[Scan]
initial_time=2016-01-28T22:43:00
final_time=2016-01-28T22:43:20
ip_count=19
run=1026
dataset=10
scan=747
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08863E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.3961E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.9985E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.4018E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-2.0293E-10
mult1=-1.00775E-8
mult2=-2.79646E-9
rf_tmon=-4.60856E-3
rf_agc=3.32495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.66636E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64543E0
bslens_imon=2.63895E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19758E1
lens5a_imon=1.98914E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05131E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53376E1
cs_ef1b_imon=3.17876E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05226E1
cs_ea1_imon=1.08845E-5
lens1_vset=-5.0E0
lens1_vmon=-5.394E0
lens1_imon=2.58681E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.038E1
cs_ea2_imon=1.4093E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.04973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.14739E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.31148E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15352E1
os_ea1_imon=2.47094E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24457E0
cs_ionrep_imon=9.40712E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93524E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.12379E-8
tplens_vset=1.4E-1
tplens_vmon=1.63969E0
tplens_imon=-1.07253E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.50038E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.58207E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98499E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.06148E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25152E0
ionrepsh_imon=8.56935E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33536E1
lens5b_imon=2.18519E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46067E0
os_ea2_imon=-6.80827E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00578E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.38418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30832E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10838E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72474E1
iondef1_imon=1.08949E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.8597E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.83071E-1
olens1_imon=7.21534E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-7.49045E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=8.0158E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.54387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.78606E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.07111E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47321E0
defgridb_imon=5.99349E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.42204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08464E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60437E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31579E1
cs_fil1_imon=5.52104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.87874E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61256E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07833E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.36757E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.6955E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.78493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73708E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16464E-1	-7.98702E-1	-9.13131E0	-9.14192E0	4.24385E-3	9.40323E-2	2.72991E1	-3.26675E1	-3.26446E1	2.67804E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.04063E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.16607E-1	-7.98678E-1	-9.13143E0	-9.14171E0	4.1008E-3	9.4223E-2	2.73236E1	-3.26446E1	-3.26556E1	2.68036E1	1.20106E-7	2.50668E-3	2.50668E-3	6.33436E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16655E-1	-7.98535E-1	-9.13112E0	-9.14164E0	4.36306E-3	9.39369E-2	2.72859E1	-3.26831E1	-3.25942E1	2.68101E1	1.19841E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.00348E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16607E-1	-7.98845E-1	-9.13122E0	-9.14202E0	4.72069E-3	9.408E-2	2.72528E1	-3.26705E1	-3.26248E1	2.67989E1	1.19872E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.99348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16679E-1	-7.98702E-1	-9.13117E0	-9.14176E0	4.41074E-3	9.41038E-2	2.74625E1	-3.26458E1	-3.2623E1	2.67613E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16464E-1	-7.98655E-1	-9.1315E0	-9.14164E0	4.48227E-3	9.40323E-2	2.71975E1	-3.26506E1	-3.26134E1	2.6819E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16417E-1	-7.98488E-1	-9.13112E0	-9.14173E0	4.33922E-3	9.40084E-2	2.73904E1	-3.26687E1	-3.2647E1	2.68028E1	1.2054E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16298E-1	-7.98774E-1	-9.13091E0	-9.14164E0	4.43459E-3	9.40323E-2	2.72065E1	-3.26413E1	-3.26101E1	2.68144E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01085E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.16369E-1	-7.98893E-1	-9.13143E0	-9.14161E0	4.55379E-3	9.39846E-2	2.72606E1	-3.26338E1	-3.26086E1	2.68202E1	1.19925E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.9829E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09742E0	-8.16274E-1	-7.98655E-1	-9.13143E0	-9.14183E0	4.43459E-3	9.41038E-2	2.73411E1	-3.2605E1	-3.2623E1	2.68022E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16417E-1	-7.98512E-1	-9.13131E0	-9.14161E0	4.52995E-3	9.38416E-2	2.72927E1	-3.26242E1	-3.26891E1	2.67872E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.1625E-1	-7.98345E-1	-9.13126E0	-9.1418E0	4.36306E-3	9.40084E-2	2.73063E1	-3.26536E1	-3.26156E1	2.68094E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16059E-1	-7.98631E-1	-9.13134E0	-9.14192E0	4.3869E-3	9.38177E-2	2.73279E1	-3.26921E1	-3.26392E1	2.68076E1	1.2054E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16202E-1	-7.98488E-1	-9.13122E0	-9.14164E0	4.31538E-3	9.377E-2	2.72769E1	-3.26561E1	-3.26212E1	2.678E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16131E-1	-7.98535E-1	-9.13136E0	-9.14178E0	4.48227E-3	9.40084E-2	2.73435E1	-3.26909E1	-3.26056E1	2.67734E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.16131E-1	-7.98798E-1	-9.13148E0	-9.14178E0	4.12464E-3	9.408E-2	2.72991E1	-3.26404E1	-3.26434E1	2.6804E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.03712E-1
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.1656E-1	-7.98774E-1	-9.13131E0	-9.14149E0	4.24385E-3	9.36985E-2	2.72977E1	-3.26613E1	-3.26277E1	2.67897E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16083E-1	-7.98821E-1	-9.13146E0	-9.14173E0	4.57764E-3	9.408E-2	2.73431E1	-3.26376E1	-3.26229E1	2.68275E1	1.1988E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.0223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16369E-1	-7.9875E-1	-9.13157E0	-9.14204E0	4.72069E-3	9.36031E-2	2.72996E1	-3.26578E1	-3.26376E1	2.67878E1	1.19829E-7	2.51498E-3	2.51498E-3	6.29603E-3	3.01065E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16345E-1	-7.98726E-1	-9.13136E0	-9.14187E0	4.62532E-3	9.37462E-2	2.72474E1	-3.26777E1	-3.26428E1	2.67962E1	1.20226E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01085E-1