[Scan]
initial_time=2016-01-28T22:24:03
final_time=2016-01-28T22:24:23
ip_count=19
run=1026
dataset=10
scan=730
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.42074E-8
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=1.97051E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=1.23352E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-3.0694E-10
mult1=-9.91312E-9
mult2=-2.81341E-9
rf_tmon=-4.3797E-3
rf_agc=3.31498E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.72337E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66235E0
bslens_imon=2.48509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19846E1
lens5a_imon=1.99657E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53446E1
cs_ef1b_imon=3.18283E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04875E1
cs_ea1_imon=1.0836E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42663E0
lens1_imon=2.63179E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64553E1
os_ef1alow_imon=2.95541E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04029E1
cs_ea2_imon=1.39112E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84515E1
cs_ef1a_imon=3.07024E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.11628E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11323E1
os_restr1_imon=4.31493E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15201E1
os_ea1_imon=2.47308E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64122E1
os_ef1bup_imon=3.11889E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22577E0
cs_ionrep_imon=9.60033E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01468E1
cs_anode1_imon=1.94231E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.08894E-8
tplens_vset=1.4E-1
tplens_vmon=1.63626E0
tplens_imon=-2.99503E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26213E1
iondef3_imon=1.50002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.58692E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=4.03128E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2615E0
ionrepsh_imon=8.56774E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.19152E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74473E1
cs_ef2b_imon=3.1339E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45147E0
os_ea2_imon=-6.57804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70906E1
cs_ef2a_imon=3.17533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08143E0
os_ef2alow_imon=-2.64895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.226E-1
os_ef2bup_imon=-5.42916E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1097E1
os_restr2_imon=3.38217E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29815E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01468E1
cs_anode2_imon=2.0866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.09715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.11603E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.74955E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.06037E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11902E0
cs_ionaccel_imon=-7.61195E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47513E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55784E1
einzel_imon=7.77681E-6
window_vset=0.0E0
window_vmon=2.29733E-1
window_imon=-1.00029E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.3904E-4
mask2_vset=0.0E0
mask2_vmon=-1.87113E1
mask2_imon=-6.44427E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.70161E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.53361E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.47027E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44929E0
defgridb_imon=6.18659E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33111E1
os_fil1_imon=9.41067E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08145E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5979E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31593E1
cs_fil1_imon=6.363E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.07974E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61268E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97036E-2
os_fil2_imon=-2.46878E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04905E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56054E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-1.74593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.98881E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21488E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.75048E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=116
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.17394E-1	-7.98917E-1	-9.13105E0	-9.14183E0	4.36306E-3	9.36031E-2	2.73188E1	-3.26738E1	-3.26186E1	2.67886E1	1.19737E-7	2.51647E-3	2.51647E-3	6.30311E-3	2.99667E-1
2.0E0	1.9E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.17585E-1	-7.98821E-1	-9.13112E0	-9.14183E0	4.60148E-3	9.39846E-2	2.73602E1	-3.26833E1	-3.26315E1	2.68057E1	1.19919E-7	2.51854E-3	2.51854E-3	6.33297E-3	2.99179E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.17728E-1	-7.98821E-1	-9.13124E0	-9.14202E0	4.57764E-3	9.408E-2	2.72199E1	-3.26389E1	-3.2624E1	2.67974E1	1.20123E-7	2.51623E-3	2.51623E-3	6.31995E-3	3.00293E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17752E-1	-7.98726E-1	-9.1311E0	-9.14183E0	4.60148E-3	9.36508E-2	2.73375E1	-3.2661E1	-3.26091E1	2.67825E1	1.19747E-7	2.51468E-3	2.51468E-3	6.3074E-3	3.03492E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17704E-1	-7.98774E-1	-9.13126E0	-9.14159E0	4.64916E-3	9.38177E-2	2.74079E1	-3.26585E1	-3.26205E1	2.68052E1	1.1964E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.0279E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.17227E-1	-7.9906E-1	-9.131E0	-9.1418E0	4.60148E-3	9.38654E-2	2.74499E1	-3.26717E1	-3.26368E1	2.68076E1	1.20084E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.0201E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.17323E-1	-7.98678E-1	-9.13105E0	-9.14164E0	4.57764E-3	9.38177E-2	2.72432E1	-3.26422E1	-3.26062E1	2.68046E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.17323E-1	-7.98893E-1	-9.13103E0	-9.14168E0	4.62532E-3	9.40323E-2	2.70894E1	-3.26669E1	-3.26206E1	2.68202E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.1737E-1	-7.98941E-1	-9.13131E0	-9.14137E0	4.79221E-3	9.39608E-2	2.71429E1	-3.26962E1	-3.26384E1	2.6804E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.178E-1	-7.99036E-1	-9.13136E0	-9.14168E0	4.57764E-3	9.42469E-2	2.71392E1	-3.26884E1	-3.26083E1	2.67938E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17609E-1	-7.98869E-1	-9.13122E0	-9.14202E0	4.50611E-3	9.38654E-2	2.71647E1	-3.2672E1	-3.26467E1	2.68256E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17657E-1	-7.98893E-1	-9.1311E0	-9.14187E0	4.72069E-3	9.41992E-2	2.72618E1	-3.26957E1	-3.26464E1	2.68106E1	1.19913E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.1811E-1	-7.99155E-1	-9.13131E0	-9.14204E0	4.8399E-3	9.40084E-2	2.71453E1	-3.26523E1	-3.25856E1	2.6795E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17728E-1	-7.9906E-1	-9.13141E0	-9.14183E0	4.74453E-3	9.38892E-2	2.72302E1	-3.26124E1	-3.26567E1	2.67968E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17442E-1	-7.98678E-1	-9.13138E0	-9.14216E0	4.79221E-3	9.39369E-2	2.74602E1	-3.27446E1	-3.26703E1	2.67955E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.17299E-1	-7.99036E-1	-9.13122E0	-9.14202E0	4.43459E-3	9.38892E-2	2.74343E1	-3.26891E1	-3.26236E1	2.67734E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.1749E-1	-7.98917E-1	-9.13134E0	-9.14187E0	4.55379E-3	9.38892E-2	2.73558E1	-3.26691E1	-3.2606E1	2.67716E1	1.2026E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.17609E-1	-7.98917E-1	-9.13143E0	-9.14185E0	4.43459E-3	9.41753E-2	2.73832E1	-3.26579E1	-3.26128E1	2.67955E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.17347E-1	-7.98988E-1	-9.13143E0	-9.14211E0	4.31538E-3	9.38892E-2	2.74679E1	-3.26645E1	-3.262E1	2.68058E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.17227E-1	-7.99084E-1	-9.13119E0	-9.14211E0	4.36306E-3	9.39608E-2	2.73476E1	-3.26443E1	-3.26213E1	2.6807E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1