[Scan]
initial_time=2016-01-28T22:44:47
final_time=2016-01-28T22:45:06
ip_count=19
run=1026
dataset=10
scan=751
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.0885E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.39408E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.00475E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=4.7965E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.27344E-10
mult1=-1.02341E-8
mult2=-2.86832E-9
rf_tmon=-3.64724E-3
rf_agc=3.32975E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68425E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64402E0
bslens_imon=2.701E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19976E1
lens5a_imon=1.98391E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05232E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=3.17901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04639E1
cs_ea1_imon=1.10129E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41296E0
lens1_imon=2.63855E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64633E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.42819E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.04914E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.14742E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11348E1
os_restr1_imon=4.30889E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15018E1
os_ea1_imon=2.47498E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63822E1
os_ef1bup_imon=3.08282E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.257E0
cs_ionrep_imon=9.5217E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93343E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01709E1
cs_anode1_imon=1.97689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.11892E-8
tplens_vset=1.4E-1
tplens_vmon=1.66531E0
tplens_imon=-2.43492E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50605E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.61184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98485E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.90413E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28332E0
ionrepsh_imon=8.49327E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.19878E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74564E1
cs_ef2b_imon=3.13447E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4988E0
os_ea2_imon=-6.9283E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70971E1
cs_ef2a_imon=3.19585E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07202E0
os_ef2alow_imon=-2.61174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86404E-1
os_ef2bup_imon=-5.07436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.38447E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.3081E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.10601E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74018E1
iondef1_imon=1.07742E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.07942E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.89758E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.1995E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10956E0
cs_ionaccel_imon=-8.37758E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47447E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56468E1
einzel_imon=7.66913E-6
window_vset=0.0E0
window_vmon=2.39428E-1
window_imon=-1.00243E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.87099E1
mask2_imon=-4.22331E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.362E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.88451E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50195E3
multb_neg_imon=7.09387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5966E0
defgridb_imon=6.03238E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33173E1
os_fil1_imon=9.42121E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.10049E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60607E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31545E1
cs_fil1_imon=6.82494E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86267E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61077E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26441E-2
os_fil2_imon=-2.48785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57683E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28845E-1
cs_fil2_imon=-2.10112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.84107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21429E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.36305E-1
res40_imon=-2.31982E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16464E-1	-7.9844E-1	-9.13134E0	-9.14192E0	4.72069E-3	9.38177E-2	2.73346E1	-3.26543E1	-3.26095E1	2.67902E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.04695E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16584E-1	-7.98607E-1	-9.13146E0	-9.14183E0	4.72069E-3	9.408E-2	2.7236E1	-3.26398E1	-3.2626E1	2.67908E1	1.19902E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16417E-1	-7.9844E-1	-9.1315E0	-9.14192E0	4.41074E-3	9.39846E-2	2.73051E1	-3.26446E1	-3.26434E1	2.67968E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01085E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16488E-1	-7.9844E-1	-9.1316E0	-9.14183E0	4.22001E-3	9.39369E-2	2.73737E1	-3.26474E1	-3.26309E1	2.6822E1	1.20042E-7	2.52131E-3	2.52131E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16703E-1	-7.98655E-1	-9.1316E0	-9.14197E0	4.41074E-3	9.38416E-2	2.72678E1	-3.26374E1	-3.26428E1	2.68094E1	1.19925E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16488E-1	-7.98535E-1	-9.13141E0	-9.14178E0	4.48227E-3	9.408E-2	2.72294E1	-3.26374E1	-3.26543E1	2.67926E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16274E-1	-7.98416E-1	-9.13122E0	-9.14178E0	4.8399E-3	9.41277E-2	2.73938E1	-3.25981E1	-3.26356E1	2.68219E1	1.20161E-7	2.52058E-3	2.52058E-3	6.32017E-3	2.98333E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.1625E-1	-7.98512E-1	-9.13153E0	-9.14156E0	4.69685E-3	9.36985E-2	2.72659E1	-3.26395E1	-3.26352E1	2.68138E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16607E-1	-7.98774E-1	-9.13146E0	-9.14192E0	4.52995E-3	9.37462E-2	2.72155E1	-3.26458E1	-3.26521E1	2.68286E1	1.20435E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1625E-1	-7.98726E-1	-9.13117E0	-9.14171E0	4.74453E-3	9.377E-2	2.74126E1	-3.26939E1	-3.26098E1	2.67824E1	1.20083E-7	2.5169E-3	2.5169E-3	6.3074E-3	2.99769E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16584E-1	-7.98678E-1	-9.1315E0	-9.14192E0	4.8399E-3	9.37939E-2	2.72408E1	-3.2626E1	-3.26122E1	2.68059E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16441E-1	-7.9875E-1	-9.1315E0	-9.14214E0	4.8399E-3	9.377E-2	2.73874E1	-3.26549E1	-3.2617E1	2.68004E1	1.20435E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16274E-1	-7.98917E-1	-9.1315E0	-9.14204E0	4.81606E-3	9.36031E-2	2.72642E1	-3.26789E1	-3.26038E1	2.67956E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16369E-1	-7.98702E-1	-9.13143E0	-9.14202E0	4.29153E-3	9.38177E-2	2.72703E1	-3.26649E1	-3.26166E1	2.68076E1	1.2033E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16202E-1	-7.98631E-1	-9.13136E0	-9.14214E0	4.64916E-3	9.38654E-2	2.72672E1	-3.2653E1	-3.2632E1	2.6825E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1625E-1	-7.98678E-1	-9.13141E0	-9.14195E0	4.673E-3	9.36747E-2	2.72967E1	-3.2653E1	-3.26434E1	2.68112E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16393E-1	-7.98607E-1	-9.13115E0	-9.14178E0	4.52995E-3	9.37939E-2	2.71711E1	-3.26512E1	-3.26092E1	2.68184E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16679E-1	-7.98488E-1	-9.13098E0	-9.14197E0	4.45843E-3	9.408E-2	2.74225E1	-3.26744E1	-3.26124E1	2.68337E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16441E-1	-7.98678E-1	-9.13136E0	-9.1419E0	4.14848E-3	9.41038E-2	2.71912E1	-3.26773E1	-3.25641E1	2.68046E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16202E-1	-7.98702E-1	-9.13129E0	-9.14185E0	4.673E-3	9.38654E-2	2.74018E1	-3.26639E1	-3.26254E1	2.68046E1	1.19697E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01738E-1