[Scan]
initial_time=2016-01-28T22:27:43
final_time=2016-01-28T22:28:03
ip_count=19
run=1026
dataset=10
scan=738
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.40288E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.02334E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=6.74307E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.33543E-10
mult1=-9.71631E-9
mult2=-2.74256E-9
rf_tmon=-3.50905E-3
rf_agc=3.3652E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.72853E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62076E0
bslens_imon=2.41083E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20282E1
lens5a_imon=2.02137E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.17767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02455E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.06456E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38786E0
lens1_imon=2.74507E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03745E1
cs_ea2_imon=1.38154E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84682E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.15627E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15581E1
os_ea1_imon=2.47278E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21231E0
cs_ionrep_imon=9.37111E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=1.95377E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.14511E-8
tplens_vset=1.4E-1
tplens_vmon=1.64817E0
tplens_imon=-3.80627E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57474E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.99593E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25944E0
ionrepsh_imon=8.49694E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33939E1
lens5b_imon=2.17894E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47554E0
os_ea2_imon=-7.44252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00333E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65589E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10649E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29561E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72751E1
iondef1_imon=1.09578E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.9049E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.25567E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.83948E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.32622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.60809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48629E0
defgridb_imon=6.40335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33136E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08639E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6077E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31524E1
cs_fil1_imon=7.53926E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.52144E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61485E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09358E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47965E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21366E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16679E-1	-7.99036E-1	-9.13105E0	-9.14202E0	4.41074E-3	9.38892E-2	2.74403E1	-3.26603E1	-3.2629E1	2.67789E1	1.19713E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.98554E-1
2.0E0	5.2E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1687E-1	-7.99131E-1	-9.13081E0	-9.14192E0	4.14848E-3	9.36508E-2	2.73901E1	-3.26935E1	-3.25951E1	2.68254E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16894E-1	-7.9875E-1	-9.13093E0	-9.14204E0	4.29153E-3	9.40561E-2	2.72805E1	-3.26561E1	-3.26374E1	2.68184E1	1.19735E-7	2.51802E-3	2.51802E-3	6.32151E-3	2.99706E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16941E-1	-7.98774E-1	-9.13117E0	-9.14202E0	4.45843E-3	9.37462E-2	2.73452E1	-3.26461E1	-3.26119E1	2.67897E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.17251E-1	-7.98965E-1	-9.13131E0	-9.1419E0	4.72069E-3	9.36985E-2	2.73171E1	-3.26765E1	-3.26002E1	2.67932E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17132E-1	-7.98821E-1	-9.13138E0	-9.14171E0	4.55379E-3	9.40084E-2	2.72865E1	-3.26585E1	-3.2614E1	2.67878E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17037E-1	-7.98845E-1	-9.13148E0	-9.1418E0	4.33922E-3	9.37462E-2	2.72967E1	-3.26356E1	-3.26278E1	2.68244E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.1687E-1	-7.98583E-1	-9.13122E0	-9.14183E0	4.3869E-3	9.38177E-2	2.7269E1	-3.26579E1	-3.26494E1	2.68053E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16894E-1	-7.98655E-1	-9.13105E0	-9.14176E0	4.3869E-3	9.36508E-2	2.73871E1	-3.26472E1	-3.2652E1	2.68064E1	1.2033E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.1706E-1	-7.98392E-1	-9.1311E0	-9.14183E0	4.3869E-3	9.39846E-2	2.72901E1	-3.26597E1	-3.262E1	2.68022E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01738E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17156E-1	-7.98535E-1	-9.13119E0	-9.14164E0	4.36306E-3	9.39131E-2	2.74241E1	-3.27035E1	-3.26543E1	2.68262E1	1.2033E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.17156E-1	-7.98368E-1	-9.13122E0	-9.14173E0	4.62532E-3	9.3627E-2	2.71747E1	-3.26915E1	-3.26074E1	2.68004E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.17037E-1	-7.98249E-1	-9.13129E0	-9.14164E0	4.33922E-3	9.36508E-2	2.73902E1	-3.26823E1	-3.26052E1	2.68052E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16846E-1	-7.98607E-1	-9.13093E0	-9.14183E0	4.43459E-3	9.38177E-2	2.71594E1	-3.26626E1	-3.26172E1	2.67824E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16798E-1	-7.98583E-1	-9.13126E0	-9.14183E0	4.43459E-3	9.38892E-2	2.72845E1	-3.26773E1	-3.26384E1	2.6816E1	1.19861E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16727E-1	-7.98535E-1	-9.13119E0	-9.14195E0	4.81606E-3	9.38892E-2	2.74499E1	-3.26506E1	-3.26116E1	2.68065E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17156E-1	-7.98726E-1	-9.13119E0	-9.14187E0	4.62532E-3	9.41515E-2	2.71975E1	-3.26512E1	-3.26158E1	2.6792E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16989E-1	-7.98607E-1	-9.1315E0	-9.14171E0	4.24385E-3	9.39369E-2	2.74303E1	-3.26875E1	-3.26311E1	2.68007E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.17132E-1	-7.98798E-1	-9.13138E0	-9.14192E0	4.1008E-3	9.377E-2	2.73153E1	-3.26633E1	-3.26615E1	2.68148E1	1.20078E-7	2.51575E-3	2.51575E-3	6.34385E-3	2.99014E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16989E-1	-7.98512E-1	-9.13143E0	-9.14202E0	4.48227E-3	9.37462E-2	2.72751E1	-3.26554E1	-3.2647E1	2.68082E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9952E-1