[Scan]
initial_time=2016-01-28T22:25:52
final_time=2016-01-28T22:26:16
ip_count=19
run=1026
dataset=10
scan=734
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.17466E-1
ql1_imon=1.40712E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.01643E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=8.19194E-10
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=-2.10404E-10
mult1=-9.86836E-9
mult2=-2.81243E-9
rf_tmon=-4.01185E-3
rf_agc=3.34246E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.74359E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.18632E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04561E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.07823E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41582E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.40772E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.16236E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.47479E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21004E0
cs_ionrep_imon=9.48089E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.15097E-8
tplens_vset=1.4E-1
tplens_vmon=1.67628E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26255E1
iondef3_imon=1.52344E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26677E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.00982E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=8.6121E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46239E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.21227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09721E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7319E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68156E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.89684E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.2651E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-7.81481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.68923E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.41886E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.19317E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.42612E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0805E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61111E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31554E1
cs_fil1_imon=6.96263E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43735E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61402E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61356E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2758E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21417E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32652E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19833E-7
chamber_cvt_pmon=2.51165E-3
foreline_cvt_pmon=2.51165E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=139
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16846E-1	-7.99084E-1	-9.13126E0	-9.1418E0	4.79221E-3	9.38416E-2	2.7556E1	-3.26498E1	-3.26174E1	2.67616E1	1.20042E-7	2.5155E-3	2.5155E-3	6.32858E-3	2.9972E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16846E-1	-7.98965E-1	-9.13148E0	-9.14214E0	4.48227E-3	9.377E-2	2.73801E1	-3.26726E1	-3.26167E1	2.67978E1	1.20038E-7	2.51203E-3	2.51203E-3	6.32716E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17013E-1	-7.99108E-1	-9.13167E0	-9.14218E0	4.43459E-3	9.35793E-2	2.73581E1	-3.26316E1	-3.26447E1	2.67914E1	1.20139E-7	2.52503E-3	2.52503E-3	6.32234E-3	3.00363E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16917E-1	-7.99036E-1	-9.13157E0	-9.14209E0	4.43459E-3	9.36508E-2	2.73311E1	-3.26658E1	-3.26169E1	2.67975E1	1.19937E-7	2.51271E-3	2.51271E-3	6.3245E-3	3.00522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16965E-1	-7.98893E-1	-9.13153E0	-9.14166E0	4.36306E-3	9.35793E-2	2.72736E1	-3.26771E1	-3.26034E1	2.67826E1	1.19882E-7	2.52101E-3	2.52101E-3	6.31992E-3	3.02107E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17132E-1	-7.99036E-1	-9.13138E0	-9.14183E0	4.12464E-3	9.37223E-2	2.73425E1	-3.26525E1	-3.25991E1	2.67866E1	1.20154E-7	2.51657E-3	2.51657E-3	6.33021E-3	3.00631E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1706E-1	-7.98965E-1	-9.13146E0	-9.1418E0	4.45843E-3	9.37939E-2	2.73545E1	-3.26734E1	-3.2625E1	2.68128E1	1.20098E-7	2.51542E-3	2.51542E-3	6.31638E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17037E-1	-7.98774E-1	-9.13148E0	-9.14187E0	4.3869E-3	9.37223E-2	2.72212E1	-3.26775E1	-3.26116E1	2.67971E1	1.19869E-7	2.5124E-3	2.5124E-3	6.30271E-3	3.006E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16989E-1	-7.9906E-1	-9.13105E0	-9.14199E0	4.55379E-3	9.36508E-2	2.72447E1	-3.2644E1	-3.2641E1	2.6797E1	1.19851E-7	2.5154E-3	2.5154E-3	6.32858E-3	2.99795E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.1706E-1	-7.99108E-1	-9.13122E0	-9.1419E0	4.50611E-3	9.36031E-2	2.73297E1	-3.26044E1	-3.26747E1	2.68057E1	1.20197E-7	2.5202E-3	2.5202E-3	6.3074E-3	2.99981E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17537E-1	-7.98965E-1	-9.13155E0	-9.14185E0	4.673E-3	9.35793E-2	2.74242E1	-3.26723E1	-3.25989E1	2.67977E1	1.20197E-7	2.52202E-3	2.52202E-3	6.32107E-3	3.01065E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.1737E-1	-7.99131E-1	-9.13105E0	-9.14187E0	4.52995E-3	9.36508E-2	2.72371E1	-3.26382E1	-3.2635E1	2.68128E1	1.19969E-7	2.51736E-3	2.51736E-3	6.31696E-3	3.0047E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17513E-1	-7.98965E-1	-9.13095E0	-9.14173E0	4.55379E-3	9.39608E-2	2.72138E1	-3.2643E1	-3.26255E1	2.67758E1	1.2003E-7	2.5199E-3	2.5199E-3	6.32799E-3	2.98675E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.17561E-1	-7.98655E-1	-9.13088E0	-9.14192E0	4.48227E-3	9.40084E-2	2.71399E1	-3.2625E1	-3.25561E1	2.68117E1	1.20197E-7	2.51747E-3	2.51747E-3	6.33478E-3	2.99764E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17108E-1	-7.98798E-1	-9.13088E0	-9.14187E0	4.52995E-3	9.40561E-2	2.72466E1	-3.26361E1	-3.26446E1	2.67742E1	1.19937E-7	2.51294E-3	2.51294E-3	6.32107E-3	2.99548E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17275E-1	-7.9875E-1	-9.13105E0	-9.14197E0	4.62532E-3	9.39369E-2	2.74408E1	-3.26744E1	-3.26347E1	2.68222E1	1.20026E-7	2.52151E-3	2.52151E-3	6.3074E-3	3.01957E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17513E-1	-7.98941E-1	-9.13124E0	-9.14168E0	4.57764E-3	9.38177E-2	2.7213E1	-3.26725E1	-3.26412E1	2.67875E1	1.19962E-7	2.52267E-3	2.52267E-3	6.32828E-3	2.99524E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.17442E-1	-7.98988E-1	-9.13112E0	-9.1419E0	4.3869E-3	9.39131E-2	2.74163E1	-3.26863E1	-3.26114E1	2.68041E1	1.19956E-7	2.51719E-3	2.51719E-3	6.3111E-3	2.98092E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17585E-1	-7.98821E-1	-9.1316E0	-9.14211E0	4.45843E-3	9.40084E-2	2.72644E1	-3.26646E1	-3.26327E1	2.68143E1	1.20076E-7	2.51439E-3	2.51439E-3	6.30149E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17466E-1	-7.98774E-1	-9.13134E0	-9.14159E0	4.48227E-3	9.377E-2	2.7319E1	-3.26677E1	-3.26255E1	2.68156E1	1.19833E-7	2.51165E-3	2.51165E-3	6.32652E-3	3.01609E-1