[Scan]
initial_time=2016-01-28T22:25:24
final_time=2016-01-28T22:25:44
ip_count=19
run=1026
dataset=10
scan=733
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.1737E-1
ql1_imon=1.40758E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.99585E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=9.77266E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.53427E-10
mult1=-9.98042E-9
mult2=-2.70464E-9
rf_tmon=-5.37587E-3
rf_agc=3.26419E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.71734E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64892E0
bslens_imon=2.69732E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97913E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53478E1
cs_ef1b_imon=3.16722E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0455E2
lens23_imon=1.02452E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04884E1
cs_ea1_imon=1.09211E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43561E0
lens1_imon=2.70467E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.39072E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.15541E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15238E1
os_ea1_imon=2.45442E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24843E0
cs_ionrep_imon=9.43723E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=1.96854E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.13259E-8
tplens_vset=1.4E-1
tplens_vmon=1.65551E0
tplens_imon=-3.90411E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26365E1
iondef3_imon=1.4954E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26454E1
iondef2_imon=1.56739E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98478E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.93366E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26495E0
ionrepsh_imon=8.47123E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.1929E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-6.85484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.30736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10045E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72821E1
iondef1_imon=1.09835E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.92043E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.26684E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0905E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39423E-4
mask2_vset=0.0E0
mask2_vmon=-1.86963E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.28119E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.76697E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.33261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58434E0
defgridb_imon=6.20868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33148E1
os_fil1_imon=9.42696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60817E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31575E1
cs_fil1_imon=7.14883E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2091E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61341E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10672E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54663E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.76691E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21482E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3201E-3
inlet_lpb_pmon=2.99795E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51371E-3
foreline_cvt_pmon=2.51371E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79714E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17108E-1	-7.98869E-1	-9.13141E0	-9.14204E0	4.69685E-3	9.35078E-2	2.7549E1	-3.26735E1	-3.2596E1	2.68214E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1718E-1	-7.98702E-1	-9.13138E0	-9.14178E0	4.69685E-3	9.38892E-2	2.73111E1	-3.26458E1	-3.26308E1	2.68069E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17227E-1	-7.98845E-1	-9.13131E0	-9.14176E0	4.673E-3	9.38177E-2	2.71665E1	-3.26714E1	-3.26254E1	2.68088E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.01742E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.17108E-1	-7.98726E-1	-9.13138E0	-9.14185E0	4.673E-3	9.40561E-2	2.72662E1	-3.26744E1	-3.26219E1	2.67856E1	1.20042E-7	2.52342E-3	2.52342E-3	6.3074E-3	2.98342E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17347E-1	-7.98893E-1	-9.13167E0	-9.14187E0	4.673E-3	9.39131E-2	2.73816E1	-3.26168E1	-3.26364E1	2.68138E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17752E-1	-7.98917E-1	-9.13153E0	-9.14176E0	4.673E-3	9.39369E-2	2.74108E1	-3.26585E1	-3.26056E1	2.67944E1	1.19667E-7	2.51611E-3	2.51611E-3	6.3245E-3	2.9944E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17251E-1	-7.98893E-1	-9.13119E0	-9.14183E0	4.50611E-3	9.40084E-2	2.71663E1	-3.26723E1	-3.26122E1	2.68202E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16989E-1	-7.98893E-1	-9.13126E0	-9.14214E0	4.55379E-3	9.38654E-2	2.73535E1	-3.26472E1	-3.26419E1	2.67824E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17084E-1	-7.98941E-1	-9.13153E0	-9.14197E0	4.22001E-3	9.37223E-2	2.72618E1	-3.26651E1	-3.26543E1	2.68094E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16798E-1	-7.98774E-1	-9.13153E0	-9.14187E0	4.52995E-3	9.38177E-2	2.72745E1	-3.26597E1	-3.26278E1	2.67821E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.17037E-1	-7.98512E-1	-9.13148E0	-9.14218E0	4.50611E-3	9.38654E-2	2.73856E1	-3.26538E1	-3.26324E1	2.68112E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17108E-1	-7.98798E-1	-9.13157E0	-9.14221E0	4.57764E-3	9.38654E-2	2.72502E1	-3.26878E1	-3.26454E1	2.68207E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17299E-1	-7.98559E-1	-9.13155E0	-9.14218E0	4.50611E-3	9.40561E-2	2.73021E1	-3.26494E1	-3.26356E1	2.68157E1	1.20457E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17299E-1	-7.98774E-1	-9.13143E0	-9.14185E0	4.72069E-3	9.377E-2	2.71759E1	-3.26993E1	-3.26338E1	2.68143E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.1737E-1	-7.98631E-1	-9.13131E0	-9.14156E0	4.74453E-3	9.38892E-2	2.71718E1	-3.26278E1	-3.25865E1	2.67994E1	1.20122E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17418E-1	-7.99155E-1	-9.13141E0	-9.14214E0	4.57764E-3	9.34839E-2	2.7065E1	-3.26526E1	-3.26242E1	2.68166E1	1.198E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17084E-1	-7.99036E-1	-9.13117E0	-9.14164E0	4.50611E-3	9.41753E-2	2.73447E1	-3.26541E1	-3.26243E1	2.68073E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.17347E-1	-7.9906E-1	-9.13153E0	-9.14173E0	4.50611E-3	9.377E-2	2.73877E1	-3.26609E1	-3.26297E1	2.68088E1	1.20106E-7	2.51811E-3	2.51811E-3	6.32356E-3	3.01052E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16941E-1	-7.99251E-1	-9.13143E0	-9.14173E0	4.48227E-3	9.39369E-2	2.73356E1	-3.26742E1	-3.26198E1	2.68015E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.1737E-1	-7.98988E-1	-9.13131E0	-9.14185E0	4.79221E-3	9.39131E-2	2.72821E1	-3.26454E1	-3.26365E1	2.67962E1	1.19891E-7	2.51371E-3	2.51371E-3	6.3201E-3	2.99795E-1