[Scan]
initial_time=2016-01-28T22:44:20
final_time=2016-01-28T22:44:40
ip_count=19
run=1026
dataset=10
scan=750
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09696E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.39107E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.01855E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=4.06265E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=-2.17223E-10
mult1=-9.72835E-9
mult2=-2.81842E-9
rf_tmon=-5.10123E-3
rf_agc=3.24744E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.71355E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05331E1
cs_ea1_imon=1.10671E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43204E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.40952E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=3.02955E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.14598E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.47623E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.10668E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=9.49892E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=1.95088E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.12856E-8
tplens_vset=1.4E-1
tplens_vmon=1.68049E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.99568E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=8.57605E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.19576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45097E0
os_ea2_imon=-4.57964E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=3.35319E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.11693E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.94857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.19737E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17159E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=7.27106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33174E1
os_fil1_imon=9.40108E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06314E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60503E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3158E1
cs_fil1_imon=6.71035E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94191E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61068E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60195E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.83298E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2146E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.86031E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.1656E-1	-7.98678E-1	-9.13129E0	-9.14187E0	4.33922E-3	9.41753E-2	2.72913E1	-3.26693E1	-3.26356E1	2.6777E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02396E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16321E-1	-7.98559E-1	-9.13136E0	-9.14178E0	4.43459E-3	9.408E-2	2.74104E1	-3.2671E1	-3.26266E1	2.67891E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.98222E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16536E-1	-7.98607E-1	-9.13148E0	-9.14185E0	4.07696E-3	9.41515E-2	2.72402E1	-3.26447E1	-3.2611E1	2.67876E1	1.1993E-7	2.51472E-3	2.51472E-3	6.3074E-3	2.99506E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.1625E-1	-7.98535E-1	-9.13157E0	-9.14207E0	4.00543E-3	9.41992E-2	2.74208E1	-3.26621E1	-3.26383E1	2.68172E1	1.20045E-7	2.52407E-3	2.52407E-3	6.3131E-3	2.989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16512E-1	-7.98631E-1	-9.13141E0	-9.14204E0	4.33922E-3	9.40323E-2	2.71653E1	-3.26343E1	-3.26431E1	2.67972E1	1.20031E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.98819E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16441E-1	-7.9875E-1	-9.13165E0	-9.14195E0	4.3869E-3	9.38892E-2	2.73147E1	-3.2629E1	-3.26344E1	2.6782E1	1.19953E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.1656E-1	-7.98726E-1	-9.13162E0	-9.14173E0	4.3869E-3	9.40561E-2	2.7308E1	-3.26703E1	-3.26189E1	2.68036E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16536E-1	-7.98512E-1	-9.13155E0	-9.14168E0	4.62532E-3	9.37939E-2	2.73792E1	-3.26787E1	-3.26064E1	2.67957E1	1.20106E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09711E0	-8.16584E-1	-7.98869E-1	-9.13193E0	-9.14168E0	4.62532E-3	9.37939E-2	2.7393E1	-3.26915E1	-3.26148E1	2.68157E1	1.19819E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09727E0	-8.16154E-1	-7.98702E-1	-9.13174E0	-9.14173E0	4.55379E-3	9.377E-2	2.73075E1	-3.26549E1	-3.26404E1	2.67974E1	1.20004E-7	2.52169E-3	2.52169E-3	6.2752E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09696E0	-8.16202E-1	-7.98798E-1	-9.13172E0	-9.14195E0	4.57764E-3	9.40323E-2	2.71567E1	-3.26302E1	-3.2596E1	2.68136E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16488E-1	-7.98488E-1	-9.13157E0	-9.14185E0	4.50611E-3	9.40323E-2	2.73405E1	-3.26332E1	-3.26176E1	2.6801E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16202E-1	-7.98559E-1	-9.13153E0	-9.14195E0	4.36306E-3	9.42469E-2	2.73604E1	-3.2653E1	-3.26188E1	2.67986E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09789E0	-8.16083E-1	-7.98583E-1	-9.13165E0	-9.1418E0	4.55379E-3	9.39846E-2	2.73291E1	-3.26332E1	-3.26188E1	2.67848E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09727E0	-8.16035E-1	-7.98559E-1	-9.13136E0	-9.14164E0	4.50611E-3	9.41753E-2	2.71393E1	-3.26494E1	-3.26128E1	2.67962E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09812E0	-8.16083E-1	-7.98464E-1	-9.13138E0	-9.14187E0	4.76837E-3	9.4223E-2	2.73511E1	-3.26596E1	-3.26266E1	2.68123E1	1.19653E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01347E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09734E0	-8.16131E-1	-7.98631E-1	-9.13138E0	-9.14166E0	4.60148E-3	9.41753E-2	2.73291E1	-3.26561E1	-3.26356E1	2.67899E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.15773E-1	-7.98512E-1	-9.13117E0	-9.14142E0	5.00679E-3	9.41753E-2	2.72968E1	-3.26567E1	-3.26284E1	2.68058E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3514E-3	3.03185E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09742E0	-8.16107E-1	-7.9844E-1	-9.13093E0	-9.14137E0	4.88758E-3	9.377E-2	2.72414E1	-3.26614E1	-3.26644E1	2.68041E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09696E0	-8.16154E-1	-7.98559E-1	-9.13138E0	-9.14164E0	4.64916E-3	9.38654E-2	2.72919E1	-3.2638E1	-3.26476E1	2.68298E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1