[Scan]
initial_time=2016-01-28T22:28:37
final_time=2016-01-28T22:28:56
ip_count=19
run=1026
dataset=10
scan=740
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.39023E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=1.99611E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=7.29156E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.5388E-10
mult1=-1.04267E-8
mult2=-2.90425E-9
rf_tmon=-4.45835E-3
rf_agc=3.35078E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.70519E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65379E0
bslens_imon=2.73728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19694E1
lens5a_imon=1.98561E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05084E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=3.19132E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.02387E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04955E1
cs_ea1_imon=1.07584E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41163E0
lens1_imon=2.78892E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64581E1
os_ef1alow_imon=2.9813E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03631E1
cs_ea2_imon=1.39485E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84624E1
cs_ef1a_imon=3.04334E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.15552E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1138E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.50406E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.0928E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21303E0
cs_ionrep_imon=9.4831E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01727E1
cs_anode1_imon=1.96444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.13504E-8
tplens_vset=1.4E-1
tplens_vmon=1.66461E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.50569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27047E1
iondef2_imon=1.59627E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.42707E-2
ql6_imon=3.97818E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28189E0
ionrepsh_imon=8.54154E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33393E1
lens5b_imon=2.19061E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13213E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49576E0
os_ea2_imon=-8.06467E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00539E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71055E1
cs_ef2a_imon=3.2043E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08902E0
os_ef2alow_imon=-2.54562E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25129E-1
os_ef2bup_imon=-5.14859E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10698E1
os_restr2_imon=3.38067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01673E1
cs_anode2_imon=2.0877E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74157E1
iondef1_imon=1.10524E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.88141E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.25045E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-7.77877E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47279E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56304E1
einzel_imon=7.81353E-6
window_vset=0.0E0
window_vmon=2.27629E-1
window_imon=-1.01709E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39287E-4
mask2_vset=0.0E0
mask2_vmon=-1.86858E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.56026E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.6346E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.23846E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46202E0
defgridb_imon=6.0943E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33159E1
os_fil1_imon=9.41785E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07485E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60578E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31584E1
cs_fil1_imon=7.54227E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25865E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61308E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.21158E-2
os_fil2_imon=-2.47901E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21065E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.6749E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.45874E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.87953E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21417E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40096E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50818E-1
res40_imon=-2.43615E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09688E0	-8.16631E-1	-7.98821E-1	-9.13148E0	-9.14202E0	4.45843E-3	9.37939E-2	2.72219E1	-3.26803E1	-3.26573E1	2.68094E1	1.2005E-7	2.51744E-3	2.51744E-3	6.3074E-3	2.98967E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16655E-1	-7.98821E-1	-9.13131E0	-9.14192E0	4.55379E-3	9.37462E-2	2.74024E1	-3.26474E1	-3.26499E1	2.67926E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16894E-1	-7.98941E-1	-9.13115E0	-9.14185E0	4.69685E-3	9.36508E-2	2.72927E1	-3.26903E1	-3.26136E1	2.67804E1	1.20084E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.01209E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17037E-1	-7.98845E-1	-9.13126E0	-9.14154E0	4.45843E-3	9.39608E-2	2.71351E1	-3.27011E1	-3.25816E1	2.68004E1	1.19697E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.17013E-1	-7.98655E-1	-9.13126E0	-9.14154E0	4.64916E-3	9.41992E-2	2.73502E1	-3.26434E1	-3.26098E1	2.6804E1	1.19861E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.1718E-1	-7.98655E-1	-9.13134E0	-9.14195E0	4.62532E-3	9.40323E-2	2.72986E1	-3.26644E1	-3.26225E1	2.67956E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.17013E-1	-7.98988E-1	-9.13122E0	-9.14171E0	4.50611E-3	9.38892E-2	2.7124E1	-3.2672E1	-3.2626E1	2.67926E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.16894E-1	-7.98869E-1	-9.13126E0	-9.14185E0	4.64916E-3	9.408E-2	2.7078E1	-3.26759E1	-3.26308E1	2.68178E1	1.20092E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.03637E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16822E-1	-7.98941E-1	-9.13119E0	-9.14176E0	4.60148E-3	9.43661E-2	2.7215E1	-3.26422E1	-3.26344E1	2.68028E1	1.19766E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.02277E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16941E-1	-7.98678E-1	-9.13086E0	-9.14176E0	4.33922E-3	9.43422E-2	2.72709E1	-3.26849E1	-3.26506E1	2.67998E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16751E-1	-7.98821E-1	-9.131E0	-9.14168E0	4.3869E-3	9.39846E-2	2.72597E1	-3.27369E1	-3.26248E1	2.6789E1	1.198E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.1706E-1	-7.9906E-1	-9.13091E0	-9.14183E0	4.36306E-3	9.41753E-2	2.71975E1	-3.26717E1	-3.26254E1	2.68034E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17227E-1	-7.98965E-1	-9.13124E0	-9.1418E0	3.98159E-3	9.39846E-2	2.73009E1	-3.265E1	-3.26122E1	2.68047E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17013E-1	-7.98917E-1	-9.13136E0	-9.14216E0	4.29153E-3	9.41277E-2	2.70738E1	-3.26164E1	-3.26398E1	2.68064E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16727E-1	-7.99251E-1	-9.13157E0	-9.14209E0	4.07696E-3	9.39608E-2	2.71002E1	-3.26567E1	-3.26873E1	2.6807E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16846E-1	-7.9906E-1	-9.13119E0	-9.14207E0	4.60148E-3	9.38177E-2	2.73045E1	-3.26779E1	-3.2626E1	2.68268E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9991E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16989E-1	-7.99036E-1	-9.13129E0	-9.14195E0	4.36306E-3	9.36985E-2	2.74277E1	-3.26963E1	-3.26134E1	2.68022E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16965E-1	-7.98678E-1	-9.13141E0	-9.14218E0	4.43459E-3	9.39608E-2	2.72877E1	-3.26729E1	-3.2623E1	2.6807E1	1.19749E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16846E-1	-7.98821E-1	-9.13119E0	-9.14185E0	4.3869E-3	9.39846E-2	2.738E1	-3.2659E1	-3.26225E1	2.68215E1	1.20017E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.1706E-1	-7.98941E-1	-9.13136E0	-9.14199E0	4.26769E-3	9.42707E-2	2.74157E1	-3.27047E1	-3.2611E1	2.6783E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02133E-1