mask2_vset=0.0E0
mask2_vmon=-1.86255E1
mask2_imon=-5.23623E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.63121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.89209E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.46088E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.73023E0
defgridb_imon=6.10429E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33127E1
os_fil1_imon=9.42295E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07915E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59771E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31596E1
cs_fil1_imon=6.18468E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.99403E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61281E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0519E-2
os_fil2_imon=-2.42125E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24531E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64252E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29314E-1
cs_fil2_imon=-2.41078E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.23484E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29333E-3
inlet_lpb_pmon=3.01946E-1
chamber_ion_pmon=1.20047E-7
chamber_cvt_pmon=2.51802E-3
foreline_cvt_pmon=2.51802E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.48442E-1
res40_imon=-2.19668E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=123
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.17728E-1	-7.98869E-1	-9.13084E0	-9.14173E0	4.43459E-3	9.41515E-2	2.7206E1	-3.2626E1	-3.26179E1	2.68053E1	1.20226E-7	2.51896E-3	2.51896E-3	6.32151E-3	3.00153E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17823E-1	-7.98941E-1	-9.13103E0	-9.14161E0	4.3869E-3	9.42469E-2	2.73221E1	-3.26621E1	-3.26345E1	2.68059E1	1.19891E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.98842E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17847E-1	-7.99131E-1	-9.13107E0	-9.14152E0	4.55379E-3	9.43184E-2	2.72548E1	-3.26661E1	-3.26629E1	2.68138E1	1.20092E-7	2.5199E-3	2.5199E-3	6.32151E-3	3.01384E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17895E-1	-7.98941E-1	-9.13074E0	-9.14166E0	4.48227E-3	9.43422E-2	2.7369E1	-3.26614E1	-3.2642E1	2.67996E1	1.19937E-7	2.51384E-3	2.51384E-3	6.33021E-3	2.9944E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.17966E-1	-7.98607E-1	-9.13105E0	-9.14166E0	4.57764E-3	9.43899E-2	2.7134E1	-3.2659E1	-3.26417E1	2.68041E1	1.20167E-7	2.51682E-3	2.51682E-3	6.33056E-3	3.00726E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.178E-1	-7.98464E-1	-9.13107E0	-9.14185E0	4.79221E-3	9.408E-2	2.7409E1	-3.26519E1	-3.26051E1	2.67965E1	1.19913E-7	2.51709E-3	2.51709E-3	6.34037E-3	3.01048E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17704E-1	-7.98845E-1	-9.13119E0	-9.14178E0	4.55379E-3	9.39846E-2	2.73024E1	-3.26389E1	-3.26025E1	2.68014E1	1.2029E-7	2.51523E-3	2.51523E-3	6.29738E-3	3.01249E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.18014E-1	-7.98607E-1	-9.13131E0	-9.14161E0	4.24385E-3	9.41753E-2	2.73024E1	-3.26159E1	-3.26499E1	2.67962E1	1.2003E-7	2.51826E-3	2.51826E-3	6.31563E-3	3.02199E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18157E-1	-7.98678E-1	-9.13134E0	-9.14176E0	4.69685E-3	9.4533E-2	2.73213E1	-3.26432E1	-3.26088E1	2.68031E1	1.20257E-7	2.51764E-3	2.51764E-3	6.32197E-3	3.00798E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18157E-1	-7.98821E-1	-9.13141E0	-9.14154E0	4.69685E-3	9.39846E-2	2.72984E1	-3.2693E1	-3.26384E1	2.67998E1	1.20388E-7	2.51129E-3	2.51129E-3	6.33521E-3	3.00726E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18253E-1	-7.98678E-1	-9.13141E0	-9.14187E0	4.74453E-3	9.38892E-2	2.73409E1	-3.26575E1	-3.26146E1	2.6795E1	1.20079E-7	2.51682E-3	2.51682E-3	6.29816E-3	3.00065E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18086E-1	-7.98821E-1	-9.13148E0	-9.14214E0	4.673E-3	9.41753E-2	2.72828E1	-3.27132E1	-3.2623E1	2.68142E1	1.1995E-7	2.51758E-3	2.51758E-3	6.3074E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.17871E-1	-7.9875E-1	-9.13119E0	-9.14164E0	4.22001E-3	9.39369E-2	2.72879E1	-3.26549E1	-3.26351E1	2.67897E1	1.20079E-7	2.51682E-3	2.51682E-3	6.33056E-3	3.01388E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17752E-1	-7.98678E-1	-9.13124E0	-9.14197E0	4.76837E-3	9.3627E-2	2.74237E1	-3.27208E1	-3.25961E1	2.67937E1	1.20167E-7	2.52051E-3	2.52051E-3	6.31666E-3	3.0183E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17966E-1	-7.98678E-1	-9.13124E0	-9.14204E0	4.55379E-3	9.38177E-2	2.7281E1	-3.26585E1	-3.2569E1	2.67897E1	1.20211E-7	2.51314E-3	2.51314E-3	6.32592E-3	2.99845E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17943E-1	-7.98917E-1	-9.13134E0	-9.14178E0	4.62532E-3	9.3627E-2	2.73561E1	-3.26622E1	-3.26311E1	2.68207E1	1.1988E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.01485E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.18014E-1	-7.98774E-1	-9.1311E0	-9.14166E0	4.45843E-3	9.40323E-2	2.72941E1	-3.26755E1	-3.26175E1	2.67932E1	1.20052E-7	2.51709E-3	2.51709E-3	6.31163E-3	3.006E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.1811E-1	-7.98941E-1	-9.13115E0	-9.14195E0	4.55379E-3	9.38892E-2	2.73323E1	-3.26662E1	-3.26267E1	2.67965E1	1.20026E-7	2.51941E-3	2.51941E-3	6.31851E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.17561E-1	-7.98965E-1	-9.13112E0	-9.1418E0	4.673E-3	9.38654E-2	2.727E1	-3.26804E1	-3.25988E1	2.6795E1	1.19794E-7	2.51911E-3	2.51911E-3	6.3074E-3	3.00761E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.17657E-1	-7.98917E-1	-9.13117E0	-9.14185E0	4.57764E-3	9.39846E-2	2.7282E1	-3.26555E1	-3.26265E1	2.68048E1	1.20047E-7	2.51802E-3	2.51802E-3	6.29333E-3	3.01946E-1