[Scan]
initial_time=2016-01-28T22:26:23
final_time=2016-01-28T22:26:43
ip_count=19
run=1026
dataset=10
scan=735
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=1.40253E-8
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=2.03984E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=8.71623E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.46167E-10
mult1=-9.96916E-9
mult2=-2.78049E-9
rf_tmon=-4.66864E-3
rf_agc=3.32014E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.76075E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6544E0
bslens_imon=2.45453E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2025E1
lens5a_imon=1.97173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.0482E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53494E1
cs_ef1b_imon=3.17843E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04554E2
lens23_imon=1.02329E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=1.10067E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38466E0
lens1_imon=2.78448E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64625E1
os_ef1alow_imon=2.98317E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.39498E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.03734E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.1593E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11313E1
os_restr1_imon=4.31692E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15305E1
os_ea1_imon=2.46895E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63624E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22185E0
cs_ionrep_imon=9.39327E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93242E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.95625E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.14472E-8
tplens_vset=1.4E-1
tplens_vmon=1.67663E0
tplens_imon=-2.93908E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.51805E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.57249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98455E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=4.03247E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28839E0
ionrepsh_imon=8.6509E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.19048E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.13854E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48361E0
os_ea2_imon=-6.4365E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00692E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71355E1
cs_ef2a_imon=3.19595E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0751E0
os_ef2alow_imon=-2.65266E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01749E-1
os_ef2bup_imon=-5.18589E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10815E1
os_restr2_imon=3.37564E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.09605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72066E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67891E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.96503E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.26555E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12852E0
cs_ionaccel_imon=-9.88709E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.85651E-6
window_vset=0.0E0
window_vmon=2.19925E-1
window_imon=-1.00817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.05417E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.65116E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.72072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.11995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51651E0
defgridb_imon=6.29179E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.42193E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08162E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60695E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31589E1
cs_fil1_imon=7.05573E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64518E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17087E-2
os_fil2_imon=-2.58848E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65463E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2872E-1
cs_fil2_imon=-2.31278E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32542E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21425E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.53656E-1
res40_imon=-2.36398E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=112
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16917E-1	-7.98607E-1	-9.13117E0	-9.14161E0	4.24385E-3	9.35555E-2	2.72813E1	-3.26753E1	-3.26162E1	2.67914E1	1.20038E-7	2.51793E-3	2.51793E-3	6.33211E-3	2.98792E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.17084E-1	-7.98631E-1	-9.13129E0	-9.14166E0	4.62532E-3	9.38177E-2	2.7273E1	-3.26642E1	-3.26249E1	2.67924E1	1.19841E-7	2.51287E-3	2.51287E-3	6.3445E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.17156E-1	-7.98941E-1	-9.13098E0	-9.14202E0	4.62532E-3	9.38654E-2	2.71654E1	-3.26864E1	-3.259E1	2.678E1	1.19724E-7	2.51638E-3	2.51638E-3	6.31798E-3	3.00936E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16917E-1	-7.98678E-1	-9.13084E0	-9.14199E0	4.45843E-3	9.37223E-2	2.73151E1	-3.26537E1	-3.26307E1	2.67938E1	1.19835E-7	2.51334E-3	2.51334E-3	6.29919E-3	3.03185E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16941E-1	-7.99036E-1	-9.13079E0	-9.14187E0	4.29153E-3	9.34362E-2	2.7373E1	-3.26362E1	-3.26404E1	2.68004E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16894E-1	-7.98869E-1	-9.13105E0	-9.14202E0	4.55379E-3	9.38177E-2	2.72843E1	-3.2667E1	-3.26101E1	2.67974E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32112E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17084E-1	-7.9906E-1	-9.13086E0	-9.14207E0	4.55379E-3	9.37462E-2	2.7337E1	-3.26449E1	-3.26054E1	2.67836E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17513E-1	-7.98821E-1	-9.1311E0	-9.14176E0	4.43459E-3	9.37462E-2	2.7206E1	-3.26502E1	-3.26349E1	2.68112E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17466E-1	-7.98774E-1	-9.1311E0	-9.14204E0	4.673E-3	9.35793E-2	2.74165E1	-3.26817E1	-3.2585E1	2.68004E1	1.20069E-7	2.51826E-3	2.51826E-3	6.31563E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.1749E-1	-7.98941E-1	-9.13115E0	-9.14176E0	4.673E-3	9.40323E-2	2.72862E1	-3.26337E1	-3.26378E1	2.68016E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17347E-1	-7.98941E-1	-9.13105E0	-9.14192E0	4.55379E-3	9.39131E-2	2.73558E1	-3.26762E1	-3.26136E1	2.68123E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17347E-1	-7.98869E-1	-9.13093E0	-9.14187E0	4.45843E-3	9.36508E-2	2.73886E1	-3.26879E1	-3.26176E1	2.67986E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.1737E-1	-7.98845E-1	-9.13117E0	-9.14192E0	4.52995E-3	9.35316E-2	2.71909E1	-3.26897E1	-3.2599E1	2.6804E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.1718E-1	-7.98678E-1	-9.13074E0	-9.14209E0	4.57764E-3	9.377E-2	2.73405E1	-3.26609E1	-3.2638E1	2.67926E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17251E-1	-7.99155E-1	-9.13131E0	-9.14192E0	4.48227E-3	9.38177E-2	2.7224E1	-3.2721E1	-3.26202E1	2.68024E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17323E-1	-7.9906E-1	-9.13141E0	-9.14195E0	4.57764E-3	9.35555E-2	2.74422E1	-3.26487E1	-3.26689E1	2.68013E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.02368E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.17299E-1	-7.98821E-1	-9.13129E0	-9.14207E0	4.64916E-3	9.39131E-2	2.72196E1	-3.26608E1	-3.26189E1	2.68053E1	1.20244E-7	2.51359E-3	2.51359E-3	6.34661E-3	2.98554E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17013E-1	-7.98512E-1	-9.131E0	-9.14204E0	4.3869E-3	9.37939E-2	2.73724E1	-3.26422E1	-3.26254E1	2.67944E1	1.20069E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.97963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17275E-1	-7.98869E-1	-9.13098E0	-9.14202E0	4.64916E-3	9.377E-2	2.74101E1	-3.26537E1	-3.26443E1	2.67992E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.97901E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17251E-1	-7.99203E-1	-9.13093E0	-9.14199E0	5.07832E-3	9.40561E-2	2.72066E1	-3.26645E1	-3.26002E1	2.67891E1	1.19902E-7	2.50989E-3	2.50989E-3	6.33436E-3	2.9841E-1