[Scan]
initial_time=2016-01-28T22:29:30
final_time=2016-01-28T22:41:06
ip_count=19
run=1026
dataset=10
scan=742
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.39883E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.00242E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.48518E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.52461E-10
mult1=-9.65008E-9
mult2=-2.79584E-9
rf_tmon=-4.33148E-3
rf_agc=3.31982E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.69613E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.66393E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.0527E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=1.09445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44766E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.41313E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.04901E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.15439E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.31509E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.46794E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.10127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=9.51694E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.95485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.12615E-8
tplens_vset=1.4E-1
tplens_vmon=1.65946E0
tplens_imon=-8.30488E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.97894E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=8.64094E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48101E0
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72477E1
iondef1_imon=1.10527E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68063E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.89637E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.23143E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-3.95856E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.40947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33161E1
os_fil1_imon=9.4224E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07197E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60658E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31595E1
cs_fil1_imon=7.5693E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.71966E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61298E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23448E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65222E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-1.91514E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68282E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21519E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3282E-3
inlet_lpb_pmon=3.01485E-1
chamber_ion_pmon=1.20028E-7
chamber_cvt_pmon=2.51472E-3
foreline_cvt_pmon=2.51472E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81516E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16917E-1	-7.98416E-1	-9.13134E0	-9.14199E0	4.17233E-3	9.36031E-2	2.73237E1	-3.26741E1	-3.26158E1	2.67806E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.02133E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16846E-1	-7.98392E-1	-9.13126E0	-9.14185E0	4.52995E-3	9.38177E-2	2.73916E1	-3.26663E1	-3.26338E1	2.68238E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16965E-1	-7.98607E-1	-9.13103E0	-9.14214E0	4.41074E-3	9.377E-2	2.72025E1	-3.26596E1	-3.26349E1	2.67908E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.16607E-1	-7.98631E-1	-9.13124E0	-9.14195E0	4.45843E-3	9.37939E-2	2.7266E1	-3.26675E1	-3.26218E1	2.68118E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16679E-1	-7.98559E-1	-9.13131E0	-9.14211E0	4.22001E-3	9.36508E-2	2.72907E1	-3.26116E1	-3.26248E1	2.68163E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16274E-1	-7.98678E-1	-9.13131E0	-9.14211E0	4.52995E-3	9.377E-2	2.7298E1	-3.26579E1	-3.2626E1	2.67955E1	1.19978E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98819E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-8.16584E-1	-7.98512E-1	-9.13098E0	-9.14197E0	4.62532E-3	9.37462E-2	2.72721E1	-3.26212E1	-3.26362E1	2.68052E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09727E0	-8.1656E-1	-7.98798E-1	-9.13107E0	-9.14164E0	4.33922E-3	9.38892E-2	2.73207E1	-3.26206E1	-3.26302E1	2.68154E1	1.19601E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.16655E-1	-7.9844E-1	-9.1315E0	-9.14211E0	4.14848E-3	9.37939E-2	2.72769E1	-3.26707E1	-3.26315E1	2.68106E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.16536E-1	-7.98488E-1	-9.13131E0	-9.1419E0	4.17233E-3	9.39131E-2	2.7367E1	-3.26838E1	-3.26189E1	2.67992E1	1.20031E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.00942E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.16822E-1	-7.9875E-1	-9.13136E0	-9.1418E0	4.50611E-3	9.40084E-2	2.72648E1	-3.26639E1	-3.2599E1	2.68028E1	1.19601E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16488E-1	-7.98702E-1	-9.13136E0	-9.14202E0	4.3869E-3	9.39369E-2	2.74138E1	-3.2653E1	-3.2644E1	2.68136E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16774E-1	-7.98845E-1	-9.13131E0	-9.14171E0	4.62532E-3	9.38892E-2	2.74797E1	-3.26354E1	-3.26419E1	2.68046E1	1.19851E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00966E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16798E-1	-7.98607E-1	-9.13131E0	-9.1419E0	4.55379E-3	9.37939E-2	2.73868E1	-3.26392E1	-3.25984E1	2.67974E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.03449E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16727E-1	-7.98798E-1	-9.13143E0	-9.14171E0	4.3869E-3	9.37462E-2	2.71579E1	-3.26368E1	-3.26386E1	2.6786E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.16727E-1	-7.9875E-1	-9.13131E0	-9.14192E0	4.33922E-3	9.40323E-2	2.73562E1	-3.26554E1	-3.26573E1	2.67885E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.97963E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16584E-1	-7.98655E-1	-9.13131E0	-9.14197E0	4.26769E-3	9.38654E-2	2.71794E1	-3.26667E1	-3.26178E1	2.68034E1	1.19749E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16631E-1	-7.98535E-1	-9.13155E0	-9.14192E0	4.31538E-3	9.41038E-2	2.71861E1	-3.26801E1	-3.26579E1	2.68262E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.98481E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16488E-1	-7.98392E-1	-9.13136E0	-9.14185E0	4.36306E-3	9.38177E-2	2.73336E1	-3.26676E1	-3.26454E1	2.67903E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.97901E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16512E-1	-7.98535E-1	-9.13153E0	-9.14199E0	4.45843E-3	9.39131E-2	2.72477E1	-3.26404E1	-3.2616E1	2.68063E1	1.20028E-7	2.51472E-3	2.51472E-3	6.3282E-3	3.01485E-1